Patents Assigned to MKS, Ion Systems
  • Patent number: 7729101
    Abstract: An apparatus and method for monitoring the output of an ionizing blower. A measuring channel captures a portion of the air ion stream, and measures balance plus air ion current. Since the measurement channel is isolated from extraneous electrostatic fields, measurements contain less analytical noise. Air flow through the measurement chamber is created by the inherent pressure difference between the high pressure and low pressure sides of an air mover. Two electrodes inside the measurement chamber are combined with a power supply, a low current amplifier, and a controller. The controller also makes adjustments to the ionizing blower.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: June 1, 2010
    Assignee: MKS, Ion Systems
    Inventor: Peter Gefter
  • Patent number: 7408759
    Abstract: A module for generating ions in a flowing air stream includes a support structure having a central region adapted to pass a flowing air stream therethrough, and including a plurality of supports for positioning a filamentary ion-generating electrode in a polygonal configuration within the central region. The supports and filament are relatively moveable to wipe the surface of the filament at each support for removing accumulated contaminants on the filament.
    Type: Grant
    Filed: April 24, 2007
    Date of Patent: August 5, 2008
    Assignee: MKS Ion Systems, Inc.
    Inventors: Peter Gefter, Gregory Vernitsky, Scott Gehlke
  • Publication number: 20070235661
    Abstract: A module for generating ions in a flowing air stream includes a support structure having a central region adapted to pass a flowing air stream therethrough, and including a plurality of supports for positioning a filamentary ion-generating electrode in a polygonal configuration within the central region. The supports and filament are relatively moveable to wipe the surface of the filament at each support for removing accumulated contaminants on the filament.
    Type: Application
    Filed: April 24, 2007
    Publication date: October 11, 2007
    Applicant: MKS - ION SYSTEMS, INC.
    Inventors: Peter Gefter, Gregory Vernitsky, Scott Gehlke