Abstract: An integrated circuit comprising an SGT MOSFET and a short channel SBR is disclosed. The SBR horizontally disposed in different areas to the SGT MOSFET on single chip creates a low potential barrier for majority carrier in MOS channel for switching loss reduction. Only one additional mask is required for integration of the short channel SBR having thinner gate oxide than the SGT MOSFET. Moreover, in some preferred embodiment, an MSO structure is applied to the shielded gate structure to further reduce the on-resistance.

Abstract: A trenched semiconductor power device is disclosed comprising a plurality of trenched gates, each including a pair of split gate electrodes and a shielded gate electrode forming an oxide charge balance region between adjacent trenched gates, and junction charge balance region below trench bottom. The trenched semiconductor power device further comprises a super junction structure including a plurality of alternating P and N regions disposed above a substrate forming a junction charge balance region below the oxide charge balance region for breakdown voltage enhancement and on-resistance reductions.

Abstract: A trenched semiconductor power device is disclosed comprising a plurality of trenched gates, each including a gate electrode and a shielded gate electrode forming an oxide charge balance region between adjacent trenched gates; and the trenched semiconductor power device further comprises a super junction structure including a plurality of alternating P and N regions disposed above a substrate and forming a junction charge balance region below the oxide charge balance region for breakdown voltage enhancement, on-resistance and output capacitance reductions.

Abstract: An integrated circuit comprising a surrounding gate transistor (SGT) MOSFET and a super barrier rectifier (SBR) is disclosed. The SBR horizontally disposed in different areas to the SGT MOSFET on single chip creates a low potential barrier for majority carrier in MOS channel, therefore has lower forward voltage and reverse leakage current than conventional Schottky Barrier Rectifier. Moreover, in some preferred embodiment, a multiple stepped oxide (MSO) structure is applied to the shielded gate structure to further reduce the on-resistance.

Abstract: A semiconductor power device having shielded gate structure in an active area and trench field plate termination surrounding the active area is disclosed. A Zener diode connected between drain metal and source metal or gate metal for functioning as a SD or GD clamp diode. Trench field plate termination surrounding active area wherein only cell array located will not cause BV degradation when SD or GD poly clamped diode integrated.

Abstract: A trench semiconductor power device integrated with ESD clamp diodes for optimization of total perimeter of the ESD clamp diodes, wherein the ESD clamp diodes comprise multiple back to back Zener diodes with alternating doped regions of a first conductivity type next to a second conductivity type, wherein anode electrode of the ESD clamp diodes connects with trenched gates in active area for gate resistance reduction.

Abstract: A SGT MOSFET having ESD diode and a method of manufacturing the same are disclosed. The SGT trench MOSFET according to the present invention, has n+ doped shielded electrode in an N channel device and requires only two poly-silicon layers, making the device can be shrunk with reducing shielded gate width for Rds reduction without increasing switching loss and having dynamic switching instability.

Abstract: A trench MOSFET layout with multiple trenched floating gates and at least one trenched channel stop gate in termination area shorted with drain region is disclosed to make it feasibly achieved after die sawing. The layout consisted of multiple trench MOSFETs connected together with multiple sawing trenched gates across a space between two trench MOSFETs having a width same as scribe line. Dummy cells formed between an edge trench and active area act as buffer cells to absorb avalanche energy when gate bias is increasing for turning on channel, therefore, the UIS failure issue is avoided and the avalanche capability of the trench MOSFET is enhanced.

Abstract: A shielded gate trench MOSFET with multiple stepped oxide (MSO) structure surrounding the shielded gate in termination area is disclosed. The inventive structure can reduce specific on-resistance and support enough breakdown voltage, simultaneously. The device structure termination is achieved using angle implant of N and P columns.

Abstract: An integrated circuit comprising a SGT MOSFET and a SBR is disclosed. The SBR horizontally disposed in different areas to the SGT MOSFET on single chip creates a low potential barrier for majority carrier in MOS channel, therefore has lower forward voltage and reverse leakage current than conventional Schottky Barrier Rectifier. Moreover, in some preferred embodiment, a MSO structure is applied to the shielded gate structure to further reduce the on-resistance.

Abstract: A SGT MOSFET having ESD diode and a method of manufacturing the same are disclosed. The SGT trench MOSFET according to the present invention, has n+ doped shielded electrode in an N channel device and requires only two poly-silicon layers, making the device can be shrunk with reducing shielded gate width for Rds reduction without increasing switching loss and having dynamic switching.

Abstract: A trench MOSFET layout with multiple trenched floating gates and at least one trenched channel stop gate in termination area shorted with drain region is disclosed to make it feasibly achieved after die sawing. The layout consisted of multiple trench MOSFETs connected together with multiple sawing trenched gates across a space between two trench MOSFETs having a width same as scribe line. Dummy cells formed between an edge trench and active area act as butler cells to absorb avalanche energy when gate bias is increasing for turning on channel, therefore, the UIS failure issue is avoided and the avalanche capability of the trench MOSFET is enhanced.

Abstract: A trench MOSFET is disclosed having shielded trenched gates in active area, multiple floating trenched gates and at least one channel stop trenched gate in termination area. A semiconductor power device layout is disclosed consisting of at least two said trench MOSFETs connected together with multiple sawing trenched gates across a space between the two trench MOSFETs having a width same as scribe line, making the invented trench MOSFET be feasibly achieved without degraded performance.

Abstract: A trench MOSFET with oxide charge balance region in active area and junction balance region in termination area is disclosed. The inventive structure can reduce specific on-resistance and enhance avalanche capability. The device structure is achieved using angle implant of N and P columns.

Abstract: A trench MOSFET is disclosed having shielded trenched gates in active area, multiple floating trenched gates and at least one channel stop trenched gate in termination area. A semiconductor power device layout is disclosed consisting of at least two said trench MOSFETs connected together with multiple sawing trenched gates across a space between the two trench MOSFETs having a width same as scribe line, making the invented trench MOSFET be feasibly achieved without degraded performance.