Patents Assigned to Mikrosens Elektronik San. ve Tic. A.S.
  • Patent number: 8941064
    Abstract: This disclosure discusses various methods for manufacturing uncooled infrared detectors by using foundry-defined silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) wafers, each of which may include a substrate layer, an insulation layer having a pixel region and a wall region surrounding the pixel region, a pixel structure formed on the pixel region of the insulation layer, a wall structure formed adjacent to the pixel structure and on the wall region of the insulation layer, a dielectric layer covering the pixel structure and the wall structure, a pixel mask formed within the dielectric layer and for protecting the pixel structure during a dry etching process, and a wall mask formed within the dielectric layer and for protecting the wall structure during the dry etching process, thereby releasing a space defined between the wall structure and the pixel structure after the dry etching process.
    Type: Grant
    Filed: April 12, 2011
    Date of Patent: January 27, 2015
    Assignee: Mikrosens Elektronik San. ve Tic. A.S.
    Inventors: Tayfun Akin, Selim Eminoglu