Abstract: A measurement value correction method according to the present invention is a measurement value correction method for correcting a measurement value obtained by tracing a surface of a work piece with a stylus, and including a step of preparing a plurality of work pieces made from same design data, a step of adopting one of the work pieces as a master work piece and obtaining a reference measurement value with the stylus, a step of obtaining calibration data based on a difference between the reference measurement value and the design data, a step of adopting one of the plurality of work pieces other than the master work piece as a measurement target work piece and obtaining a target measurement value with the stylus, and a step of obtaining a corrected measurement value by correcting the target measurement value by using the calibration data.

Abstract: A surface property measuring apparatus includes a control unit, configured to control operations of a roughness measuring instrument and a relative moving mechanism, including: a measuring force command module configured to output a measuring command; and a measuring force control module configured to control the direction and magnitude of the measuring force, wherein the measuring force control module instructs a measuring force application unit of the roughness measuring instrument to generate therein the measuring force whose magnitude and direction are designated by the measuring force command when a displacement speed of a measuring arm is equal to or slower than a predetermined threshold, and the measuring force control module instructs the measuring force application unit to generate therein a force in a direction in which the distal end of the measuring arm is raised upwards when the displacement speed of the measuring arm exceeds the predetermined threshold.

Abstract: An interference objective lens includes: an objective lens system; a beam splitter which is placed between a measurement surface of a measuring object and a tip end of the objective lens, which diverges light emitted from the objective lens into a reference optical path and a measurement optical path, and which outputs combined wave in which reflection light passing through the reference optical path and reflection light passing through the measuring object are combined; a reference mirror which is placed in the reference optical path and which reflects, by the beam splitter, light diverged into the reference optical path; a mirror holding member which has a spherical surface-shaped outer surface, and which holds the reference mirror such that a reflection surface of the reference mirror passes through a center of a spherical surface; a support member which has a spherical surface-shaped inner surface having a diameter which is substantially equal to the outer surface of the mirror holding member, and which s

Abstract: A roundness measuring machine includes: a base; a table rotatable relative to the base; a probe configured to scan a surface of a workpiece mounted on the table; a motor configured to rotate the table; and a control device configured to control a rotation of the motor. The control device includes: a starting current detector configured to detect a starting current of the motor; and an acceleration/deceleration time setting unit configured to detect at least one of acceleration time and deceleration time for the motor in accordance with the starting current. The roundness measuring machine can suitably set the acceleration time and the deceleration time for the motor corresponding to the inertia moment of the workpiece mounted on the table.

Abstract: There is provided a method for controlling a shape measuring apparatus which continues to perform nominal scanning measurement to a workpiece having a slightly large deviation from a design data. A scanning path to move a stylus tip is calculated based on design data of a workpiece. The stylus tip is moved along the scanning path. It is monitored whether a distance between the scanning path and an actual workpiece is excessive. When the distance between the scanning path and the actual workpiece is excessive, a trajectory difference error is generated. When the trajectory difference error is generated, geometric correction is performed to the design data so that the design data approaches to the actual workpiece. Scanning measurement is performed based on the design data after the geometric correction.

Abstract: As a former correction step, a coordinate correction method includes: a step of setting a measuring probe in a drive mechanism; a step of restraining a measurement tip; a step of acquiring a moving amount and a probe output; and a step of generating a former correction matrix including linear correction elements and non-linear correction elements. As a latter correction step, the coordinate correction method includes: a step of setting a measuring probe in a drive mechanism; a step of restraining a measurement tip; a step of acquiring a moving amount and a probe output; a step of generating an intermediate correction matrix including linear correction elements for correcting the probe output; and a step of correcting the probe output with a latter correction matrix. Consequently, correction can be simplified while allowing for correction of a non-linear error of the probe output supplied from the measuring probe.

Abstract: A roundness measuring device including: an angle detector detecting a current rotation angle of a table relative to an X axis direction; a joystick (external operator) issuing an instruction for an operation amount of a rotation axis line of the table; a centering controller calculating a CX axis displacement amount and a CY axis displacement amount from the operation amount and the rotation angle, and displacing a CX axis displacement mechanism and CY axis displacement mechanism based on the calculated CX axis displacement amount and CY axis displacement amount; and a centering controller calculating an LX axis tilt amount and an LY axis tilt amount from the operation amount and the rotation angle, and displacing an LX axis tilt mechanism and LY axis tilt mechanism based on the calculated LX axis tilt amount and LY axis tilt amount.

Abstract: A processing device includes: a coordinate acquisition unit that acquires a moving amount of a measuring probe and a probe output; a matrix generation unit that generates a correction matrix including linear correction elements and non-linear correction elements; and a probe output correction unit that corrects the probe output with the correction matrix. The coordinate acquisition unit acquires the moving amount and the probe output of the measuring probe in each of measurement points in a quantity larger than or equal to the sum of the number of the linear correction elements and the number of the non-linear correction elements. Consequently, a non-linear error of the probe output supplied from the measuring probe can be corrected, and thus shape coordinates of an object to be measured can be obtained with high accuracy.

Abstract: A processing device includes: a pushing drive mechanism control unit that brings a measurement tip into contact with a surface of a calibration artifact at a single point in each of five directions are all normal directions to the surface of the calibration artifact; a scanning drive mechanism control unit that reciprocates the measurement tip on the surface of the calibration artifact on each of three planes perpendicular to one another; a coordinate acquisition unit that acquires a moving amount and a probe output of a measuring probe; a matrix generation unit that generates a correction matrix; and a probe output correction unit that corrects the probe output with the correction matrix. This enables an improvement in asymmetric probe characteristics of the probe output, which is outputted from the measuring probe, in a particular plane. Thus, shape coordinates of an object to be measured can be obtained with high accuracy.

Abstract: Optical observation apparatus includes: light source emitting broadband light; image fiber with first and second end faces, wherein end faces of plural cores are two-dimensionally arrayed in first and second end faces; imaging optical system provided on first end face side of image fiber, causing light from first end face to be imaged on imaging plane; and axial aberration optical system provided on second end face side of image fiber, having an axial chromatic aberration on optical axis, and causing light from second end face toward object to be observed to be converged. Image fiber takes light from light source from first end face, and transmits light to second end face, and takes light, reflected and scattered by a surface of object, converged by axial aberration optical system, and focused for each plural core on second end face, from second end face and transmits light to first end face.

Abstract: A displacement detecting device includes a main scale and a detecting head unit. The detecting head unit includes a light source, a light receiving unit, and an index scale group that is disposed in the middle of a light path from the main scale to the light receiving unit. The index scale group includes two or more index scales including diffraction gratings, respectively. A positive s-th order diffracted light and a negative s-th order diffracted light of diffracted lights from the main scale are used as the signal lights. The displacement detecting device satisfies a first condition and a second condition, the first condition being expressed as follows: ?×(u1?u2)×(mN÷g)=2×sin ?, the second condition being expressed as follows: ?×u1×(mN÷g)?sin ???÷g×?i=1N (ti×mi).

Abstract: A drive controller includes a speed compensation unit that performs a speed compensation for an object based on a result of comparison made by a speed comparator that compares a current speed of the drive object with a speed indicated by a speed command. The speed compensation unit includes a position-information-based speed gain setting unit that sets a position-information-based variable gain based on position-information-based speed gain information representing a relationship between a position of the object and position-information-based variable gain that varies depending on a load torque of the motor when the object is present at a predetermined position, and a speed compensation processor that performs a speed compensation based on a result of the comparison in the speed comparator and the position-information-based variable gain set by the position-information-based speed gain setting unit.

Abstract: An external device is configured to be detachably attached to a measuring instrument via a connector. The external device includes a connector part, an external device body part and a movable connection part. The connector part has a connection terminal. The external device body part has a display part on a side surface of the external device body part. The movable connection part is configured to connect the connector part with the external device body part. The movable connection part is a biaxial rotation hinge having two pivot axes which are in a twisted position relationship with respect to each other.

Abstract: A laser interferometer that includes a laser interferometer, an position sensitive detector detecting an offset of an optical axis of the laser interferometer, a biaxial rotator turning the laser interferometer toward an arbitrary direction, an angle sensor detecting a rotation angle of the biaxial rotator, a retro reflector reflecting reflected light in a direction parallel to incident light, and a controller performing feedback control of the biaxial rotator so as to track the retro reflector based on signals from the position sensitive detector and the angle sensor. The tracking-type laser interferometer starts tracking control when return light from the retro reflector is returned to a detection range of the position sensitive detector, and changes gain for the feedback control in accordance with a behavior for a position of the return light on the position sensitive detector due to the tracking control.

Abstract: A tilt angle adjuster includes a base plate attached to a Z slider; a hanging plate attached to a measuring device main body; a thin coupling plate supporting the hanging plate such that the hanging plate is suspended on a first surface side of the base plate; biasers biasing the hanging plate so as to impart a rotational force in a first direction to the hanging plate; and a micrometer head provided so as to push the hanging plate one of directly and indirectly toward a second direction opposite the direction of the rotational force imparted by the biasers.

Abstract: To inspect a positioning machine by a laser tracking interferometer that tracks a retroreflector using a laser beam, the positioning accuracy of the positioning machine is evaluated by comparing a distance ?dij,C with a distance ?dij,L measured by the laser tracking interferometer, the distance ?dij,C being acquired by orthogonal projection of the position vectors of measurement points pi and pj measured by the positioning machine to the straight line gk passing through the rotation center M of the laser tracking interferometer.

Abstract: A quantitative, high-sensitivity examination of defects in a transparent product is realized, using a low-cost and space-saving optical dimension measuring apparatus to carry out measurement in a non-contact manner to avoid damaging the object of inspection and to avoid sensory examination. A transparent body to be examined is disposed between a light emitting unit and a light-receiving unit arranged opposite each other. A change in an optical path caused by a defect in the transparent body is detected based on a change in a light ray emitted from the light emitting unit and being incident on the light-receiving unit after passing through the transparent body and a light-blocking object disposed between the transparent body and the light-receiving unit.

Abstract: A measuring instrument is configured to detect a displacement of a contact point provided to be movable and to digitally display a measured value on a display unit provided on an outer surface of a case. The measuring instrument includes an input unit. The input unit is provided on the outer surface of the case and is configured to allow a user to input to the input unit through a manual operation. The input unit includes a sensor which is configured to detect an amount of operation and a speed of operation. The amount of operation is converted into a conversion value in view of the speed of operation and then is displayed on the display unit.

Abstract: An interferometer system to generate an interference signal of a surface of a sample includes a broadband illuminator to provide a broadband illumination beam, a beam splitter to split the broadband illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample, and a detector to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal. The interferometer system having a continuous variable broadband reflector in the beam splitter and/or the reference reflector to adjust the broadband radiation intensity balance between the measurement beam and the reference beam.

Abstract: A bore imaging system comprises a photo detector having a readout set of pixels, and a bore surface imaging arrangement that transmits image light from the bore surface to the photo detector. The bore surface imaging arrangement comprises an image geometry transforming fiber bundle comprising a plurality of optical fibers having input ends that are arranged in a first shape to receive light that arises from an image zone and passes through a lens arrangement, and output ends that are arranged in a second shape to transmit the image light to the readout set of pixels, wherein the outputs ends or the readout set of pixels are configured such that at least 25% of the readout set of pixels receive the transmitted image light. High image data rates and good image resolution may thereby be provided in a borescope without using custom photo detectors.