Abstract: A conveyor system includes a cartridge, which defines a section of the conveyor. In one embodiment, the cartridge includes a number of wheels, which are designed as a unit for a conveyor section and the wheels of the cartridge are designed to hold a belt. A conveyor section, in one optional embodiment, includes integrated sensors for detecting the presence of a container (e.g., FOUP), and each conveyor section can implement precision sheet metal rails that facilitate high speed FOUP transport. In one embodiment, each conveyor section has two sides. Each side has a cartridge that has a belt. In particular embodiments, one side of the conveyor section includes a drive motor, that drives the conveyor.

Abstract: A transport system includes a first track that passes above loading ports of the processing devices, and an overhead travelling vehicle that travels along the first track and includes a hoist. A second track is below the first track, passes above the loading ports, and is disposed in parallel or substantially in parallel with the first track. A buffer is provided below the second track at a position higher than the loading ports, and is arranged such that the articles can pass in a vertical direction over the loading ports. The buffer is disposed such that the articles can pass through the height position of the buffer in a vertical direction over the loading ports. A local vehicle travels along the second track and includes a hoist to perform delivery and receipt of the articles between the buffer and the loading ports.

Abstract: A transfer system includes: a first shelf disposed to block an original transfer path from a transfer position at which the transporting vehicle transfers the transported object to the port and can transfer the transported object with the transporting vehicle; a second shelf which puts the transported object; a displacing device can reciprocate the transported object with respect to the first shelf and the port in a first direction, toward and away from the processing apparatus, and which can reciprocate the transported object at first direction position, which is away in the first direction by the transported object from the first shelf and the port, in a second direction crossing the first direction; and a communicating device which receives a transfer request from the transporting vehicle, which can transmit a transfer permission to the transporting vehicle.

Abstract: A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.

Abstract: A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers.

Abstract: In a transport system, a positioning hole is provided in an undersurface of a container. A positioning protrusion corresponding to the positioning hole of the container provided on a first load port of a manufacturing device. When a transport vehicle places the container onto the first load port, the placement position of the container is established by having the positioning protrusion of the first load port fit into the positioning hole. A second load port different from the first load port of the manufacturing device is provided on a storage device. A positioning protrusion is not provided on the second load port. A slip prevention member is provided on an upper surface of the second loading load port.

Abstract: In a transport system, two drop prevention barriers and a drop prevention mechanism are provided along a periphery of a load port where a transported article has been placed. The drop prevention barriers and the drop prevention mechanism are arranged on three sides around the periphery of the load port and a remaining side is open along a first direction. The drop preventing mechanism includes a retaining member rotatably supported on a bracket. When a transported article moves along the first direction, the retaining member is pushed by a transport device such that it rotates from an initial position and retracts in an opposite direction from where a path is located. When the transported article has been loaded onto the load port, the retaining member returns to the initial position such that it is arranged slightly above the transported article.

Abstract: In a transport system, a local track is disposed so as to be below an overhead travelling vehicle track in parallel or substantially in parallel therewith, and furthermore above a loading port of a processing device from upstream of the loading port to downstream of the loading port. A local vehicle including a hoist travels along the local track. Below the local track, a first buffer is disposed upstream of the loading port of the processing device, and a second buffer is disposed downstream of the loading port of the processing device, and the overhead travelling vehicle and the local vehicle can both perform delivery and receipt of the article with the first buffer and the second buffer.

Abstract: A stocker includes a main body provided with an opening; a port which is adjacent to the opening outside the main body and on which a FOUP can be placed; a plurality of rack portions arranged in one horizontal direction at each of a plurality of levels within the main body and configured such that articles moved by an internal movement apparatus can be put in place; a movable rack portion including a first buffer and a second buffer which are linked to each other; a shift mechanism that can be shifted between a first position where the first buffer is adjacent to the opening and a second position where the second buffer is adjacent to the opening; and a conveyor capable of moving the FOUP, via the opening, between the port and the first buffer or the second buffer positioned at a position adjacent to the opening.

Abstract: A transporting system is provided with: a track having a junction point; a plurality of transporting vehicles, each travelling on the track; and a transferring device which has (i) a left portion disposed on an edge on a left side of each of two track portions that are located at least before the junction point of the track with respect to a travelling direction of each transporting vehicle as a standard and (ii) a right portion disposed on an edge on a right side, and which can transfer a signal between the left portion in one of the two track portions and the right portion in another of the two track portions, and between the right portion in said one of the two track portions and the left portion in said another of the two track portions.

Abstract: A conveyor system is provided. The conveyor system includes a threshold assembly. The threshold assembly has a base plate that is secured to a floor, and the threshold assembly has a channel that is formed between two support beams that are secured to a base plate. A plurality of threshold center plates are provided, which span and enclose the channel formed by the support beams, such that each threshold assembly includes a modular printed circuit board that fits within the channel and is enclosed within the channel by threshold center plates. And, multiple conveyor segments are mountable to the threshold assembly. Other systems components and methods for making and operating the same are provided.

Abstract: A gripper device for a transport vehicle includes a base plate, a guide rail provided on an upper surface of the base plate, a pair of guide blocks arranged to be movable in a substantially horizontal direction toward and away from each other along the guide rail, and a pair of gripping parts. Each of the gripping parts includes a horizontal portion fixed to an upper surface of one of the guide blocks and arranged to extend substantially parallel to the upper surface of the base plate, a vertical portion arranged to extend downward from the horizontal portion to a position lower than that of the base plate, and a claw section provided on a lower end of the vertical portion and arranged to grip an object.

Abstract: A plurality of conveying apparatuses ace arranged from the inside of the first building to the inside of the second building along a conveying direction. A plurality of connection mechanisms connect each pair of adjacent conveying apparatuses such that the conveying apparatuses are arranged in a meandering manner in a case where relative positions between the first building and the second building are changed.

Abstract: A stocker 1 includes a storage FOUP 20, plural purge units 50, a measurement FOUP 30 and a stacker crane 60. The storage FOUP 20 stores a semiconductor wafer inside. The measurement FOUP 30 includes a flow meter inside. The purge unit 50 includes a purge shelf 51 having plural purge tables 54 for placing the storage FOUP 20, and a nitrogen gas is supplied into the storage FOUP 20 placed on the purge table 54. The stacker crane 60 transports the storage container 20 onto the purge table 54, and the measurement FOUP 30 is transported between the plural purge tables 54.

Abstract: Objects to be transported which are transported between at least one storage unit and a plurality of manufacturing apparatuses by a plurality of transport vehicles in accordance with a command of a controller are managed inexpensively and easily and with high reliability. An ID card 20 incorporating a wireless communication function is installed on all carriers 18, and an ID read/write unit 25 is installed in some transport vehicles 10. Further, a carrier ID is read or written with respect to the ID card 20 in accordance with a command of an MCS 4 connected to the ID read/write unit 25, so as to manage the carrier ID by a carrier ID management unit 4a.

Abstract: An elevation conveyor 5 includes a turntable 17 and a roller conveyor 18. The roller conveyor 18 is supported onto the turntable 17. A turntable controller 7 turns the turntable 17 so that the roller conveyor 18 matches with a carrying direction of a conveyor rail for receiving or delivering a load and then drives the conveyor rail and the roller conveyor 18 to receive or deliver an FOUP 8. An elevation conveyor 5 is held in a cable 20a installed in an elevation space 9 through a coupling member 20b of a cableveyor 20, and can freely elevate and stop at a port 21 installed on each floor while being interlocked with motion of the cableveyor 20 caused by reciprocating circulation of the cableveyor 20 in a vertical direction by an elevation conveyor controller 4.

Abstract: The present invention generally comprises an apparatus for transporting containers between a first transport system and a second transport system. In one embodiment, the first transport system comprises a ceiling-based conveyor and the second transport system comprises a floor-based conveyor. The present invention may further include storage shelves, preferably substantially horizontally aligned about a common vertical plane with a section of one of the transport systems. The transport system may be located either directly above the uppermost storage shelf or beneath the lowermost storage shelf in order to add storage capacity within the fab. A vertical module transports containers between the transport systems and the at least one storage shelf.

Abstract: A conveyor and conveyor system is defined for moving a container used to hold semiconductor wafers. The conveyor includes a first belt having a first support surface for movably supporting the container and a second belt having a second support surface for movably supporting the container. The first belt and the second belt each have a raised guide. The conveyor further includes a drive assembly for moving at least the first belt and causing the container to move over the first and second belts when placed on the first and second support surfaces. Methods for making the conveyor and operating the conveyor are also defined herein.

Abstract: The present invention comprises a stocker. The stocker comprises multiple container storage locations arranged in a horizontal array. The horizontal array of storage locations may be suspended from the facility ceiling or supported by the facility floor. The stocker may include one or more stocker robots for transporting a workpiece container within the stocker and/or to a material transport system. The stocker may also include features such as container elevators and conveyor loops.

Abstract: A transfer system includes: a first shelf blocking an original transfer path from a transfer position at which the transporting vehicle transfers the transported object to the port and which transfers the transported object with the transporting vehicle; a second shelf that puts the transported object; a displacing device which reciprocates the transported object with respect to the first shelf and the port in a first direction, toward and away from the processing apparatus, and reciprocates the transported object at a first direction position, away in the first direction by the transported object from the first shelf and the port, in a second direction crossing the first direction; and a communicating device receiving a first system signal indicating a transfer request from the transporting vehicle, which transmits a second system signal indicating a transfer permission to the transporting vehicle, which transmits the first system signal to the processing apparatus.