Abstract: A device for treating a product with microwaves includes a treatment chamber, in which the product can be transported along a transport path in a transport direction through the treatment chamber, and a microwave radiation device arranged in the treatment chamber, by means of which microwaves coupled into the microwave radiation device can be radiated, which act on the product, wherein the microwave radiation device includes at least one coaxial conductor which protrudes into the treatment chamber, or is arranged therein, with an electrically-conductive internal conductor and an electrically-conductive external conductor, wherein the external conductor, arranged coaxially, surrounds the internal conductor in a spaced manner and includes at least one opening, which enables an emission of microwaves from the coaxial conductor through the opening on to the product.

Abstract: A microwave treatment device comprises a treatment chamber, in which an object to be treated can be arranged, and a microwave emission device, by which microwave radiation can be radiated into the treatment chamber or emitted therein. The microwave emission device comprises at least one array antenna with a plurality of individual emitters and a microwave control device which can be used to specify an emission characteristic for each individual emitter of the at least one array antenna. A phase and/or amplitude of the microwave emission can be specified for each individual emitter by the microwave control device. A phase and/or an amplitude of the microwave emission can be specified for each individual emitter by the microwave control device. Furthermore, a frequency of the microwave emission can be specified within a frequency range for each individual emitter by the microwave device.

Abstract: A device fir treating a product with microwaves has a treatment chamber in which the product can be conveyed along a transport track in a transport direction through the treatment chamber, and has a microwave-emitting apparatus, which is arranged in the treatment chamber and by which microwaves coupled into the microwave-emitting apparatus can be emitted, which microwaves impinge upon the product. The microwave-emitting apparatus has at least one coaxial conductor, which protrudes into or is arranged in the treatment chamber and which has an electrically conductive inner conductor and an electrically conductive outer conductor, the outer conductor surrounding the inner conductor at a distance therefrom and in coaxial arrangement and having at least one opening, which enables the emission of microwaves through the opening from the coaxial conductor onto the product.

Abstract: A device is provided for generating plasma by microwaves for CVD coating a substrate having a vacuum container into which a reaction gas can be fed and an electrical conductor arranged therein which is connected on each of both ends thereof to a device for coupling microwaves and to a voltage source with which a difference of potential can generated between the electrical conductor and the surrounding vacuum container. The electrical conductor is electrically insulated from the devices for coupling microwaves. The electrical conductor has a rod-shaped design or a curved run. The electrical conductor is connected to the voltage source via a feedthrough filter. The device for coupling microwaves expands in a funnel shape toward the electrical conductor and is partially or completely filled by a dielectric material. The device for coupling microwaves has groove-shaped recesses running along a circumference.

Abstract: A magnetic field generation apparatus is provided for a magnetron including a permanent magnet arrangement and a magnetic field conductor device. The magnetic field conductor device has a diverting element. The diverting element, which includes a plurality of rectangular diverting segments, is arranged detachably on the magnetic field generation apparatus during maintenance work in order to deflect a magnetic field generated by the permanent magnet arrangement away from further components of the magnetic field generation apparatus and components of the magnetron. A magnetron includes a magnetron tube and such a magnetic field generation apparatus. In a method for replacing an old magnetron tube of such a magnetron with a new magnetron tube, the diverting element is arranged on the magnetic field generation apparatus, and the old magnetron tube is removed from the magnetron and replaced with the new magnetron tube in order to then remove the diverting element again.

Abstract: A magnetic field generation apparatus is provided for a magnetron including a permanent magnet arrangement and a magnetic field conductor device. The magnetic field conductor arrangement device has a diverting element. The diverting element, which includes a plurality of rectangular diverting segments, is arranged detachably on the magnetic field generation apparatus during maintenance work in order to deflect a magnetic field generated by the permanent magnet arrangement away from further components of the magnetic field generation apparatus and components of the magnetron. A magnetron includes a magnetron tube and such a magnetic field generation apparatus. In a method for replacing an old magnetron tube of such a magnetron with a new magnetron tube, the diverting element is arranged on the magnetic field generation apparatus, and the old magnetron tube is removed from the magnetron and replaced with the new magnetron tube in order to then remove the diverting element again.