Abstract: An offset correction device includes: an amplitude adjuster that adjusts an amplitude of a detection signal output from an encoder by adjusting a gain of the detection signal so that the amplitude is within a predetermined range; an offset corrector that corrects an offset of an amplitude center of the detection signal; and a storage that stores a relationship between the gain and an offset amount in advance, wherein the offset corrector refers to the relationship stored in the storage when the amplitude adjuster changes the gain, obtains the offset amount corresponding to the changed gain, and corrects the offset based on the obtained offset amount.

Abstract: An analysis apparatus includes an acquisition part that acquires a plurality of interference images of the object to be measured from the interference measurement apparatus, a calculation part that calculates a sine wave component and a cosine wave component of an interference signal for each pixel in the plurality of interference images, respectively, an error detection part that detects an error between a first Lissajous figure constructed on the basis of the sine wave component and the cosine wave component for each pixel and an ideal second Lissajous figure, a correction part that corrects the sine wave component and the cosine wave component for each pixel on the basis of the error, and a geometry calculation part that calculates surface geometry of the object to be measured on the basis of the corrected sine wave component and cosine wave component.

Abstract: In a touch signal probe (10) having a stylus holder (11), a vibrator (12) supported by the stylus holder (11) and has a contact portion (12A) to contact to a workpiece at a distal end thereof, a vibrating means (13A) for vibrating the vibrator (12) in an axial direction resonantly, and a detecting means (13B) for detecting the contact by a change in the vibration of the vibrator (12) caused by the contact to the workpiece is provided. The vibrator (12) is supported by the stylus holder (11) at two support points (A) and (B) positioned with a node of vibration of the vibrator (12) therebetween. Since the vibrating means (13A) and the detecting means (13B) are disposed spanning over the two support points, the node of vibration can be formed between the support points A and B and the size of the touch signal probe (10) can be easily reduced.

Abstract: A phase discrimination type electrostatic capacity detector includes an one-side electrode plate composed of a transmitting electrode and a receiving electrode, another-side electrode plate having coupling electrodes and disposed relatively movably with respect to the one-side electrode plate in a confronting relation with the same, a power supply connected to the transmitting electrode, and a detector circuit connected to the receiving electrode. The detector is miniaturized by disposing the transmitting electrode in a second hierarchy layer partitioned by an electrical insulating layer on a substrate and connecting in series the respective transmitting electrode elements of the same phase in a first hierarchy layer through coupling leads. The detector including a pair of receiving electrode elements between which the transmitting element is interposed, is miniaturized by leading out the coupling leads to one side end of the one-side electrode plate through a space between both receiving electrode elements.

Abstract: A three-dimensioinal measurement apparatus has a detecting sensor for measuring a distance to an object having a three-dimensional shape, which detecting sensor is comprised of a non-contact type detecting sensor or a probe type detecting sensor, a drive mechanism arranged to drive the detecting sensor and having orthogonal coordinates constituted by three orthogonal X, Y and Z axes, a control section for controlling an amount of driving provided by the drive mechanism on the basis of predetermined input information and for converting a measured distance provided by the detecting sensor into distance information corresponding to a required coordinate system and outputting the distance information thus converted, and a mounting device for detachably mounting the detecting sensor to a predetermined position. The non-contact type detecting sensor and the probe type detecting sensor are used, as required, while either of them is switched to the other.