Abstract: The vacuum isolation valve includes a housing installed between a chamber and a chamber cleaning gas supply and including a tube connecting the chamber to the chamber cleaning gas supply, a tube isolator formed at a predetermined position of the tube, a first blocking unit installed to the housing, and a second blocking unit installed to the housing, for, when the first blocking unit moves in the first direction, maintaining communication between the chamber and the chamber cleaning gas supply by moving in a second direction and pressing the first blocking unit and for, when the first blocking unit moves in an opposite direction to the first direction, blocking communication between the chamber and the chamber cleaning gas supply.