Abstract: A method of measuring Raman scattering includes exciting Raman scattering of a sample with a first wavelength and a second wavelength of electromagnetic radiation traveling along a common optical path to form a first scattered radiation and a second scattered radiation. The first wavelength reaches the sample polarized in a first direction, and the second wavelength reaches the sample polarized in a second direction perpendicular to the first direction. The method includes collecting a first Raman spectrum from the first scattered radiation, collecting a second Raman spectrum from the second scattered radiation, and forming a decomposed Raman spectrum based on the first Raman spectrum and the second Raman spectrum. The decomposed Raman spectrum may be substantially free of noise, such as fluorescence and background radiation. Related spectrometers and laser devices are disclosed.
Type:
Grant
Filed:
January 8, 2018
Date of Patent:
October 29, 2019
Assignee:
MKS Technology, Inc.
Inventors:
Keith T. Carron, Celestin P. Zemtsop, Shane A. Buller, Scott L. Rudder, Harald R. Guenther
Abstract: Spectrometers and methods for determining the presence or absence of a material in proximity to and/or combined with another material are provided. In one particular example, a spectrometer is provided that includes a light source, a detector and an optical system. In this implementation, the light source is configured to provide an excitation incident beam. The detector is configured to detect a spectroscopy signal. The optical system is configured to direct the excitation incident beam toward a sample at a non-zero angle from a zero-angle reference. The optical system is further configured to receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector. The detector is configured to remove a spectral interference component of the spectroscopy signal.
Type:
Grant
Filed:
October 2, 2015
Date of Patent:
September 11, 2018
Assignee:
MKS Technology, Inc.
Inventors:
Keith T. Carron, Shane A. Buller, Mark A. Watson, Sean Patrick Woodward