Patents Assigned to MKS Ion Systems, Inc.
  • Self-cleaning ionization system
    Patent number: 7408759
    Abstract: A module for generating ions in a flowing air stream includes a support structure having a central region adapted to pass a flowing air stream therethrough, and including a plurality of supports for positioning a filamentary ion-generating electrode in a polygonal configuration within the central region. The supports and filament are relatively moveable to wipe the surface of the filament at each support for removing accumulated contaminants on the filament.
    Type: Grant
    Filed: April 24, 2007
    Date of Patent: August 5, 2008
    Assignee: MKS Ion Systems, Inc.
    Inventors: Peter Gefter, Gregory Vernitsky, Scott Gehlke
  • Self-Cleaning Ionization System
    Publication number: 20070235661
    Abstract: A module for generating ions in a flowing air stream includes a support structure having a central region adapted to pass a flowing air stream therethrough, and including a plurality of supports for positioning a filamentary ion-generating electrode in a polygonal configuration within the central region. The supports and filament are relatively moveable to wipe the surface of the filament at each support for removing accumulated contaminants on the filament.
    Type: Application
    Filed: April 24, 2007
    Publication date: October 11, 2007
    Applicant: MKS - ION SYSTEMS, INC.
    Inventors: Peter Gefter, Gregory Vernitsky, Scott Gehlke