Abstract: At least one layer in a coating located on a surface of a substrate is a domain structure layer constituted of two or more domains different in composition and a thin layer located between the domains and being different in composition from each of the domains. The thin layer is located between any one domain and any another domain and in contact therewith. When the size of each of a plurality of first domains present in the domain structure layer is defined as a diameter of a virtual circumcircle in contact with each first domain, the average value of the size of each first domain is not smaller than 1 nm and not greater than 10 nm and a thickness of the thin layer in a direction of thickness of the domain structure layer is not less than 1 atomic layer and not more than 10 atomic layers.

Abstract: A method is described for coating a substrate to provide a controlled in-plane compositional modulation, in which first and second targets are activated, with one of the targets being activated by a series of activation pulses to release particles by pulsed evaporation, sublimation, or sputtering that impinge onto the substrate for coating thereof, while the other one of the targets is substantially passive.

Abstract: The present disclosure provides a method of coating a substrate so as to provide a controlled in-plane compositional modulation. The method comprises providing a first target of a first material or material composition, providing a second target (104, 204, 304) of a second material or material composition, different from the first material or material composition; activating the first and second targets (103, 104; 203 204; 303, 304) to release particles by evaporation, sublimation or sputtering; and causing the released particles to impinge onto the substrate (102, 202, 302) such that the substrate is coated. Activation of one of the targets (103, 104; 203 204; 303, 304) includes providing a series of activation pulses, such that pulsed evaporation, sublimation or sputtering of particles is provided, while the other one of the targets (103, 104; 203 204; 303, 304) is substantially passive.