Patents Assigned to Morisei Kako Co., Ltd.
  • Patent number: 6172162
    Abstract: A sealing composition which can keep strength necessary for a sealant and can be reduced a content of eluted metal and a sealant for an etching apparatus made from the sealing composition. The composition is prepared by blending a fluorine-containing elastomer containing a repeating unit derived from fluoroolefin and a repeating unit derived from perfluoroalkyl vinyl ether as a main component and 5-50 percent by weight of fluororesin powder. The content of eluted metal in the cured composition is not to more than 8 ppb.
    Type: Grant
    Filed: April 23, 1997
    Date of Patent: January 9, 2001
    Assignee: Morisei Kako Co., Ltd.
    Inventor: Junsaku Mouri