Patents Assigned to MKS Technology
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Patent number: 11307090Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.Type: GrantFiled: November 12, 2019Date of Patent: April 19, 2022Assignee: MKS TECHNOLOGYInventors: Mark Watson, Shane Buller, Keith Carron
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Patent number: 10473522Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.Type: GrantFiled: October 6, 2017Date of Patent: November 12, 2019Assignee: MKS TECHNOLOGYInventors: Mark Watson, Shane Buller, Keith Carron
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Patent number: 9791313Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.Type: GrantFiled: May 31, 2013Date of Patent: October 17, 2017Assignee: MKS TECHNOLOGYInventors: Mark Watson, Shane Buller, Keith Carron
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Patent number: 9523610Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.Type: GrantFiled: March 23, 2015Date of Patent: December 20, 2016Assignee: MKS TechnologyInventors: Mark Watson, Shane Buller, Keith Carron
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Patent number: 9459146Abstract: A spectroscopic system is provided. In one embodiment, the spectroscopic system comprises a light source adapted to provide a beam of illumination; an optical system adapted to provide the beam of illumination to a sample and receive a spectroscopy signal from the sample and direct the spectroscopy signal to at least one single channel detector, wherein the optical system comprises an adjustable dispersing element for directing one or more spectral features of the spectroscopy signal to the at least one single channel detector; a calibration detector adapted to determine a set point of the adjustable dispersing element; and a source synchronization component adapted to synchronize an operation of the light source and the at least one single channel detector. A method of calibrating a dispersing element of a spectrometer is also provided.Type: GrantFiled: October 20, 2014Date of Patent: October 4, 2016Assignee: MKS TechnologyInventors: Keith Carron, Mark Watson, Shane Buller
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Patent number: 8988678Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.Type: GrantFiled: August 31, 2011Date of Patent: March 24, 2015Assignee: MKS TechnologyInventors: Mark Watson, Shane Buller, Keith Carron
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Patent number: 8867033Abstract: A spectroscopic system including a light source adapted to provide a beam of illumination; an optical system adapted to provide the beam of illumination to a sample and receive a spectroscopy signal from the sample and direct the spectroscopy signal to at least one single channel detector is provided. The optical system comprises an adjustable dispersing element for directing one or more spectral features of the spectroscopy signal to the at least one single channel detector. A calibration detector is adapted to determine a set point of the adjustable dispersing element; and a source synchronization component is adapted to synchronize an operation of the light source and the at least one single channel detector. A method of calibrating a dispersing element of a spectrometer is also provided.Type: GrantFiled: June 15, 2011Date of Patent: October 21, 2014Assignee: MKS TechnologyInventors: Keith Carron, Mark Watson, Shane Buller