Abstract: To provide a degassing unit having a wide range of flow speed, high-efficiency compactness in size, this degassing unit consists of both a degassing module composed of a gas permeable flat-shaped tube 201 wound around the internal vacuum space 401 and a vacuum chamber containing this flat tube, and by flowing an eluent through the flat tube 201 which constitutes the degassing module, gaseous components dissolved in the eluent can be transpired from the flat tube 201 to the vacuum chamber accommodating the internal vacuum space 401 and the external vacuum space 402 and 403, thus being well removed.
Type:
Grant
Filed:
March 23, 2000
Date of Patent:
November 20, 2001
Assignees:
Micro Electronics Inc., Moleh Company Limited