Patents Assigned to MKS Technology
  • Patent number: 11307090
    Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: April 19, 2022
    Assignee: MKS TECHNOLOGY
    Inventors: Mark Watson, Shane Buller, Keith Carron
  • Patent number: 10473522
    Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.
    Type: Grant
    Filed: October 6, 2017
    Date of Patent: November 12, 2019
    Assignee: MKS TECHNOLOGY
    Inventors: Mark Watson, Shane Buller, Keith Carron
  • Patent number: 9791313
    Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.
    Type: Grant
    Filed: May 31, 2013
    Date of Patent: October 17, 2017
    Assignee: MKS TECHNOLOGY
    Inventors: Mark Watson, Shane Buller, Keith Carron
  • Patent number: 9523610
    Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: December 20, 2016
    Assignee: MKS Technology
    Inventors: Mark Watson, Shane Buller, Keith Carron
  • Patent number: 9459146
    Abstract: A spectroscopic system is provided. In one embodiment, the spectroscopic system comprises a light source adapted to provide a beam of illumination; an optical system adapted to provide the beam of illumination to a sample and receive a spectroscopy signal from the sample and direct the spectroscopy signal to at least one single channel detector, wherein the optical system comprises an adjustable dispersing element for directing one or more spectral features of the spectroscopy signal to the at least one single channel detector; a calibration detector adapted to determine a set point of the adjustable dispersing element; and a source synchronization component adapted to synchronize an operation of the light source and the at least one single channel detector. A method of calibrating a dispersing element of a spectrometer is also provided.
    Type: Grant
    Filed: October 20, 2014
    Date of Patent: October 4, 2016
    Assignee: MKS Technology
    Inventors: Keith Carron, Mark Watson, Shane Buller
  • Patent number: 8988678
    Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.
    Type: Grant
    Filed: August 31, 2011
    Date of Patent: March 24, 2015
    Assignee: MKS Technology
    Inventors: Mark Watson, Shane Buller, Keith Carron
  • Patent number: 8867033
    Abstract: A spectroscopic system including a light source adapted to provide a beam of illumination; an optical system adapted to provide the beam of illumination to a sample and receive a spectroscopy signal from the sample and direct the spectroscopy signal to at least one single channel detector is provided. The optical system comprises an adjustable dispersing element for directing one or more spectral features of the spectroscopy signal to the at least one single channel detector. A calibration detector is adapted to determine a set point of the adjustable dispersing element; and a source synchronization component is adapted to synchronize an operation of the light source and the at least one single channel detector. A method of calibrating a dispersing element of a spectrometer is also provided.
    Type: Grant
    Filed: June 15, 2011
    Date of Patent: October 21, 2014
    Assignee: MKS Technology
    Inventors: Keith Carron, Mark Watson, Shane Buller