Abstract: The invention relates to a method and a device for the optical measurement of technical surfaces by means of a chromatic confocal sensor, wherein light from a light source (2) is directed to the surface (5) of a sample to be measured via an optical system (4, 14) with defined chromatic aberration. According to the invention, the light source (2) can be tuned in relation to the wavelength to be emitted. The light reflected back from the sample surface (5) is directed to at least one photosensor (7), wherein the sensor signal is measured over time by means of a detection system (8) and the time of a signal maximum is determined. The detection system (8) derives the height Z of the surface (5) from the wavelength of the light source (2) at the time of the signal maximum.

Abstract: The invention relates to a method for electronically analyzing a time-variant signal (Ue(t)) having at least one extreme value, the amplitude and time of which are to be detected, by means of a detection circuit that operates as a peak value store and follows the time-variant signal after a threshold value (Us) is exceeded until the maximum amplitude is reached, wherein exceedance of the extreme value results in a peak indicator signal (Usi(t)) being generated and the maximum amplitude being stored, which is characterized in that to capture more than one extreme value in the time-variant signal, the tracking of the signal (Ue(t)) is deactivated after production of the first peak indicator signal and after a drop below the threshold value and, after the signal exceeds the threshold value again as time progresses, further tracking of the signal (Ue(t)) is activated until the next extreme value to be detected is reached and a further peak indicator signal (Usi(t)) is generated and this further maximum amplitude

Abstract: The invention relates to a method and a device for the optical measurement of technical surfaces by means of a chromatic confocal sensor, wherein light from a light source (2) is directed to the surface (5) of a sample to be measured via an optical system (4, 14) with defined chromatic aberration. According to the invention, the light source (2) can be tuned in relation to the wavelength to be emitted. The light reflected back from the sample surface (5) is directed to at least one photosensor (7), wherein the sensor signal is measured over time by means of a detection system (8) and the time of a signal maximum is determined. The detection system (8) derives the height Z of the surface (5) from the wavelength of the light source (2) at the time of the signal maximum.

Abstract: A device for high-intensity uniform illumination with minimal light reflection for use in reflective-type microscopes has a light source with a uniform emission and the following components, arranged in succession in the emission direction: a lens combination with a short focal length, the focal length of the lens combination being adjusted in such a way that the light source is projected to infinity; a rectangular diaphragm aperture, which is located on the rear focal plane of the lens combination, the Fourier plane of the lens combination being situated on the plane; an additional lens with a focal length, through which the rectangular diaphragm aperture is projected onto the intermediate image plane of the microscope; and a circular diaphragm, onto which the light source is projected in sharp focus and which is located on the rear focal plane of the additional lens.

Abstract: The invention relates to a pinhole disk, which can be used in a transmitted light mode as a filter disk, in particular in confocal microscopes, and consists of an optically transparent material with an inner hole having a fixed outer radius rmax and inner radius rmin. The optically transparent material is covered with a non-transparent layer, at least over a large area, the area being provided with a pattern of transparent pinholes. The pinholes are arranged according to a rule, in such a way that a quasi-uniform point density is obtained on the disk.

Abstract: The invention relates to a pinhole disk, which can be used in a transmitted light mode as a filter disk, in particular in confocal microscopes, and consists of an optically transparent material with an inner hole having a fixed outer radius rmax and inner radius rmin. The optically transparent material is covered with a non-transparent layer, at least over a large area, the area being provided with a pattern of transparent pinholes. The pinholes are arranged according to a rule, in such a way that a quasi-uniform point density is obtained on the disk.

Abstract: A method for producing height images of technical surfaces with microscopic resolution uses a confocal measuring microspace. The sample to be measured is displaced in the direction (Z direction) towards the microspace in a controlled manner and images are produced at defined distances with a digital camera. The digitized images recorded are transmitted to a controller (PC) for further processing and evaluation and the light intensity maximum for every pixel is detected, the position of the maximum indicating the height of the sample to be measured. The sample is displaced in a continuous manner and that the image exposures are triggered at discrete localized distances. The intensities of the N individual images recorded and digitized in the above manner are stored in the PC in such a manner that a number N of subsequent storage locations is occupied for every pixel.

Abstract: The start of the displacement movement is initiated by a software instruction when measuring surface topologies with microscopic resolution. Trigger pulses which serve to trigger the recording of measured values on the sensor are generated in discrete local intervals by a position transmitter. The measured values obtained are stored and then asynchronously transmitted to the controller.