Abstract: A device for exhaust air processing of clean rooms has a least one fresh air supply and at least one exhaust air device connected to a work room. At least one processing device is arranged in the work room. At least one supply line and at least one exhaust air line are connected to the processing device. At least one first filter is arranged in the at least one exhaust air line of the processing device, wherein the at least one exhaust air line is connected at least to one of the supply line of the processing device and the fresh air supply line of the work room.

Abstract: In a method for regenerating an electrically conducting adsorbent laden with organic substances the adsorbent is heated by passing electric current through the adsorbent while not passing a flushing gas through the adsorbent. Subsequently, the flushing gas is passed through the adsorbent while not heating the adsorbent by passing electric current through the adsorbent so that the adsorbed organic substances are flushed from the adsorbent and the adsorbent is simultaneously cooled by the flushing gas.