Patents Assigned to MSP Corporaton
  • High accuracy vapor generation and delivery for thin film deposition
    Publication number: 20060144338
    Abstract: The present invention involves injecting a liquid and gas into a vapor holding chamber held at a sufficiently high temperature to insure all the liquid injected is vaporized and held in the chamber as a vapor. The gas/vapor mixture is then delivered to the deposition chamber in which the deposition substrate is held.
    Type: Application
    Filed: December 30, 2005
    Publication date: July 6, 2006
    Applicant: MSP Corporaton
    Inventors: Benjamin Liu, Yamin Ma