Patents Assigned to Nano & Device Co., Ltd.
  • Imprinting device and substrate holding device thereof
    Publication number: 20050181293
    Abstract: The present invention relates to an imprinting device for imprinting a pattern, and more particularly, to an imprinting device for imprinting a pattern to a size of nanometer or micrometer dimension.
    Type: Application
    Filed: April 28, 2004
    Publication date: August 18, 2005
    Applicant: Nano & Device Co., Ltd.
    Inventor: Heon Lee