Patents Assigned to Microtome Precision, Inc.
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Patent number: 8016114Abstract: A continuously electrically-conductive container contains an electrically-insulating support for holding an electric-field-sensitive article, such as a reticle, so that the article is shielded from external electric fields and is not in electrical contact with a conductive container wall. A SMIF pod comprises an electrically conductive container for holding an electric-field-sensitive article. A system has boundary walls that form a chamber for a controlled environment. The system includes a load port for receiving a SMIF pod and an end effector made of insulating material for moving a field-sensitive article within the chamber to and from the SMIF pod. An ionizer neutralizes electric charges on the field-sensitive article.Type: GrantFiled: July 23, 2009Date of Patent: September 13, 2011Assignee: Microtome Precision, Inc.Inventors: Gavin Charles Rider, Joseph A. Durben, Robert K. Lindsley
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Patent number: 7775363Abstract: A semiconductor reticle transportation container includes a box and a base, the box having an opening and the base including a reticle support. The reticle is placed on the support and the box is placed on the base so that the reticle passes through the opening while being lifted off of the support by plungers contacting the lower edge of the reticle. After the box is closed, the reticle is compliantly constrained horizontally and vertically and is held away from the support.Type: GrantFiled: July 23, 2009Date of Patent: August 17, 2010Assignee: Microtome Precision, Inc.Inventors: Joseph A. Durben, Gavin Charles Rider, Robert K. Lindsley
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Patent number: 7691547Abstract: A reticle includes an image area having one or more electrically conductive portions susceptible to damage by an electric field and an electric field sensor feature, the sensor feature adapted to be at least as susceptible to being altered by the electric field as the electrically conductive portions of the image area, the sensor feature being located in a position which is more readily viewable to show alteration than the electrically conductive portions of the image area.Type: GrantFiled: March 16, 2007Date of Patent: April 6, 2010Assignee: Microtome Precision, Inc.Inventor: Gavin Charles Rider
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Publication number: 20090321306Abstract: A continuously electrically-conductive container contains an electrically-insulating support for holding an electric-field-sensitive article, such as a reticle, so that the article is shielded from external electric fields and is not in electrical contact with a conductive container wall. A SMIF pod comprises an electrically conductive container for holding an electric-field-sensitive article. A system has boundary walls that form a chamber for a controlled environment. The system includes a load port for receiving a SMIF pod and an end effector made of insulating material for moving a field-sensitive article within the chamber to and from the SMIF pod. An ionizer neutralizes electric charges on the field-sensitive article.Type: ApplicationFiled: July 23, 2009Publication date: December 31, 2009Applicant: Microtome Precision, Inc.Inventors: Gavin C. Rider, Joseph A. Durben, Robert K. Lindsley
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Publication number: 20090277810Abstract: A semiconductor reticle transportation container includes a box and a base, the box having an opening and the base including a reticle support. The reticle is placed on the support and the box is placed on the base so that the reticle passes through the opening while being lifted off of the support by plungers contacting the lower edge of the reticle. After the box is closed, the reticle is compliantly constrained horizontally and vertically and is held away from the support.Type: ApplicationFiled: July 23, 2009Publication date: November 12, 2009Applicant: Microtome Precision, Inc.Inventors: Joseph A. Durben, Gavin C. Rider, Robert K. Lindsley
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Patent number: 7581372Abstract: A semiconductor reticle transportation container includes a box and a base, the box having an opening and the base including a reticle support. The reticle is placed on the support and the box is placed on the base so that the reticle passes through the opening while being lifted off of the support by plungers contacting the lower edge of the reticle. After the box is closed, the reticle is compliantly constrained horizontally and vertically and is held away from the support.Type: GrantFiled: August 17, 2007Date of Patent: September 1, 2009Assignee: Microtome Precision, Inc.Inventors: Joseph A. Durben, Gavin Charles Rider, Robert K. Lindsley
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Publication number: 20080041760Abstract: A semiconductor reticle transportation container includes a box and a base, the box having an opening and the base including a reticle support. The reticle is placed on the support and the box is placed on the base so that the reticle passes through the opening while being lifted off of the support by plungers contacting the lower edge of the reticle. After the box is closed, the reticle is compliantly constrained horizontally and vertically and is held away from the support.Type: ApplicationFiled: August 17, 2007Publication date: February 21, 2008Applicant: Microtome Precision, Inc.Inventors: Joseph A. Durben, Gavin C. Rider, Robert K. Lindsley
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Publication number: 20070218667Abstract: A reticle includes an image area having one or more electrically conductive portions susceptible to damage by an electric field and an electric field sensor feature, the sensor feature adapted to be at least as susceptible to being altered by the electric field as the electrically conductive portions of the image area, the sensor feature being located in a position which is more readily viewable to show alteration than the electrically conductive portions of the image area.Type: ApplicationFiled: March 16, 2007Publication date: September 20, 2007Applicant: Microtome Precision, Inc.Inventor: Gavin C. Rider
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Patent number: D404019Type: GrantFiled: May 15, 1997Date of Patent: January 12, 1999Assignee: Microtome Precision, Inc.Inventors: Robert K. Lindsley, Joseph A. Durben, Charles D. Travis