Patents Assigned to MV Systems, Inc.
  • Hot wire chemical vapor deposition method and apparatus using graphite hot rods
    Patent number: 6427622
    Abstract: A hot wire chemical vapor deposition method and apparatus for fabricating high quality amorphous, micro-crystalline, and poly-crystalline thin film silicon, or related materials, devices and large area modules is described. A silane gas impinges upon a hot graphite rod assembly whereas the gas is broken up into its individual constituents, these constituents then depositing on an inert substrate member. The distance between the hot graphite rod assembly and the substrate member is adjustable. A shutter is provided to shield the substrate member as the hot graphite rod assembly is heating up. The hot graphite rod assembly contains a plurality of mutually parallel and coplanar rods that are parallel to the plane of the substrate member, and the hot graphite rod assembly and/or the substrate is oscillated in a direction generally normal to the direction in which the rods extend.
    Type: Grant
    Filed: April 5, 2001
    Date of Patent: August 6, 2002
    Assignee: MV Systems, Inc.
    Inventors: Arun Madan, Scott Morrison, Jianping Xi
  • Hot wire chemical vapor deposition method and apparatus using graphite hot rods
    Patent number: 6214706
    Abstract: A hot wire chemical vapor deposition method and apparatus for fabricating high quality amorphous, micro-crystalline, and poly-crystalline thin film silicon, or related materials, devices and large area modules is described. A silane gas impinges upon a hot graphite rod assembly whereas the gas is broken up into its individual constituents, these constituents then depositing on an inert substrate member. The distance between the hot graphite rod assembly and the substrate member is adjustable. A shutter is provided to shield the substrate member as the hot graphite rod assembly is heating up. The hot graphite rod assembly contains a plurality of mutually parallel and coplanar rods that are parallel to the plane of the substrate member, and the hot graphite rod assembly and/or the substrate is oscillated in a direction generally normal to the direction in which the rods extend.
    Type: Grant
    Filed: August 3, 1999
    Date of Patent: April 10, 2001
    Assignee: MV Systems, Inc.
    Inventors: Arun Madan, Scott Morrison, Jianping Xi