Patents Assigned to Nagase Electronic Chemicals, Ltd.
  • Stripping liquid compositions
    Patent number: 5480585
    Abstract: A photoresist stripping liquid composition comprising an alkanol amine compound, a sulfone compound or sulfoxide compound, and a hydroxy compound. The composition is excellent in its photoresist stripping performance, safety and working efficiency, and does not cause corrosion on a substrate possessing a metal film.
    Type: Grant
    Filed: April 28, 1995
    Date of Patent: January 2, 1996
    Assignee: Nagase Electronic Chemicals, Ltd.
    Inventors: Shinichiro Shiotsu, Yoshiaki Horiuchi