Abstract: The present invention includes a transfer system for flipping and checking electronic devices. A first rotary device has a plurality of transfer heads configured to pick electronic devices from a wafer table and place the electronic devices on a transfer head of a second rotary device. Check stations can be positioned around the first and second rotary devices and configured to inspect or check the electronic devices during the flipping process. The transfer system can further include an imaging device to inspect the accuracy of picking and placing of the electronic devices during the flipping process. The wafer table and the first rotary device are inclined to increase the operation space. The system accurately picks, flips and transfers chips at a high operation speed.
Type:
Grant
Filed:
April 27, 2016
Date of Patent:
June 30, 2020
Assignee:
MIT SEMICONDUCTOR PTE LTD
Inventors:
Siong Huat Neo, Kim Mone Kwong, Kok Yeow Lim, Zhi Qiang Mao
Abstract: The present invention includes a transfer system for flipping and checking electronic devices. A first rotary device has a plurality of transfer heads configured to pick electronic devices from a wafer table and place the electronic devices on a transfer head of a second rotary device. Check stations can be positioned around the first and second rotary devices and configured to inspect or check the electronic devices during the flipping process. The transfer system can further include an imaging device to inspect the accuracy of picking and placing of the electronic devices during the flipping process. The wafer table and the first rotary device are inclined to increase the operation space. The system accurately picks, flips and transfers chips at a high operation speed.
Type:
Application
Filed:
April 27, 2016
Publication date:
May 9, 2019
Applicant:
MIT SEMICONDUCTOR PTE LTD
Inventors:
Siong Huat NEO, Kim Mone KWONG, Kok Yeow LIM, Zhi Qiang MAO