Patents Assigned to NaMLab gGmbH
  • Patent number: 9865608
    Abstract: A method disclosed herein includes providing a semiconductor structure, the semiconductor structure comprising a semiconductor substrate and a gate stack, the gate stack comprising a gate insulation material over the substrate, a floating gate electrode material over the gate insulation material, a ferroelectric transistor dielectric over the floating gate electrode material and a top electrode material over the ferroelectric transistor dielectric, performing a first patterning process to remove portions of the top electrode material and the ferroelectric transistor dielectric and performing a second patterning process after the first patterning process to remove portions of the floating gate electrode material and the gate insulation material, wherein a projected area of an upper portion of the gate structure onto a plane that is perpendicular to a thickness direction of the substrate is smaller than a projected area of the lower portion of the gate structure onto the plane.
    Type: Grant
    Filed: May 23, 2016
    Date of Patent: January 9, 2018
    Assignees: GLOBALFOUNDRIES Inc., Fraunhofer Gesellschaft zur Foerderung der angewandted Forschung e.V., NaMLab gGmbH
    Inventors: Johannes Mueller, Stefan Mueller, Stefan Flachowsky
  • Patent number: 9830969
    Abstract: An integrated circuit includes a ferroelectric memory cell. The ferroelectric memory cell includes a ferroelectric layer stack comprising at least one ferroelectric material oxide layer. Each of the ferroelectric material oxide layers includes a ferroelectric material that is at least partially in a ferroelectric state. The ferroelectric layer stack comprises at least two ferroelectric domains. Further, the voltage which is to applied to the layer stack to induce polarization reversal differs for the individual domains such that polarization reversal of individual domains or of a portion of the totality of ferroelectric domains within the ferroelectric material of can be attained.
    Type: Grant
    Filed: December 2, 2016
    Date of Patent: November 28, 2017
    Assignee: NAMLAB GGMBH
    Inventors: Stefan Slesazeck, Halid Mulaosmanovic
  • Patent number: 9818468
    Abstract: A technique for erasing a ferroelectric field effect transistor (FeFET) memory circuit comprising a plurality memory cells comprising FeFETs is described. Each FeFET comprises a gate stack, a source, a drain, a channel and a bulk substrate region, where the gate stack comprises a gate and a ferroelectric layer disposed between the gate and the channel. A positive or a negative voltage is applied to the source and drain regions of at least one FeFET memory cell depending on the channel type. The gate and bulk substrate regions are held at a ground state during said applying of the positive voltage to the source and drain regions of the FeFET memory cell to cause erasure of the at least one FeFET memory cell. In addition, a FeFET is described with a charge storage layer disposed adjacently to the ferroelectric layer within the gate stack.
    Type: Grant
    Filed: November 23, 2016
    Date of Patent: November 14, 2017
    Assignee: NaMLab gGmbH
    Inventor: Stefan Ferdinand Müller
  • Patent number: 9558804
    Abstract: A technique for erasing a ferroelectric field effect transistor (FeFET) memory circuit comprising a plurality memory cells comprising FeFETs is described. Each FeFET comprises a gate stack, a source, a drain, a channel and a bulk substrate region, where the gate stack comprises a gate and a ferroelectric layer disposed between the gate and the channel. A positive or a negative voltage is applied to the source and drain regions of at least one FeFET memory cell depending on the channel type. The gate and bulk substrate regions are held at a ground state during said applying of the positive voltage to the source and drain regions of the FeFET memory cell to cause erasure of the at least one FeFET memory cell. In addition, a FeFET is described with a charge storage layer disposed adjacently to the ferroelectric layer within the gate stack.
    Type: Grant
    Filed: July 23, 2014
    Date of Patent: January 31, 2017
    Assignee: NAMLAB GGMBH
    Inventor: Stefan Ferdinand Müller
  • Patent number: 9437420
    Abstract: A capacitor can include a crystallized metal oxide dielectric layer having a first dielectric constant and an amorphous metal oxide dielectric layer, on the crystallized metal oxide dielectric layer, where the amorphous metal oxide dielectric layer has a second dielectric constant that is less than the first dielectric constant and is greater than a dielectric constant of aluminum oxide.
    Type: Grant
    Filed: April 16, 2015
    Date of Patent: September 6, 2016
    Assignees: Samsung Electronics Co., Ltd., NaMLab gGmbH
    Inventors: Kyu-Ho Cho, Youn-Soo Kim, Han-Jin Lim, Steve Knebel, Uwe Schroeder
  • Patent number: 9053802
    Abstract: An integrated circuit includes a ferroelectric memory cell. In one embodiment, the ferroelectric memory cell includes a first oxide storage layer, a second oxide storage layer, and an amorphous layer disposed between the first and second oxide storage layers. Each of the first and second oxide storage layers includes a ferroelectric material that is at least partially in a ferroelectric state and further includes, as main components, oxygen and any of the group consisting of Hf, Zr and (Hf,Zr).
    Type: Grant
    Filed: June 4, 2013
    Date of Patent: June 9, 2015
    Assignee: NaMLab gGmbH
    Inventors: Stefan Ferdinand Müller, Ekaterina Yurchuk, Uwe Schröder
  • Patent number: 8946617
    Abstract: A photodiode comprises a semiconductor material having a p-n junction, the p-n junction being located between a first doping region of a first doping type and a second doping region of a second doping type, the second doping region comprising a highly doped layer and a lightly doped layer. A photodiode further comprises a voltage source being capable to apply a variable voltage between the first doping region and the lightly doped layer of the second doping region in order to vary the expansion of a space charge zone of the p-n junction.
    Type: Grant
    Filed: November 10, 2011
    Date of Patent: February 3, 2015
    Assignee: NaMLab gGmbH
    Inventors: Juergen Holz, Andre Wachowiak, Stefan Slesazeck
  • Patent number: 8304823
    Abstract: A method for manufacturing an integrated circuit including a ferroelectric memory cell is disclosed. One embodiment of the method includes: forming a amorphous oxide layer over a carrier, the amorphous layer including: O and any of the group of: Hf, Zr and (Hf,Zr), forming a covering layer on the amorphous layer, and heating the amorphous layer up to a temperature above its crystallization temperature to at least partly alter its crystal state from amorphous to crystalline, resulting in a crystallized oxide layer.
    Type: Grant
    Filed: April 21, 2008
    Date of Patent: November 6, 2012
    Assignee: NaMLab gGmbH
    Inventor: Tim Boescke