Patents Assigned to Nanofactory Instruments AB
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Patent number: 8250667Abstract: A method, system, device, and software for automatically determining PI feedback parameters in a scanning probe microscopy application setup using an iterative feedback tuning process.Type: GrantFiled: December 1, 2008Date of Patent: August 21, 2012Assignee: Nanofactory Instruments ABInventors: Krister Svensson, Paul Bengtsson, Simon J. Altenburg
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Publication number: 20120138792Abstract: The present invention relates to an optical arrangement and in particular to an optical arrangement for use in electron microscopy applications. This is used for sample characterization with simultaneous measurement with the electron microscopy of the sample and measurements with an optical setup and/or using a manipulator for probing of a light source or a scanning probe device.Type: ApplicationFiled: April 15, 2010Publication date: June 7, 2012Applicant: NANOFACTORY INSTRUMENTS ABInventors: Andrey Danilov, Håkan Olin, Johan Angenete
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Publication number: 20110016592Abstract: A method, system, device, and software for automatically determining PI feedback parameters in a scanning probe microscopy application setup using an iterative feedback tuning process.Type: ApplicationFiled: December 1, 2008Publication date: January 20, 2011Applicant: NANOFACTORY INSTRUMENTS ABInventors: Krister Svensson, Paul Bengtsson
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Publication number: 20100230608Abstract: The present invention relates to an inertial slider (10) and a method for safely and controllably approach an object (2) towards a fixed object (3) for instance inside a transmission electron microscope (101). The inertial slider is controlled with a control signal (201) with a timing characteristic faster than a mechanical resonance of the object to be moved. The inertial slider moves in a first step away from the fixed object and the movable object is moved relative the inertial slider in that first step.Type: ApplicationFiled: March 2, 2007Publication date: September 16, 2010Applicant: NANOFACTORY INSTRUMENTS ABInventors: Paul Bengtsson, Krister Svensson, Håkan Olin, Mikael Von Dorrien
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Patent number: 7654159Abstract: A force sensor (200) and nanoidenation system (300) using such force sensor (200), wherein the force sensor (200) comprise a movable membrane (207) attached to a fixed bulk structure (210) with springs (201, 202, 203, 204) formed between the membrane (207) and bulk structure (210); the springs (201, 202, 203, 204) may be provided two on each side of a rectangular membrane(207) and each in the form of a U-shape with displacing elements (801) formed perpendicular to each open end of each U-shaped spring (800). The force sensor further comprises electrodes (206) for detecting capacitive changes between the movable membrane (207) and the electrodes (206) in order to measure a movement in relation to an applied force. The membrane (207) further comprises a probe holding structure (214) for providing a solution for interchangeable probes (211).Type: GrantFiled: January 26, 2005Date of Patent: February 2, 2010Assignee: Nanofactory Instruments ABInventors: Peter Enoksson, Alexandra Nafari, Håkan Olin, Fredrik Althoff, Andrey Danilov, Jens Dahlström
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Patent number: 7586105Abstract: The present invention relates to a device and system from doing mechanical and electrical measurements and manipulation on nano or micro sized objects using a sample holder adapted to fit in situ of a transmission electron microscope. The sample holder comprise at least two arms each with at least one connector whereby the sample (206) may be mounted between the two connectors forming a bridge closing a gap between the two arms of the sample holder. The sample holder is arranged to provide mechanical forces to a sample mounted on the sample holder and measuring and/or applying electrical signals from the sample while at the same imaging using the transmission electron microscope. Each arm of the sample holder may comprise three substantially parallel beams for electro-thermal actuation.Type: GrantFiled: April 19, 2007Date of Patent: September 8, 2009Assignee: Nanofactory Instruments ABInventor: Kristian Molhave
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Publication number: 20080276727Abstract: In recent years there has been a growing market for more universal analysis instruments. Analysis tools such as AFM1, TEM2 and nanoindentation work in similar environments. It is therefore possible, within limits, to use the same equipment to do all of these analyses. Conducting nanoindentation experiments in a TEM has also the advantage of increased accuracy compared to the tests done today. 1 Atomic Force Microscopy 2 Transmission Electron Microscope This project is focused on design and fabrication of a capacitive force sensor for AFM and/or nanoindentation measurements in a TEM. Nanofactory Instruments, the initiator of this, project, has developed a specimen holder for TEM that can be used for nanoindentation experiments. The measurement system used today has its limitations of being to large to be mounted in a TEM and thus an improved model was desired.Type: ApplicationFiled: January 26, 2005Publication date: November 13, 2008Applicant: NANOFACTORY INSTRUMENTS ABInventors: Peter Enoksson, Alexandra Nafari, Hakan Olin, Fredrik Althoff, Andrey Danilov, Jens Dahlstrom
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Patent number: 7363802Abstract: This invention relates to a measurement device for use in an electron microscope. The device comprises a sample holder, for holding a sample to be studied, and an indentation tip, being arranged in proximity of the sample holder, whereby an interaction between the sample and the tip is arranged to be measured. The measurement device comprises a force sensor being positioned in proximity with an interaction area of the sample and the tip and is arranged to directly measure a force resulting from interaction between the sample and the tip.Type: GrantFiled: May 12, 2004Date of Patent: April 29, 2008Assignee: Nanofactory Instruments ABInventors: Håkan Olin, Krister Svensson, Fredrik Althoff, Andrey Danilov
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Patent number: 6924489Abstract: This invention relates to a device for reducing the impact of undesired distortions when studying a sample in an electron microscope, wherein said sample is arranged to be mounted on a micro-positioning device, characterised in that said micro-positioning device is connected with a control device, being arranged to control said micro-positioning device so as to compensate for measurement errors due to undesired distortions.Type: GrantFiled: January 13, 2004Date of Patent: August 2, 2005Assignee: Nanofactory Instruments ABInventors: Håkan Olin, Drister Svensson, Fredrik Althoff, Andrey Danilov, Paul Bengtsson, Martin Hospers
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Patent number: 6917140Abstract: This invention relates to a device for micropositioning of an object (4), e.g. for use in a microscope. The device comprises an acceleration unit (1) and an intermediate part (3), connecting said acceleration unit (1) with said object (4). The position of the object relative to the acceleration unit (1) is variable at high acceleration or retardation of said acceleration unit (1), owing to mechanical inertia of the object (4). Further, the intermediate part (3) has a first end (3?), being attached to said acceleration unit (1), and a second end (3?), being provided with an essentially circumferential contact surface (3a), and the object (4) is provided with clamping elements (4?). These clamping elements (4?) are adapted to clamp around said contact surface (3a) of said intermediate part (3) in order to hold the object (4) in relation to the intermediate part (3) merely by the clamping force and the frictional force exerted by said clamping elements (4?) upon said contact surface (3a).Type: GrantFiled: December 3, 2001Date of Patent: July 12, 2005Assignee: Nanofactory Instruments ABInventors: Håkan Olin, Fredik Althoff, Krister Svensson
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Patent number: 6864483Abstract: This invention relates to a method for increasing the measurement information available from a transmission electron microscope, said information relating to a measurement sample, comprising the step of: including, in said transmission electron microscope, an atomic force microscopy device. This invention also relates to a transmission electron microscopy device, characterised in that a transmission electron microscope is combined with an atomic force microscope, positioned within said transmission electron microscope. Finally, the invention relates to a device for insertion in a transmission electron microscope, characterised in that said device comprises an atomic force microscopy device.Type: GrantFiled: February 20, 2001Date of Patent: March 8, 2005Assignee: Nanofactory Instruments ABInventor: Håkan Olin
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Patent number: 6452307Abstract: The invention relates to a device for micropositioning of objects, for example, in microscopy. The device comprises an accelerating means and a positioning unit connected therewith and connected with the object. The position of the object relative to the positioning unit can be changed at high acceleration or retardation of the accelerating means owing to mechanical inertia of the object. The positioning unit comprises at least two clamping elements between which the object is intended to be held merely by the clamping force and the frictional force exerted by these clamping elements.Type: GrantFiled: January 11, 2002Date of Patent: September 17, 2002Assignee: Nanofactory Instruments ABInventors: Hakan Olin, Kristian Gustavsson, Per Gralvik