Patents Assigned to Murata Machinery, Ltd.
  • Patent number: 10919248
    Abstract: A press brake includes a ram to which an upper or lower tool can be attached; a movable ram driver; and a controller that controls the ram driver, wherein the ram driver includes a rotation/linear motion converter composed of a screw fixed to the ram and moves upward and downward as the ram moves upward and downward, and a nut screw-coupled with the screw; a drive rotation body arranged rotatably about a rotation axis of the nut; a first motor arranged in a fixed state; a first power transmitter that transmits rotation of the first motor to the nut at high speed and with low torque; a second motor arranged in a fixed state; a second power transmitter that transmits rotation of the second motor to the drive rotation body at low speed and with high torque; and a clutch provided between the nut and the drive rotation body.
    Type: Grant
    Filed: September 28, 2017
    Date of Patent: February 16, 2021
    Assignee: Murata Machinery, Ltd.
    Inventor: Katsumasa Hattori
  • Patent number: 10923370
    Abstract: A transport system includes: an image capturer included in a transport vehicle; a positional deviation detector that detects a positional deviation between a pre-correction position at a time when the article is placed on a reference transfer destination and a reference placement position; a corresponding relationship calculator that finds a pixel deviation between a pre-correction image and a post-correction image and calculates an actual deviation amount per unit pixel, the pre-correction image being captured at an initial position of the transport vehicle by the image capturer, and the post-correction image being captured by the image capturer at a position of the transport vehicle deviated by the positional deviation; and the correction amount calculator that finds a pixel deviation between the post-correction image and a transfer destination image captured of another transfer destination and calculates a correction amount from the pixel deviation and the actual deviation amount per unit pixel.
    Type: Grant
    Filed: March 16, 2018
    Date of Patent: February 16, 2021
    Assignee: Murata Machinery, Ltd.
    Inventor: Kazumi Harasaki
  • Publication number: 20210039896
    Abstract: A transport device includes a carriage that travels along a traveling path that is predetermined; a transfer mechanism provided on the carriage and transfers an article in a transfer space set in the traveling path; a first movable element that is a rod shaped component attached to the carriage, extends in a traveling direction of the carriage, and operates by magnetism to drive the transfer mechanism; and a first stator fixedly disposed with respect to the traveling path, has a partially cutout ring shape, and causes the first movable element to operate by magnetism when part of the carriage is positioned outside the transfer space.
    Type: Application
    Filed: January 30, 2019
    Publication date: February 11, 2021
    Applicant: Murata Machinery, Ltd.
    Inventor: Kenji KADOGUCHI
  • Patent number: 10913601
    Abstract: A temporary storage system includes a travel rail having first rails and second rails, the first rails and the second rails being disposed in a grid pattern on a same plane and disposed to surround a transfer port for receiving an article in a two-dimensional view; a vehicle having a travel part and a transfer part including an elevator; and storages each configured to store the article, in which the travel rail is disposed such that the vehicle is accessible to a stop position where the transfer part is disposed immediately above the transfer port from a side with the storage for the transfer port and the vehicle is accessible to another stop position where the transfer part is disposed immediately above the storage.
    Type: Grant
    Filed: January 24, 2017
    Date of Patent: February 9, 2021
    Assignee: Murata Machinery, Ltd.
    Inventor: Takashi Suzuki
  • Patent number: 10889438
    Abstract: A stocker includes a wall that separates inside and outside of the stocker, a storage area on an inner side of the wall to store articles, a duct on a wall side of the storage area and extending in a vertical direction, an inlet at an upper end of the duct to introduce air flowing downward into the duct, a flow regulator to regulate an airflow between an upper side and a lower side of the duct, blowout openings on a storage area side of the duct to blow out air to the storage area, and a fan on a lower side of the flow regulator of the duct to draw in outside air and introduce the outside air into the duct.
    Type: Grant
    Filed: January 11, 2018
    Date of Patent: January 12, 2021
    Assignee: MURATA MACHINERY, LTD.
    Inventors: Yu Kusama, Fumiki Goto
  • Patent number: 10882697
    Abstract: A storage apparatus includes a storage shelf that stores a container, a purge device that is provided to the storage shelf and is able to perform a purge process on the container, and a purge determiner that determines at least one of a necessity of the purge process and a condition of the purge process in accordance with at least one of a transport source of the container to the storage shelf and a transport destination of the container from the storage shelf.
    Type: Grant
    Filed: July 4, 2016
    Date of Patent: January 5, 2021
    Assignee: MURATA MACHINERY, LTD.
    Inventors: Masanao Murata, Tadamasa Tominaga
  • Patent number: 10875268
    Abstract: A transport system prevents swinging of a lift stage at the time of ascent and descent, while appropriately supporting an article shifted from the reference position. The transport system includes a transport device that transfers a green tire to and from a rack part. The transport device includes a lift stage, a support part, and a guided part. The lift stage is provided to be movable upward and downward. The support part is provided on the lift stage and supports an upper inner wall of the green tire from a lower side. The guided part is provided on the lift stage. The rack part is provided with a guide part having a lower portion defining a first gap with the guided part and an upper portion defining a second gap with the guided part.
    Type: Grant
    Filed: April 11, 2019
    Date of Patent: December 29, 2020
    Assignee: Murata Machinery, Ltd.
    Inventor: Hideji Sakata
  • Patent number: 10850923
    Abstract: A transporter that moves between a plurality of transfer destinations at which articles can be placed, and transfers the article to the transfer destination, the transporter including a transferer capable of extending to or retracting from the transfer destination, and that places the article at the transfer destination in a state of having extended to the transfer destination from a waiting position; a detector that detects, after the transporter has transferred the article to the transfer destination, before the transporter starts moving toward another transfer destination, and before the transporter has returned to the waiting position, a posture or a position of the article; and a determiner that determines whether or not the posture or the position of the article is within a preliminarily set appropriate range, on the basis of detection results of the detector.
    Type: Grant
    Filed: August 10, 2017
    Date of Patent: December 1, 2020
    Assignee: Murata Machinery, Ltd.
    Inventor: Naruto Adachi
  • Patent number: 10829301
    Abstract: A stacker crane includes a transferring device, a first camera, a second camera, and a system controller. The transferring device transfers the article W to and from the shelf. The first camera and the second camera are provided on the transferring device and are fixed at positions where the first and second cameras can capture images of end parts of the article placed on the transferring device in a front-rear direction which is at least a transferring direction of the article and a transfer destination shelf on the end part side in the front-rear direction. Based on detection results of the first camera and the second camera, the system controller identifies the presence or absence of an article on the transfer destination shelf and determines the article-state abnormality of the article placed on the transferring device.
    Type: Grant
    Filed: November 7, 2018
    Date of Patent: November 10, 2020
    Assignee: Murata Machinery, Ltd.
    Inventor: Yuichi Nakanishi
  • Patent number: 10822205
    Abstract: In an overhead transport vehicle, an elevator includes shock absorbers attached to belts, and a base including a holder. The shock absorbers each include a support below the base. The base is vertically movable with respect to each of the supports with vibration isolators. The shock absorbers are connected by a link that operates to ensure similarity of respective distances between the base and the support connected to each other in each of the shock absorbers.
    Type: Grant
    Filed: September 21, 2017
    Date of Patent: November 3, 2020
    Assignee: MURATA MACHINERY, LTD.
    Inventor: Makoto Kobayashi
  • Patent number: 10818529
    Abstract: A purge device capable of appropriately purging a container while saving purge gas includes a first purge nozzle that supplies a purge gas to a container to be purged, an internal state detector capable of detecting an internal state of the container before a purging process with the first purge nozzle is started, and a purge determiner that determines purge conditions for the container based on a detection result from the internal state detector.
    Type: Grant
    Filed: July 14, 2016
    Date of Patent: October 27, 2020
    Assignee: MURATA MACHINERY, LTD.
    Inventors: Masanao Murata, Takashi Yamaji
  • Patent number: 10818530
    Abstract: Carrier, container or other system that provides a separation and protection for substrates, wafers, etc. for before, during or after processing or storage through the use of a membrane integral to the carrier or container respectively. This includes for use with Tec-Cell systems with high and low density configurations as well as other standardized systems, such as FOUPs. Includes protection for contamination brakeage chafing, through isolation and containment. Additional features are included such as the membrane providing guides or otherwise increasing efficiency or presence of airflow, such as laminar airflow over each substrate, wafer, etc. being held.
    Type: Grant
    Filed: August 30, 2018
    Date of Patent: October 27, 2020
    Assignee: MURATA MACHINERY, LTD.
    Inventors: Fachri Atamny, Gerhard Dovids, Yves Fenner
  • Patent number: 10766056
    Abstract: A purge device includes: a plurality of mounts on which containers are to be placed and that are grouped, a nozzle that is structured such that when a container is placed on the corresponding mount, a flow path to supply a purge gas to the container is opened, and a flow rate controller that adjusts a flow rate of the purge gas supplied into a group based on a number of containers in the group.
    Type: Grant
    Filed: June 9, 2016
    Date of Patent: September 8, 2020
    Assignee: MURATA MACHINERY, LTD.
    Inventor: Shinji Onishi
  • Patent number: 10734268
    Abstract: Methods, systems and apparatuses for an improved wafer and substrate carrier or container with improved modularity. More specifically, to a carrier or container with improved abilities which may provide high or low density carriers or containers with improved interchanging and compatibility, including for Tec-Cells, FOUPs, and other third party containers, carriers, modules, rings or any other systems, structures, apparatuses, or methods associated. The invention may provided an ability to interchange or be cross-compatible such as wherein Tec-Cell carriers, containers, rings or modules may be provided to be housed in a FOUP or other third party carrier or wherein substrates or wafers held in the Tec-Cell Carriers, rings, containers, or modules, and then held within the FOUP.
    Type: Grant
    Filed: August 30, 2018
    Date of Patent: August 4, 2020
    Assignee: MURATA MACHINERY, LTD.
    Inventors: Fachri Atamny, Gerhard Dovids, Yves Fenner
  • Patent number: 10734267
    Abstract: A conveyance system includes: a first track and a second track arranged parallel in a vertical direction such that device ports are positioned therebelow and on one side thereof; a plurality of overhead conveyance vehicles configured to travel along each of the first track and the second track and each convey a FOUP, and storage shelves provided below and on the other side of the first track and the second track and each configured to have the FOUP placed thereon. Each of the overhead conveyance vehicles includes: a gripping unit capable of gripping the FOUP; a movement mechanism capable of moving the gripping unit to a position above the device ports or above the storage shelves; and a hoisting mechanism capable of raising and lowering the gripping unit, which has been moved to the position above each thereof by the movement mechanism.
    Type: Grant
    Filed: June 17, 2016
    Date of Patent: August 4, 2020
    Assignee: MURATA MACHINERY, LTD.
    Inventor: Yoichi Motoori
  • Patent number: 10728367
    Abstract: A control system includes a to-be-controlled apparatus disposed in a clean room, a control device disposed outside the clean room and controlling the to-be-controlled apparatus through Ethernet communication, and a conversion device disposed in the clean room and mutually converting communication data on Ethernet communication with the control device and communication data on serial communication with the to-be-controlled apparatus.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: July 28, 2020
    Assignee: MURATA MACHINERY, LTD.
    Inventors: Wataru Kitamura, Kentaro Kataoka
  • Patent number: 10720353
    Abstract: An opener apparatus that accommodates and opens a substrate carrier stack of substrate carriers stacked in a vertical direction, includes a movement mechanism that moves all of the substrate carriers or a sub-group of the substrate carriers relatively with respect to each other along a vertical axis in an opening operation to assume an unstacked state and to be positioned at defined vertical opened positions within the opener apparatus with vertical distances between vertically adjacent substrate carriers in the unstacked state. The opener apparatus also moves the substrate carriers in the unstacked state relatively with respect to each other along the vertical axis in a closing operation to reassume a stacked state.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: July 21, 2020
    Assignee: MURATA MACHINERY, LTD.
    Inventors: Thomas Schober, Bernd Rahrbach, Christian Wohanka, Yves Fenner, Gerhard Dovids, John Fiddes
  • Patent number: 10714368
    Abstract: An overhead transport vehicle system includes an overhead transport vehicle to convey an object, and a teaching unit to teach transfer of the object by the overhead transport vehicle to a load port on which the object is to be placed. The teaching unit includes a body including a detector to be brought into contact with a positioning pin on the load port to detect a position of the positioning pin, and a flange movable up and down with respect to the body and to be held by a holder to be raised and lowered by an elevator of the overhead transport vehicle.
    Type: Grant
    Filed: February 14, 2018
    Date of Patent: July 14, 2020
    Assignee: MURATA MACHINERY, LTD.
    Inventor: Makoto Kobayashi
  • Patent number: 10702951
    Abstract: A laser machine includes a laser head that machines a planar workpiece in a machining region while moving relative to the workpiece, a workpiece rack that is able to travel with the workpiece placed thereon, and an elevator that is able to locate the workpiece in the machining region by raising and lowering the workpiece rack with the workpiece placed thereon.
    Type: Grant
    Filed: April 13, 2016
    Date of Patent: July 7, 2020
    Assignee: Murata Machinery, Ltd.
    Inventor: Koji Ozeki
  • Patent number: 10699928
    Abstract: A transport system includes an overhead transport vehicle that travels on a first track and is capable of delivering and receiving an article to and from a load port of a processing tool; a storage rack having a plurality of shelves that store the articles arranged in a vertical direction; a crane that travels on a second track parallel with the first track and is capable of delivering and receiving the article to and from the load port and the storage rack, respectively; and a first buffer arranged at a position where the crane that has stopped traveling at a position to deliver or receive the article to or from the load port is able to deliver or receive the article.
    Type: Grant
    Filed: May 2, 2017
    Date of Patent: June 30, 2020
    Assignee: Murata Machinery, Ltd.
    Inventor: Yoichi Motoori