Patents Assigned to MueTec Automatisierta Mikroskopie und Messtechnik GmbH
  • Apparatus for measuring feature widths on masks for the semiconductor industry
    Patent number: 7375792
    Abstract: An apparatus for measuring feature widths on masks 1 for the semiconductor industry is disclosed. The apparatus encompasses a carrier plate 16 that is retained in vibrationally decoupled fashion in a base frame 14; a scanning stage 18, arranged on the carrier plate 16, that carries a mask 1 to be measured, the mask 1 defining a surface 4; and an objective 2 arranged opposite the mask 1. A liquid 25 is provided between the objective 2 and the surface 4 of the mask 1.
    Type: Grant
    Filed: September 17, 2004
    Date of Patent: May 20, 2008
    Assignees: Leica Microsystems Semiconductor GmbH, MueTec Automatisierta Mikroskopie und Messtechnik GmbH
    Inventors: Wolfgang Vollrath, Frank Hillmann, Gerd Scheuring, Hans-Jürgen Brueck