Abstract: A rotary type CVD film forming apparatus for mass production, wherein a film forming chamber is formed by providing one columnar body having a plurality of housing spaces for housing one plastic container each in one said housing space, a plurality of said film forming chambers is arranged on a rotation support body at equal intervals in a circular state, source gas introduction means serving as an external electrode which introduce a source gas that is converted to plasma inside the plastic containers housed in each of said film forming chambers is provided, and high frequency supply means which supply a high frequency to the external electrode of each of said film forming chambers is provided to form a CVD (chemical vapor growing) film on the internal surfaces of said plastic containers.

Abstract: A method and apparatus for cleaning a source gas introduction pipe, which can prevent strong adhesion of contaminant mainly containing carbon powder on an outer surface of the source gas introduction pipe to easily remove the contaminant in a short period of time. While compressed air is sprayed toward the contaminant, the contaminant removed by the spray of the compressed air is exhausted outside a system of a deposition chamber by suction and exhausting device so that the contaminant is not transferred to sides of the deposition chamber and a plastic container in which a CVD film is formed, in a process for extracting the source gas introduction pipe from the plastic container after the CVD film is formed on an inner surface of the plastic container.

Abstract: Disclosed is an apparatus for producing DLC film-coated plastic containers, which comprises an outer electrode unit disposed outside a plastic container, an inner electrode disposed inside the plastic container, a duct through which a raw material gas of a carbon source is fed into the plastic container having been degassed, and a high-frequency oscillator for applying a voltage between the outer electrode unit and the inner electrode with a carbon source gas being fed into the container, thereby to generate plasma to form a DLC film on the inner surface of the plastic container. In the apparatus, the outer electrode unit comprises a bottom electrode disposed along the bottom of the plastic container, and a body electrode disposed along the body of the plastic container, and the upper edge of the bottom electrode is positioned below the center between the top and the bottom of the plastic container.

Abstract: A method of manufacturing a gas barrier film coated plastic container with high gas-barrier properties by solving a problem in a conventional method wherein the formation of a gas barrier film is obstructed by water molecules adsorbed in the plastic container and the container with reduced gas-barrier properties is manufactured. The method is characterized by comprising the steps of decreasing a pressure inside the plastic container or decreasing a pressure to the entire part of the plastic container, flowing dry gas as leak gas when vacuum is released to fill the inside of the container with the dry gas for drying the plastic container, replacing the gas inside the plastic container with a material gas or a material gas-containing gas, and plasmatizing the material gas to form the gas barrier film on the inner surface of the plastic container by a CVD method.

Abstract: A plastic container for liquid medicine, which, concerning the effective components of liquid medicine, is capable of prevention of deterioration in quality due to mixing of oxygen and water vapor, prevention of variation in concentration due to water volatilization and moisture absorption, etc. A plastic container for liquid medicine, which is a plastic container internally coated with DLC (diamond-like carbon) film wherein water vapor permeability is 0–0.006 g/container/day and oxygen permeability is 0–0.011 ml/container/day, such properties being obtained by optimizing the three conditions, composition, density and film thickness of the DLC film.

Abstract: An object of the present invention is to provide a method and apparatus for cleaning a source gas introduction pipe, which can prevent strong adhesion of contaminant mainly containing carbon powder on an outer surface of the source gas introduction pipe to easily remove the contaminant in a short period of time. The invention is characterized in that, while compressed air is sprayed toward the contaminant, the contaminant removed by the spray of the compressed air is exhausted outside a system of a deposition chamber by suction and exhausting means so that the contaminant is not transferred to sides of the deposition chamber and a plastic container in which a CVD film is formed, in a process for extracting the source gas introduction pipe from the plastic container after the CVD film is formed on an inner surface of the plastic container.

Abstract: A production device for a DLC film-coated plastic container and a production method therefor, capable of forming DLC (diamond-like carbon) films simultaneously on the inner surfaces of a plurality of plastic containers, and reducing variations in film thickness. A production device for DLC film-coated plastic containers, for forming a plurality DLC films simultaneously, characterized by comprising a columnar external electrode (3) having housing spaces in which a plurality of plastic containers (7a-7d) can be disposed in parallel and independently, internal electrodes (9a-9d) respectively disposed in the housed containers (7a-7d), a matching box (14) connected to the external electrode (3) and impedance-matching a high-frequency load, and a high-frequency power supply (15) connected to the matching box.