Patents Assigned to Mitsubishi Material Quartz Corporation
  • Publication number: 20050050922
    Abstract: The amount of residual carbon and hydroxyl groups in a synthetic quartz powder made by a wet process is reduced by baking the synthetic quartz powder in a low pressure atmosphere. Quartz glass crucibles made using the synthetic quartz powder have low bubble contents, and are particularly suited for growing single crystals.
    Type: Application
    Filed: September 22, 2004
    Publication date: March 10, 2005
    Applicant: MITSUBISHI MATERIALS QUARTZ CORPORATION
    Inventors: Masanori Fukui, Takahiro Sato
  • Patent number: 6826927
    Abstract: The amount of residual carbon and hydroxyl groups in a synthetic quartz powder made by a wet process is reduced by baking the synthetic quartz powder in a low pressure atmosphere. Quartz glass crucibles made using the synthetic quartz powder have low bubble contents, and are particularly suited for growing single crystals.
    Type: Grant
    Filed: June 28, 2001
    Date of Patent: December 7, 2004
    Assignee: Mitsubishi Materials Quartz Corporation
    Inventors: Masanori Fukui, Takahiro Sato
  • Patent number: 6808744
    Abstract: A composite crucible for pulling up monocrystalline silicon, which is superior in shape stability and suitable for a large-sized one is provided. The composite crucible is characterized in that a carbonaceous material as an outer layer and a quartz glass as an inner layer are integrally formed. Methods for preparing and regenerating a composite crucible are also disclosed.
    Type: Grant
    Filed: January 28, 2003
    Date of Patent: October 26, 2004
    Assignee: Mitsubishi Material Quartz Corporation
    Inventors: Yoshiyuki Tsuji, Masanori Fukui, Ken-ichi Hiroshima
  • Patent number: 6524668
    Abstract: A composite crucible for pulling up monocrystalline silicone, which is superior in shape stability and suitable for a large-sized one is provided. The composite crucible is characterized in that a carbonaceous material as an outer layer and a quartz glass as an inner layer are integrally formed.
    Type: Grant
    Filed: June 16, 1999
    Date of Patent: February 25, 2003
    Assignee: Mitsubishi Material Quartz Corporation
    Inventors: Yoshiyuki Tsuji, Masanori Fukui, Ken-ichi Hiroshima
  • Publication number: 20020017114
    Abstract: The amount of residual carbon and hydroxyl groups in a synthetic quartz powder made by a wet process is reduced by baking the synthetic quartz powder in a low pressure atmosphere. Quartz glass crucibles made using the synthetic quartz powder have low bubble contents, and are particularly suited for growing single crystals.
    Type: Application
    Filed: June 28, 2001
    Publication date: February 14, 2002
    Applicant: MITSUBISHI MATERIALS QUARTZ CORPORATION
    Inventors: Masanori Fukui, Takahiro Sato
  • Patent number: 5895527
    Abstract: The invention relates to a single crystal pulling apparatus comprising; an outer crucible 11 positioned inside a chamber (gas tight container) 2, for storing a semiconductor melt 21, and an inner crucible 30 comprising a cylindrical partition body, mounted inside the outer crucible 11 to form a double crucible, and wherein a single crystal of semiconductor 26 is pulled from the semiconductor melt 21 stored inside the inner crucible 30. With this arrangement, the inner crucible 30 is made from quartz and comprises an inside layer A, an outside layer C, and an intermediate layer B which lies between the inside layer A and the outside layer C, and the intermediate layer B is made from quartz with a larger gas bubble content than the quartz which makes up the inside layer A and the outside layer C of the inner crucible 30.
    Type: Grant
    Filed: January 29, 1997
    Date of Patent: April 20, 1999
    Assignees: Mitsubishi Materials Silicon Corporation, Mitsubishi Materials Quartz Corporation, Mitsubishi Materials Corporation
    Inventors: Hiroaki Taguchi, Takashi Atami, Hisashi Furuya, Masanori Fukui, Michio Kida