Abstract: A robust microelectromechanical structure that is less prone to internal or external electrical disturbances. The structure includes a mobile element with a rotor suspended to a support, a first frame anchored to the support and circumscribing the mobile element, and a second frame anchored to the support and circumscribing the mobile element between the mobile element and the first frame, electrically isolated from the first frame. The rotor and the second frame are galvanically coupled to have a same electric potential.
Abstract: In a ladder type filter, a first inductor is connected in series with a parallel resonator. A second inductor is connected in parallel to a series resonator. The resonant point of the parallel resonator having the first inductor connected in series and the anti-resonant point of the series resonator developed on the lower frequency side of the resonant point of the series resonator, caused by the second inductor connected in parallel, substantially coincide with each other.