Abstract: The invention relates to a gas sensor having a mechanical microresonator, which has an excitation apparatus for optically exciting a mechanical oscillation of the microresonator as well as a reading apparatus for detecting the oscillation of the microresonator, wherein the reading apparatus comprises a waveguide which is implemented together with the microresonator on a dielectric or semiconducting substrate and is intended to optically read the oscillation of the microresonator, and wherein the excitation apparatus has an optical waveguide which is implemented on the same substrate and optically connects an excitation light source to the immediate surroundings of the microresonator. The invention also relates to a use of such a sensor to analyse a gas composition.
Type:
Grant
Filed:
September 9, 2009
Date of Patent:
October 14, 2014
Assignees:
Miopas GmbH, Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Inventors:
Helmut Heidrich, Peter Lutzow, Wolfgang Schlaak, Herbert Venghaus, Thomas Wegner
Abstract: The invention relates to a gas sensor having a mechanical microresonator, which has an excitation apparatus for optically exciting a mechanical oscillation of the microresonator as well as a reading apparatus for detecting the oscillation of the microresonator, wherein the reading apparatus comprises a waveguide which is implemented together with the microresonator on a dielectric or semiconducting substrate and is intended to optically read the oscillation of the microresonator, and wherein the excitation apparatus has an optical waveguide which is implemented on the same substrate and optically connects an excitation light source to the immediate surroundings of the microresonator. The invention also relates to a use of such a sensor to analyse a gas composition.
Type:
Application
Filed:
September 9, 2009
Publication date:
December 1, 2011
Applicants:
Miopas GmbH, Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
Inventors:
Helmut Heidrich, Peter Lutzow, Wolfgang Schlaak, Herbert Venghaus, Thomas Wegner