Abstract: A system and method for integrating gas components that combines together, either in an in-line or modular fashion, at least two gas components used in a gas stick for flowing a gas from a first point to an end point. In one embodiment, the present invention can be used to combine a pressure transducer, a filter, and a display into a single unit that will reduce the gas stick size along the gas flow axis of the gas stick. The gas components can be integrated using VCR connections for an in-line use of the present invention. In the modular form, the present invention can use a number of different connections to connect the gas components vertically on a modular base block (i.e., stacked approximately perpendicular to the modular base block). Thus, the gas components will stack vertically with respect to the traditional horizontal gas flow path axis.

Abstract: A universal track interface stores a plurality of pre-defined track types for automatically configuring the interface according to the required timing, electrical and hardware configuration for a plurality of different tracks used in semiconductor processing operations. To interface a pump to a track, a predefined track type, comprising interface parameters stored in a track table, is accessed by a microprocessor and used to generate control signals for configuring the interface. An operator input device allows custom interfaces to be defined and stored in the table for use as needed to interface either to non-standard tracks or to vary this track interface according to processing requirements.