Patents Assigned to MKS Instruments, Inc.
  • Patent number: 11826713
    Abstract: Systems and methods are described for dissolving ammonia gas in deionized water. The system includes a deionized water source and a gas mixing device including a first inlet for receiving ammonia gas, a second inlet for receiving a transfer gas, and a mixed gas outlet for outputting a gas mixture including the ammonia gas and the transfer gas. The system includes a contactor that receives the deionized water and the gas mixture and generates deionized water having ammonia gas dissolved therein. The system includes a sensor in fluid communication with at least one inlet of the contactor for measuring a flow rate of the deionized water, and a controller in communication with the sensor. The controller sets a flow rate of the ammonia gas based on the flow rate of the deionized water measured by the sensor, and a predetermined conductivity set point.
    Type: Grant
    Filed: August 28, 2020
    Date of Patent: November 28, 2023
    Assignee: MKS Instruments, Inc.
    Inventors: Ulrich Alfred Brammer, Johannes Seiwert, Christiane Le Tiec
  • Patent number: 11823869
    Abstract: An impedance matching network including a mixing module. The mixing module receives a plurality admittances based upon at least one parameter sensed from an output which generated by an RF generator. The output signal is a pulsed RF signal having a plurality of states for each pulse and the plurality of admittances correspond to the plurality states. The mixing module generates a virtual admittance determined in accordance with the plurality of admittances adjusted by a gain. The impedance matching module receives the virtual admittance and generates a command to adjust a capacitance of the impedance matching network or a command to adjust a frequency of the output signal in accordance with the virtual admittance.
    Type: Grant
    Filed: October 15, 2021
    Date of Patent: November 21, 2023
    Assignee: MKS Instruments, Inc.
    Inventors: Kwang Ho Kim, Jaechul Jung, Changhee Lee, Hohyoung Lee, Jongmin Kim
  • Patent number: 11810762
    Abstract: A matching network for a system having a non-linear load and powered by a first RF power supply operating at a first frequency and a second RF power supply operating at a second frequency. The matching network includes a first matching network section for providing an impedance match between the first power supply and the load. The matching network also includes a second matching network section for providing an impedance match between the second power supply and the load. The first matching network section includes a first variable reactance, and the variable reactance is controlled in accordance with IMD sensed in the signal applied to the load by the first RF power supply. The variable reactance is adjusted in accordance with the IMD to reduce the detected IMD.
    Type: Grant
    Filed: December 13, 2021
    Date of Patent: November 7, 2023
    Assignee: MKS Instruments, Inc.
    Inventors: Jin Huh, Aaron T. Radomski, Duy Nguyen, Soohan Kim
  • Patent number: 11808643
    Abstract: A Process Critical Thermal Conductivity Gauge (PCTCG) instrument relies on gauge chamber wall above-ambient-temperature-control (AATC) to provide improved accuracy and thermal stability with reduced and linearized temperature coefficients. A sensor resistor is exposed to gas pressure in a gauge chamber. AATC is provided by control of a heater that heats a chamber wall to control temperature difference between the sensor resistor and chamber wall. An example application of this technology is to end-point detection in lyophilization where the TCG is used to track partial pressures of water in binary gas mixtures.
    Type: Grant
    Filed: November 3, 2021
    Date of Patent: November 7, 2023
    Assignee: MKS INSTRUMENTS, INC.
    Inventors: Gerardo A. Brucker, Timothy C. Swinney
  • Patent number: 11802806
    Abstract: A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.
    Type: Grant
    Filed: January 21, 2021
    Date of Patent: October 31, 2023
    Assignee: MKS Instruments, Inc.
    Inventor: Gerardo A. Brucker
  • Publication number: 20230332320
    Abstract: A method of coating a plasma channel of a plasma source, comprises providing at least one electrolyte having one or more chelating agents therein, treating at least one surface to produce a processed surface, smoothing the surface of the processed surface with at least one post processing technique to produce at least one smoothed processed surface, and cleaning the smoothed surface.
    Type: Application
    Filed: April 13, 2023
    Publication date: October 19, 2023
    Applicant: MKS Instruments, Inc.
    Inventors: Chiu-Ying TAI, Michael HARRIS
  • Patent number: 11768176
    Abstract: In a system for processing gas, a gas analyzer in a gas analyzer chamber measures a quantity of ions generated from a gas. An ionization source includes an ionization chamber and an electron source for generating ions for the gas analyzer. The ionization chamber encompasses an ionization region in which particles of the gas are charged to form the ions. A channel directs the gas from a gas source into the ionization chamber, and the channel extends to a surface of the ionization chamber. An ionization source vacuum pump is in gaseous communication with the ionization chamber via a substantially large opening, and operates to draw gas from the ionization chamber.
    Type: Grant
    Filed: January 6, 2022
    Date of Patent: September 26, 2023
    Assignee: MKS Instruments, Inc.
    Inventor: James Edward Blessing
  • Patent number: 11745229
    Abstract: A method is provided for cleaning of a processing system comprising a wafer processing chamber and a pumping line in fluid connection with the wafer processing chamber. The method includes initiating cleaning of the wafer processing chamber by activating a chamber cleaning source and initiating cleaning of at least a portion of the pumping line by activating a foreline cleaning source coupled to the pumping line. The method also includes monitoring, at a downstream endpoint detector coupled to the pumping line, a level of a signature substance. The method further includes determining, by the downstream endpoint detector, at least one of a first endpoint of the cleaning of the wafer processing chamber or a second endpoint of the cleaning of the pumping line based on the monitoring.
    Type: Grant
    Filed: August 11, 2020
    Date of Patent: September 5, 2023
    Assignee: MKS Instruments, Inc.
    Inventor: Gordon Hill
  • Patent number: 11733224
    Abstract: The present application is directed to a method of measuring the concentration of radicals in a gas stream which includes the steps of flowing a radical gas stream emitted from at least one radical gas generator to at least one processing chamber, providing at least one sampling reaction module having at least one sampling tube therein, establishing a reference temperature of the sampling tube with at least one thermal control module, diverting a portion of the radical gas steam from the radical gas generator into the sampling tube, reacting at least one reagent with at least one radical gas within a defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream, the compound stream flowing within the sampling tube, measuring a change of temperature of the sampling tube due to interaction of the chemical species within the compound stream and the sampling tube with sensor module, and calculating a concentration of the chemical species within the comp
    Type: Grant
    Filed: January 25, 2022
    Date of Patent: August 22, 2023
    Assignee: MKS Instruments, Inc.
    Inventors: Johannes Chiu, Xing Chen, Chiu-Ying Tai, Michael Harris, Atul Aupta
  • Publication number: 20230258283
    Abstract: A heated throttle valve apparatus is disclosed herein, which includes a valve system with a valve driver configured to provide a rotational force to a valve assembly via a thermal isolating drive coupler configured to prevent the transfer of thermal energy from the valve assembly to the valve driver. The valve assembly includes a valve body and a valve closure member, a valve shaft with a valve shaft heater in a first heating zone and one or more body heaters in a second heating zone, permitting the user to control temperature in the heating zones independently. An electrical conductor strain relief is provided, configured to eliminate strain in the shaft heater electrical conductors when the valve closure member undergoes a change in angular orientation. The electrical conductor strain relief includes a curvilinear flexible member wound between a first connection area and a second connection area.
    Type: Application
    Filed: April 21, 2023
    Publication date: August 17, 2023
    Applicant: MKS Instruments, Inc.
    Inventors: Robert M. CURRY, Andrew B. COWE
  • Patent number: 11721526
    Abstract: A method of generating power with a power generation system. Solid state generators generate a plurality of outputs. The outputs of the solid state generator modules are combined from a plurality of channels, in a combiner, using a phase optimization technique to generate an in phase combined output power.
    Type: Grant
    Filed: May 22, 2020
    Date of Patent: August 8, 2023
    Assignee: MKS Instruments, Inc.
    Inventor: Francesco Braghiroli
  • Patent number: 11715624
    Abstract: A RF generator includes a RF power source and a RF control module coupled to the RF power source. The RF control module is configured to generate at least one control signal to vary a respective at least one of an RF output signal from the RF power source or an impedance between the RF power source and a load. The RF output signal includes a RF signal modulated by a pulse signal, and the RF control module is further configured to adjust the at least one control signal to vary at least one of an amplitude or a frequency of the RF output signal or the impedance between the RF power source and the load to control a shape of the pulse signal. The at least one of the amplitude, the frequency, or the impedance is adjusted in accordance with respective feedforward adjustments that vary in accordance with a respective sensed pulse parameter detected between a matching network and the load.
    Type: Grant
    Filed: August 9, 2021
    Date of Patent: August 1, 2023
    Assignee: MKS Instruments, Inc.
    Inventors: Jonathan W. Smyka, Aaron T. Radomski, Peter Paul, Aaron M. Burry
  • Patent number: 11691111
    Abstract: Systems and methods are described for supplying a rinsing liquid including ultrapure water and an ammonia gas. The system includes an ultrapure water source and a gas mixture source in fluid communication with a contactor. The gas mixture includes ammonia gas and a carrier gas. The system includes a control unit configured to adjust a flow rate of the ultrapure water source such that an operational pressure of the contactor remains below a pressure threshold. The system includes a compressor configured to remove a residual transfer gas out of the contactor. The contactor generates a rinsing liquid having ultrapure water and a concentration of the ammonia gas dissolved therein. The system includes a pump in fluid communication between the contactor and an outlet. The pump is configured to deliver the rinsing liquid having a gaseous partial pressure below the pressure threshold at the outlet.
    Type: Grant
    Filed: April 7, 2020
    Date of Patent: July 4, 2023
    Assignee: MKS Instruments, Inc.
    Inventors: Ulrich Alfred Brammer, Johannes Seiwert, Christiane Le Tiec
  • Patent number: 11664197
    Abstract: A plasma source is provided that includes a body defining an input port, an output port, and at least one discharge section extending along a central longitudinal axis between the input port and the output port. The at least one discharge section includes a return electrode defining a first generally cylindrical interior volume having a first interior diameter, a supply plate comprising a supply electrode, the supply plate defining a second generally cylindrical interior volume having a second interior diameter, and at least one spacer defining a third generally cylindrical interior volume having a third interior diameter. The third interior diameter is different from the first or second interior diameter. The at least one discharge section is formed from the spacer arranged between the return electrode and the supply plate along the central longitudinal axis to define a generally cylindrical discharge gap for generating a plasma therein.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: May 30, 2023
    Assignee: MKS Instruments, Inc.
    Inventors: Gordon Hill, Andrew Cowe, Ron Collins, Larry Bourget
  • Patent number: 11656139
    Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
    Type: Grant
    Filed: November 20, 2020
    Date of Patent: May 23, 2023
    Assignee: MKS Instruments, Inc.
    Inventors: Gerardo A. Brucker, Timothy C. Swinney
  • Publication number: 20230098744
    Abstract: The present application discloses an apparatus for measuring the concentration of ozone within a fluid and includes a conduit defining at least one passage therein, the conduit has at least one reflective coating selective applied thereto and defining one or more transmission regions on the conduit, a multi-wavelength light source system having at least one light source configured to direct at least one optical signal having a first wavelength through an ozonated fluid within the conduit and at least one UV light source configured to direct at least one UV optical signal having a second wavelength band through the ozonated fluid wherein the optical signal and the UV optical signal traverse through the conduit along different optical paths via at least one reflection from the reflective coating applied to the conduit, and at least one detector positioned proximate to the transmission regions formed on the conduit and configured to detect the optical signal and the UV signal thereby permitting measurement of th
    Type: Application
    Filed: September 27, 2021
    Publication date: March 30, 2023
    Applicant: MKS Instruments, Inc.
    Inventors: Heinrich Johannes Seiwert, Felix Groitl, Christiane Le Tiec, Ulrich Alfred Brammer
  • Patent number: 11573583
    Abstract: A gas delivery system and associated method includes a flow channel, a control valve, a downstream pressure sensor, and a controller. The control valve controls flow of gas in the flow channel. The downstream pressure sensor, located downstream of the control valve, measures gas pressure in the flow channel. The controller has an external trigger input to receive a trigger signal applied to a shutoff valve downstream from the control valve. The controller operates in separate modes based on a state of the trigger signal. In a non-triggered mode, the controller controls pressure at the pressure sensor via the control valve in accordance with a first gain schedule. In the triggered mode, the controller controls the pressure at the pressure sensor via the control valve in accordance with a second gain schedule that is distinct from the first gain schedule.
    Type: Grant
    Filed: October 29, 2021
    Date of Patent: February 7, 2023
    Assignee: MKS INSTRUMENTS, INC.
    Inventors: Junhua Ding, Mark J. Quaratiello
  • Patent number: 11545943
    Abstract: A switched capacitor modulator (SCM) includes a RF power amplifier. The RF power amplifier receives a rectified voltage and a RF drive signal and modulates an input signal in accordance with the rectified voltage to generate a RF output signal to an output terminal. A reactance in parallel with the output terminal is configured to vary in response to a control signal to vary an equivalent reactance in parallel with the output terminal. A controller generates the control signal and a commanded phase. The commanded phase controls the RF drive signal. The reactance is at least one of a capacitance or an inductance, and the capacitance or the inductance varies in accordance with the control signal.
    Type: Grant
    Filed: December 4, 2020
    Date of Patent: January 3, 2023
    Assignee: MKS Instruments, Inc.
    Inventors: Duy Nguyen, Albert Kuramshin, Aaron T. Radomski, Alexander Jurkov, Hangon Kim, Kelvin Lee
  • Patent number: 11536755
    Abstract: An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: December 27, 2022
    Assignee: MKS Instruments, Inc.
    Inventors: Larry J. Fisk, II, Benjamin J. Gitlin, Mariusz Oldziej, Aaron M. Burry, Matthew G. Harrington, Aaron T. Radomski
  • Patent number: 11531312
    Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.
    Type: Grant
    Filed: April 16, 2021
    Date of Patent: December 20, 2022
    Assignee: MKS Instruments, Inc.
    Inventors: David J. Coumou, Yuriy Elner, Aung Toe, Daniel M. Gill, Eldridge M. Mount, IV, Shaun Smith