Abstract: A conveyor system includes a cartridge, which defines a section of the conveyor. In one embodiment, the cartridge includes a number of wheels, which are designed as a unit for a conveyor section and the wheels of the cartridge are designed to hold a belt. A conveyor section, in one optional embodiment, includes integrated sensors for detecting the presence of a container (e.g., FOUP), and each conveyor section can implement precision sheet metal rails that facilitate high speed FOUP transport. In one embodiment, each conveyor section has two sides. Each side has a cartridge that has a belt. In particular embodiments, one side of the conveyor section includes a drive motor, that drives the conveyor.

Abstract: A transfer system includes: a first shelf disposed to block an original transfer path from a transfer position at which the transporting vehicle transfers the transported object to the port and can transfer the transported object with the transporting vehicle; a second shelf which puts the transported object; a displacing device can reciprocate the transported object with respect to the first shelf and the port in a first direction, toward and away from the processing apparatus, and which can reciprocate the transported object at first direction position, which is away in the first direction by the transported object from the first shelf and the port, in a second direction crossing the first direction; and a communicating device which receives a transfer request from the transporting vehicle, which can transmit a transfer permission to the transporting vehicle.

Abstract: A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.

Abstract: A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers.

Abstract: In a transport system, a local track is disposed so as to be below an overhead travelling vehicle track in parallel or substantially in parallel therewith, and furthermore above a loading port of a processing device from upstream of the loading port to downstream of the loading port. A local vehicle including a hoist travels along the local track. Below the local track, a first buffer is disposed upstream of the loading port of the processing device, and a second buffer is disposed downstream of the loading port of the processing device, and the overhead travelling vehicle and the local vehicle can both perform delivery and receipt of the article with the first buffer and the second buffer.

Abstract: A transporting system is provided with: a track having a junction point; a plurality of transporting vehicles, each travelling on the track; and a transferring device which has (i) a left portion disposed on an edge on a left side of each of two track portions that are located at least before the junction point of the track with respect to a travelling direction of each transporting vehicle as a standard and (ii) a right portion disposed on an edge on a right side, and which can transfer a signal between the left portion in one of the two track portions and the right portion in another of the two track portions, and between the right portion in said one of the two track portions and the left portion in said another of the two track portions.

Abstract: A conveyor system is provided. The conveyor system includes a threshold assembly. The threshold assembly has a base plate that is secured to a floor, and the threshold assembly has a channel that is formed between two support beams that are secured to a base plate. A plurality of threshold center plates are provided, which span and enclose the channel formed by the support beams, such that each threshold assembly includes a modular printed circuit board that fits within the channel and is enclosed within the channel by threshold center plates. And, multiple conveyor segments are mountable to the threshold assembly. Other systems components and methods for making and operating the same are provided.

Abstract: A plurality of conveying apparatuses ace arranged from the inside of the first building to the inside of the second building along a conveying direction. A plurality of connection mechanisms connect each pair of adjacent conveying apparatuses such that the conveying apparatuses are arranged in a meandering manner in a case where relative positions between the first building and the second building are changed.

Abstract: A stocker 1 includes a storage FOUP 20, plural purge units 50, a measurement FOUP 30 and a stacker crane 60. The storage FOUP 20 stores a semiconductor wafer inside. The measurement FOUP 30 includes a flow meter inside. The purge unit 50 includes a purge shelf 51 having plural purge tables 54 for placing the storage FOUP 20, and a nitrogen gas is supplied into the storage FOUP 20 placed on the purge table 54. The stacker crane 60 transports the storage container 20 onto the purge table 54, and the measurement FOUP 30 is transported between the plural purge tables 54.

Abstract: Objects to be transported which are transported between at least one storage unit and a plurality of manufacturing apparatuses by a plurality of transport vehicles in accordance with a command of a controller are managed inexpensively and easily and with high reliability. An ID card 20 incorporating a wireless communication function is installed on all carriers 18, and an ID read/write unit 25 is installed in some transport vehicles 10. Further, a carrier ID is read or written with respect to the ID card 20 in accordance with a command of an MCS 4 connected to the ID read/write unit 25, so as to manage the carrier ID by a carrier ID management unit 4a.

Abstract: An elevation conveyor 5 includes a turntable 17 and a roller conveyor 18. The roller conveyor 18 is supported onto the turntable 17. A turntable controller 7 turns the turntable 17 so that the roller conveyor 18 matches with a carrying direction of a conveyor rail for receiving or delivering a load and then drives the conveyor rail and the roller conveyor 18 to receive or deliver an FOUP 8. An elevation conveyor 5 is held in a cable 20a installed in an elevation space 9 through a coupling member 20b of a cableveyor 20, and can freely elevate and stop at a port 21 installed on each floor while being interlocked with motion of the cableveyor 20 caused by reciprocating circulation of the cableveyor 20 in a vertical direction by an elevation conveyor controller 4.

Abstract: The present invention generally comprises an apparatus for transporting containers between a first transport system and a second transport system. In one embodiment, the first transport system comprises a ceiling-based conveyor and the second transport system comprises a floor-based conveyor. The present invention may further include storage shelves, preferably substantially horizontally aligned about a common vertical plane with a section of one of the transport systems. The transport system may be located either directly above the uppermost storage shelf or beneath the lowermost storage shelf in order to add storage capacity within the fab. A vertical module transports containers between the transport systems and the at least one storage shelf.

Abstract: A conveyor and conveyor system is defined for moving a container used to hold semiconductor wafers. The conveyor includes a first belt having a first support surface for movably supporting the container and a second belt having a second support surface for movably supporting the container. The first belt and the second belt each have a raised guide. The conveyor further includes a drive assembly for moving at least the first belt and causing the container to move over the first and second belts when placed on the first and second support surfaces. Methods for making the conveyor and operating the conveyor are also defined herein.

Abstract: The present invention comprises a stocker. The stocker comprises multiple container storage locations arranged in a horizontal array. The horizontal array of storage locations may be suspended from the facility ceiling or supported by the facility floor. The stocker may include one or more stocker robots for transporting a workpiece container within the stocker and/or to a material transport system. The stocker may also include features such as container elevators and conveyor loops.

Abstract: The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x-drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port—allowing the tool load device to service multiple load ports.

Abstract: A transporting system with a fire door (100) is provided with: a rail (1) installed within a facility; a transporting carriage (3), whose wheel (4) is set so as to roll over a surface for rolling of the rail; a fire door plate (7) for segmenting a space within the facility in a direction intersecting the rail at a predetermined position of the rail; and a door plate moving device (8) capable of moving the fire door plate from an open position for the transporting carriage to pass through the predetermined position, to a close position for the fire door plate to segment the space. A first cut (1a) is formed obliquely with respect to a width direction of the rail when planarly seen on the surface for rolling, in the rail at the predetermined position. The fire door plate has a shape capable of passing through the first cut when being moved to the close position.

Abstract: A storage apparatus (1) stores a transported object (220) from a transporting carriage (110), which travels along a track (120) installed on or near a ceiling (210) while gripping the transported object. The storage apparatus is provided with a rack portion (30), on which the transported object is put; and a support member (10), whose upper end is supported by the track or ceiling and whose lower end supports the rack portion. The support member selectively has one of first and second shapes. The first shape allows the transporting carriage to put the transported object onto the rack portion at the predetermined position. The second shape allows the rack portion to move away from a position below the track.

Abstract: A suspended type transporting carriage (16) is provided with: a gripping mechanism (22) for gripping a transported object (17); a hoisting mechanism (21) for hoisting the gripping mechanism; and a traveling mechanism (60), on which the hoisting mechanism is mounted in a suspended condition, for traveling on a rail (20) installed on or near a ceiling. The gripping mechanism is provided with (i) an elongating and contracting device (23) capable of horizontally elongating and contracting and (ii) a gripping device (24) disposed at a tip portion of the elongating and contracting device for selectively gripping the transported object.

Abstract: The connection guide for a rail transport apparatus is provided with a first direction control guide and a second direction control guide such that when the transport vehicle travels in a forward direction, after the guiding operation of the first direction control guide is released the transport vehicle is guided by the second direction control guide, wherein a forward shift guide abuts a guide roller of the transport vehicle during the shift operation.

Abstract: The present invention generally comprises a transport system for transporting containers throughout a fabrication facility, and more specifically through a tool bay in the fabrication facility. The present invention generally includes a first container transport system for transporting a container from an interbay conveyor towards the first tool bay, a second container transport system for moving a container away from the first tool bay and a tool loading device to move containers between the first and second container transport systems and a load port. A merged return conveyor for transporting a container between the second container transport system and the interbay conveyor may also be included.