Abstract: A counterbalanced actuator for steering a beam of light is disclosed. The actuator includes a rotatable actuator member coupled to a substrate, a movable portion of an actuator drive mechanism coupled to the rotatable actuator member, a balancing spring coupled between the substrate and the movable portion of the actuator drive mechanism, and an actuator arm operably coupled to the movable portion of the actuator drive mechanism. The balancing spring maintains the movable portion of the actuator drive mechanism nominally, parallel to the substrate when the actuator arm is rotated. An optical mirror element is coupled to the actuator arm. The actuator also includes apparatus for applying a first drive voltage to the movable portion of the actuator drive mechanism and a second drive voltage to a fixed portion of the actuator drive mechanism to position the mirror.

Abstract: An optical mirror system with multi-axis rotational control is disclosed. The mirror system includes an optical surface assembly, and at least one leg assembly coupled to the optical surface assembly. The at least one leg assembly supports the optical surface above a substrate. A system and method in accordance with the present invention can operate with many different actuator mechanisms, including but not limited to, electrostatic, thermal, piezoelectric, and magnetic. An optical mirror system in accordance with the present invention accommodates large mirrors and rotation angles. Scanning mirrors can be made with this technique using standard surface-micromachining processes, or a deep RIE etch process. A device in accordance with the present invention meets the requirements for a directly scalable, high port count optical switch, utilizing a two mirror per optical I/O port configuration.

Abstract: The present invention provides an improved fiber optic cross connect (OXC) package which reduces the size of the device. The OXC includes a chip, the chip including a plurality of input micromirrors and a plurality of output micromirrors; and a reflector optically coupled to the plurality of input micromirrors and the plurality of output micromirrors. The OXC package in accordance with the present invention folds the light beam during scanning. In the preferred embodiment, the OXC package comprises input and output micromirrors on a single chip. A reflector is placed above both the input and output micromirrors for folding the light beam as it travels between an input micromirror and an output micromirror. In the preferred embodiment, the distance from the input/output micromirror to the reflector is approximately one-half of the Rayleigh Length of the light beam.