Patents Assigned to MKS Instruments, Inc.
  • Patent number: 10998354
    Abstract: A novel multi-junction detector device and method of manufacture is disclosed, which includes providing a housing, at least one system mount body positioned within the housing, forming at least one beam dump region in the system mount body in optical communication with at least one first detector having a first wavelength responsivity range positioned on the system mount body and at least one second detector having a second wavelength responsivity range positioned on the system mount body in optical communication with the first detector. An arcuate shape, an arcuate shape of varying radius, a polygonal shape or a polyhedral shape may be formed on at least one mount body wall in the beam dump region. The method may also comprise depositing at least one reflectivity enhancing material onto the mount body wall. The method may further comprise depositing an energy dissipating material on the mount body wall.
    Type: Grant
    Filed: August 28, 2019
    Date of Patent: May 4, 2021
    Assignee: MKS Instruments, Inc.
    Inventor: Greggory W Switzer
  • Publication number: 20210102293
    Abstract: A microwave magnetron includes a cathode for emitting electrons, a filament for receiving a filament current to heat the cathode to enable to cathode to emit the electrons, and an anode to which anodic power can be applied to affect a flow of the electrons. An anodic power input receives the anodic power to be applied to the anode, the anodic power being characterized by an anodic current, an anodic voltage, and an anodic impedance, the anodic impedance being a quotient of the anodic voltage and the anodic current. An electromagnet power input receives electromagnet power and applies the electromagnet power to an electromagnet to control an intensity of a magnetic field, the electromagnet power being characterized by an electromagnet current. A controller adjusts at least one of the parameters of the magnetron to affect the flow of electrons while maintaining the anodic impedance constant.
    Type: Application
    Filed: October 4, 2019
    Publication date: April 8, 2021
    Applicant: MKS Instruments, Inc.
    Inventors: Francesco Braghiroli, Paolo Balocchi
  • Patent number: 10969799
    Abstract: A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode.
    Type: Grant
    Filed: October 23, 2018
    Date of Patent: April 6, 2021
    Assignee: MKS INSTRUMENTS, INC.
    Inventors: Junhua Ding, Michael L'Bassi, Tseng-Chung Lee
  • Patent number: 10969290
    Abstract: A cold cathode ionization gauge (CCIG) includes an extended anode, a cathode surrounding the anode along a length of the anode, and a feedthrough insulator supporting the anode. The cathode forms a discharge space around the anode to enable formation of a plasma between the anode and the cathode and a resultant ion current flow into the cathode. The CCIG further includes a magnet applying a magnetic field through the discharge space to lengthen free electron paths to sustain the plasma. A shield is electrically isolated from the insulator and shields the insulator from electrons of the plasma. The shield may be mounted to the cathode and surrounds and is spaced from the anode. An electric controller applies voltage between the anode and the cathode to create ionization with plasma discharge between the anode and the cathode, the controller determining pressure based on measured ion current flow to the cathode.
    Type: Grant
    Filed: December 7, 2017
    Date of Patent: April 6, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: Gerardo A. Brucker, Timothy C. Swinney
  • Patent number: 10948456
    Abstract: A gas analyzer system uses an ionization source, which can be a hot cathode ionization source. A magnet assembly is positioned to define a magnetic field, which permits separation of ion components based on their mass to charge ratio. An ion beam deflector is used, such as a pair of deflector plates, which can scan ion components across a detector. The ion beam deflector defines a deflection electric field across the magnetic field and across a direction of travel of the ions emitted from the ionization source.
    Type: Grant
    Filed: November 27, 2019
    Date of Patent: March 16, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: Gerardo A. Brucker, Timothy C. Swinney, Clinton L. Percy
  • Patent number: 10940635
    Abstract: Methods and systems are provided for heating a dielectric preform material. An exemplary method includes inserting the preform material into a microwave cavity along a longitudinal axis of the microwave cavity and supplying the microwave cavity with microwave power having a frequency that corresponds to an axial wavelength along the longitudinal axis of the microwave cavity. The axial wavelength is greater than a length of the preform material along the longitudinal axis. The method includes heating the preform material within the microwave cavity by the microwave power and determining temperatures of the preform material at one or more locations on a surface of the preform material. The method further includes adjusting, based on the temperatures of the preform material, the microwave frequency to achieve substantially uniform heating at least on a sidewall of the preform material along the longitudinal axis.
    Type: Grant
    Filed: August 10, 2018
    Date of Patent: March 9, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: Xing Chen, David Lam, Kevin W. Wenzel, Ilya Pokidov
  • Patent number: 10930470
    Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.
    Type: Grant
    Filed: December 11, 2019
    Date of Patent: February 23, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron T. Radomski, Ky Luu, Larry J. Fisk, II, Ross Reinhardt, Matthew G. Harrington, Amish Rughoonundon, Jesse N. Klein, Aaron M. Burry
  • Patent number: 10928265
    Abstract: A total pressure cold cathode ionization gauge is disclosed. An inverted magnetron electrode design is capable of simultaneously detecting and measuring total gas pressure in a high vacuum system, along with partial pressures of one or more gases, such as hydrogen, helium and water. In addition, a leak detector, such as a helium leak detector, is disclosed with a compact counterflow arrangement of a gas inlet passage to an ion detection passage.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: February 23, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: Gerardo A. Brucker, Timothy C. Swinney, Clinton L. Percy
  • Patent number: 10930474
    Abstract: An assembly for adjusting gas flow patterns and gas-plasma interactions including a toroidal plasma chamber. The toroidal plasma chamber has an injection member, an output member, a first side member and a second side member that are all connected. The first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, where the first inner cross-sectional area and the second inner-cross-sectional area being different. The second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, where the third inner cross-sectional area and the fourth inner-cross-sectional area being different.
    Type: Grant
    Filed: July 10, 2017
    Date of Patent: February 23, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: Chaolin Hu, Xing Chen
  • Patent number: 10914717
    Abstract: A partial pressure detector and methods of detecting a partial pressure are provided, in which a thermal conductivity gauge, such as a Pirani gauge, is configured to sense a pressure of a mixture of gases within a vacuum chamber. An input of the partial pressure detector is configured to receive a total pressure reading from a species-independent pressure sensor of the mixture of gases in the vacuum chamber, and a controller configured to provide an output representing an amount of a species of gas in the vacuum chamber as a function of the pressure as sensed by the thermal conductivity gauge and the received total pressure reading. The controller has a resolution, and a range of the resolution is scaled to a range of expected partial pressures of the species. The output can be a partial pressure or a weighted partial pressure of the gas species.
    Type: Grant
    Filed: May 9, 2018
    Date of Patent: February 9, 2021
    Assignee: MKS Instruments, Inc.
    Inventor: Gerardo A. Brucker
  • Patent number: 10910197
    Abstract: A matching network system for a radio frequency (RF) power delivery system includes a matching network having a variable tuning element. The matching network introduces a variable impedance between a RF power generator and a load. A stepper motor adjusts a position of the variable tuning element. The matching network system also includes a controller communicating with the matching network. The controller receives the position of the stepper motor and compares the position with a stored, predetermined position. The controller generates a position correction and applies the position correction to the position to provide improved repeatability or reproducibility.
    Type: Grant
    Filed: October 19, 2018
    Date of Patent: February 2, 2021
    Assignee: MKS Instruments, Inc.
    Inventor: David J. Coumou
  • Patent number: 10910798
    Abstract: An apparatus and method for determining the health of a plasma system by igniting a plasma within a plasma confining volume generate an ignition signal with an ignition circuit and apply the ignition signal between a biased region and a grounded region in the vicinity of the plasma confining volume. A parameter in the ignition circuit is sensed, and the sensed parameter is compared to a first parameter threshold. A condition associated with the plasma confining volume is determined if the sensed parameter differs from the first voltage threshold, and a corrective action can be taken.
    Type: Grant
    Filed: November 13, 2019
    Date of Patent: February 2, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: Atul Gupta, Colin Sanford, Joshua Lamontagne, Kevin Wenzel
  • Patent number: 10892153
    Abstract: Apparatus (e.g., ion source), systems (e.g., residual gas analyzer), and methods provide extended life and improved analytical stability of mass spectrometers in the presence of contamination gases while achieving substantial preferential ionization of sampled gases over internal background gases. One embodiment is an ion source that includes a gas source, nozzle, electron source, and electrodes. The gas source delivers gas via the nozzle to an evacuated ionization volume and is at a higher pressure than that of the evacuated ionization volume. Gas passing through the nozzle freely expands in an ionization region of the ionization volume. The electron source emits electrons through the expanding gas in the ionization region to ionize at least a portion of the expanding gas. The electrodes create electrical fields for ion flow from the ionization region to a mass filter and are located at distances from the nozzle and oriented to limit their exposure to the gas.
    Type: Grant
    Filed: December 13, 2019
    Date of Patent: January 12, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: James E. Blessing, Jonathan Leslie, Jonathan Hugh Batey
  • Publication number: 20210005430
    Abstract: A microwave system has a solid-state generator which generates microwave energy and includes at least one control input for receiving a control signal to vary electrically a parameter of the microwave energy. A microwave load receives the microwave energy and produces an effect in response to the microwave energy. A microwave conducting element couples the microwave energy to the microwave load. An impedance match adjusting device is coupled to the microwave conducting element to vary at least one of the parameters of the microwave energy. The effect produced in response to the microwave energy is altered by both electrical variation of the parameter of the microwave energy via the control signal and adjustment of the impedance match adjusting device to vary the parameter of the microwave energy.
    Type: Application
    Filed: August 14, 2020
    Publication date: January 7, 2021
    Applicant: MKS Instruments, Inc.
    Inventors: Mohammad Kamarehi, Ken Trenholm, Colin Sanford, Kevin Wenzel, Olivia Keller
  • Patent number: 10876917
    Abstract: A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.
    Type: Grant
    Filed: May 17, 2019
    Date of Patent: December 29, 2020
    Assignee: MKS Instruments, Inc.
    Inventors: Brandon J. Kelly, Clinton L. Percy, Scott C. Heinbuch, Gerardo A. Brucker, Timothy C. Swinney, Timothy R. Piwonka-Corle
  • Publication number: 20200400965
    Abstract: The present application discloses a nano-textured attenuator which includes a body defining in in the aperture, a measurement aperture, at least one beam dump aperture, at least one coupling fixture may be formed on or positioned on the body, a first nano-textured beamsplitter is positioned within the body and configured to transmit 85% to 99.9999% of an input signal therethrough while reflecting 0.0001% to form at least one partially attenuated signal, at least a second nano-textured beamsplitter is positioned within the body and is configured to transmit 85% to 99.9999% of an input signal therethrough while reflecting 0.0001% to form at least one attenuated measurement signal, and at least one camera is communication with the measurement aperture be configured to measure at least one optical characteristic of the attenuated measurement signal.
    Type: Application
    Filed: June 19, 2020
    Publication date: December 24, 2020
    Applicant: MKS Instruments, Inc.
    Inventors: Kevin Kirkham, Kenneth Ferree
  • Publication number: 20200381219
    Abstract: A plasma generation system includes a reference clock, a plurality of solid state generator modules, and a processing chamber. The reference clock is configured to generate a reference signal. Each solid state generator module is linked to an electronic switch and each electronic switch is linked to the reference clock. The solid state generator modules are each configured to generate an output based on the reference signal from the reference clock. The processing chamber is configured to receive the output of at least two of the solid state generator modules to combine the outputs of said solid state generator modules therein.
    Type: Application
    Filed: May 22, 2020
    Publication date: December 3, 2020
    Applicant: MKS Instruments, Inc.
    Inventors: Kenneth Trenholm, Mohammad Kamarehi, Mohamed Shaheen, Bryan Gallivan
  • Publication number: 20200381218
    Abstract: A method of generating power with a power generation system. Solid state generators generate a plurality of outputs. The outputs of the solid state generator modules are combined from a plurality of channels, in a combiner, using a phase optimization technique to generate an in phase combined output power.
    Type: Application
    Filed: May 22, 2020
    Publication date: December 3, 2020
    Applicant: MKS Instruments, Inc.
    Inventor: Francesco Braghiroli
  • Patent number: 10845263
    Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
    Type: Grant
    Filed: April 17, 2018
    Date of Patent: November 24, 2020
    Assignee: MKS INSTRUMENTS, INC.
    Inventors: Gerardo A. Brucker, Timothy C. Swinney
  • Patent number: 10821542
    Abstract: A radio frequency (RF) power delivery system includes a first RF generator and a second RF generator. The first RF generator operates as a master RF generator, and the second RF generator operates as a slave RF generator. The slave RF generator includes a detector for sensing an electrical characteristic of the RF signal of the slave RF generator. The slave RF generator also includes a detector for sensing an electrical characteristic of the RF signal from the master RF generator. Operation of the slave RF generator is controlled by a host or controller. The host or controller operates the slave RF generator in accordance with electrical properties determined by the second detector.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: November 3, 2020
    Assignee: MKS Instruments, Inc.
    Inventors: Nicholas Nelson, David J. Coumou