Abstract: A process for producing a trivalent metal ion compound is provided. The process combines a trivalent metal organo-oxide M-(OR1)3 with a dione under reaction conditions to yield a reaction product where R1 in each occurrence independently is a C1-C8 alkyl, C6-C12 cycloalkyl, or C6-C14 aryl; R2 in each occurrence independently is H, C1-C8 alkyl, C6-C12 cycloalkyl, or C6-C14 aryl; M is a trivalent main group or lanthanide metal ion of Al, Ga, In, Tl, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Zr, or Lu, and n is 3 with the proviso that when M is Zr n is 4. The reaction product has impurity levels of the order of tens of parts per million by weight when formed from reagent grade M-(OR1)3. The reaction product is isolated and freeze-dried without need for washing to preclude wash solution contamination.