Abstract: The present application discloses a ozonated water delivery system which includes at least one contacting device in communication with at least one ultrapure water source configured to provide ultrapure water, at least one ultrapure water conduit coupled to the ultrapure water source, at least one solution in communication with the contacting device and the ultrapure water source via the ultrapure water conduit, one or more gas sources containing at least one gas in communication with at least one of the ultrapure water source, the ultrapure water conduit, and the solution conduit, at least one mixed gas conduit in communication with the at gas source and the contacting device and configured to provide at least one mixed gas to the contacting device, and at least one ozonated water output conduit may be in communication with the contacting device.

Abstract: The present application is directed to a multi-sensor gas sampling detection system and method for detecting and measuring the radicals in a radical gas stream and includes at least one radical gas generator in communication with at least one gas source. The radical gas generator may be configured to generate at least one radical gas stream which may be used within a processing chamber. As such, the processing chamber is in fluid communication with the radical gas generator. At least one analysis circuit in fluid communication with the radical gas generator may be used in the detection and measurement system. The analysis may be configured to receive a defined volume and/or flow rate of the radical gas stream. In one embodiment, the analysis circuit may be configured to react at least one reagent with radicals within the defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream.

Abstract: A capacitive pressure sensor of substantially ceramic material comprises a thick base plate (100), a front plate (140) having the same thickness as the base plate and a movable diaphragm (120) located between the front plate and the base plate. Capacitor electrodes (121b, 121a) are provided at the surface of the diaphragm facing the base plate and form a measurement capacitor. The diaphragm (120) is extremely thin and is produced by sintering a ceramic material such aluminum oxide. Owing to a pressing process used during the sintering a strong, very thin diaphragm is obtained having no mechanical stresses and fracture indications. It can be produced to have a very small thickness in order to provide pressure sensors having a high sensitivity, which can also for high-vacuum applications tolerate to be subjected to the atmospheric pressure. A shielding plate (110) can be inserted between the base plate (100) compensating the measurement capacitor.

Abstract: A feedback architecture for ionizers that allows simultaneous adjustment of positive and negative ionizer power supplies. Balance and swing data are fed back to the ionizer through an intermediate module, which permits an extra level of signal processing. Swing information is returned to both power supplies in negative feedback mode. If swing is too high, both power supplies lower output. Balance is fed back in both negative and positive feedback mode. This architecture is compatible with multiple sensors and multiple ionizers.

Abstract: The invention generally relates to stabilizing an MRI power delivery system. In one aspect, a stabilization module that is in electrical communication with the MRI power delivery system is provided. The stabilization module includes a closed loop control system. The closed loop control system is used to modify the at least one characteristic of the input signal. The modified input signal is provided to the MRI power delivery system.

Abstract: The axial distance between opposing conductors of a capacitance pressure transducer can depend, in part, upon the thickness of a seal that is disposed between a housing and a diaphragm of the capacitance pressure transducer. The present invention utilizes spacer elements and sealing beads to form a seal that is disposed between the housing and the diaphragm of a capacitance pressure transducer. The sealing beads have a melting temperature that is lower than the melting temperature of the spacer elements. The sealing beads are melted so that they flow around and surround the unmelted spacer elements. Upon solidifying, the sealing beads and the spacer elements thus form the seal. The thickness of the seal can be established accurately and uniformly by controlling the height of the spacer elements.

Abstract: A capacitive pressure sensor of substantially ceramic material comprises a thick base plate (100), a front plate (140) having the same thickness as the base plate and a movable diaphragm (120) located between the front plate and the base plate. Capacitor electrodes (121b, 121a) are provided at the surface of the diaphragm facing the base plate and form a measurement capacitor. The diaphragm (120) is extremely thin and is produced by sintering a ceramic material such aluminium oxide. Owing to a pressing process used during the sintering a strong, very thin diaphragm is obtained having no mechanical stresses and fracture indications. It can be produced to have a very small thickness in order to provide pressure sensors having a high sensitivity, which can also for high-vacuum applications tolerate to be subjected to the atmospheric pressure. A shielding plate (110) can be inserted between the base plate (100) compensating the measurement capacitor.

Abstract: A process for producing a plate for a capacitive sensor element. In one embodiment of the present invention, a method includes forming a plate from a substantially pure aluminum oxide slurry, heating the plate a first time in an oven to sinter the plate, cooling the plate after the heating step, heating the plate a second time to smooth the plate, and cooling the plate after the second heating.

Abstract: A capacitive pressure sensor of substantially ceramic material comprises a thick base plate (100), a front plate (140) having the same thickness as the base plate and a movable diaphragm (120) located between the front plate and the base plate. Capacitor electrodes (121b, 121a) are provided at the surface of the diaphragm facing the base plate and form a measurement capacitor. The diaphragm (120) is extremely thin and is produced by sintering a ceramic material such aluminium oxide. Owing to a pressing process used during the sintering a strong, very thin diaphragm is obtained having no mechanical stresses and fracture indications. It can be produced to have a very small thickness in order to provide pressure sensors having a high sensitivity, which can also for high-vacuum applications tolerate to be subjected to the atmospheric pressure. A shielding plate (110) can be inserted between the base plate (100) compensating the measurement capacitor.

Abstract: A pressure sensor of substantially ceramic material comprises a rigid housing having a thick base plate, an interior shielding plate, and a movable diaphragm. A cavity providing a reference pressure is formed between the shielding plate and the diaphragm and on the opposite walls thereof are electrodes, which form a capacitor, the capacity of which is sensed. A temperature sensor comprises thermistors positioned inside the housing, between the base plate and the shielding plate, with the reference resistors on the surface of the base plate facing outwards. The shielding plate is thin, so that the thermistors are located near the diaphragm and are sensitive to the temperature thereof. Therefore the temperature sensor element has minimum influence on the electric properties of the pressure sensor and in particular on the mechanical properties of the diaphragm.