Abstract: A broadband weak-motion inertial sensor includes a frame, a movable inertial mass, a forcing transducer for keeping the inertial mass stationary relative to the frame during operation, and a flexure for suspending the movable mass in the frame. Two or more closely spaced, substantially parallel capacitor plates, at least one attached to the frame, and one attached to the movable inertial mass, form a capacitive displacement transducer. The capacitor plates have a plurality of apertures with dimensions and arrangement chosen to simultaneously minimize damping induced thermal noise and give a high spatial efficiency. In an implementation, three capacitor plates are provided. The capacitor plates each have a same hexagonal pattern of circular holes; the holes are aligned on all included capacitor plates. Radius and spacing of the holes are dictated by a relationship that determines the minimum damping per unit capacitively effective area for a desired spatial efficiency, gap height and capacitor plate thickness.

Abstract: A broadband weak-motion seismometer includes: a frame, a mass, a suspension means for movably connecting the mass to the frame, a sensing transducer for measuring displacement of the mass with respect to the frame and for generating a sensing transducer output signal, which is a function of the measured displacement, a forcing transducer for applying a feedback force in a predetermined direction to the mass, and a control circuit. The control circuit receives the sensing transducer output signal and generates a forcing transducer input signal that includes a self-noise component. The forcing transducer input signal is processed by the forcing transducer to apply the feedback force to maintain the mass at rest with respect to the frame. The feedback force is sufficient to counterbalance a constant acceleration of the frame of at least 0.2 m/s2 in the predetermined direction of the feedback force.

Abstract: A seismic sensor includes a frame, a pendulum pivotably mounted to the frame, a mechanism for sensing angular position of the pendulum, and a monolithic flat spring oriented between the frame and the pendulum for balancing the pendulum at an equilibrium position. The monolithic flat spring includes: (i) an operating region for providing a restoring force to the pendulum proportional to an angular displacement of the pendulum; and (ii) a suspension region for transmitting a force to a portion of the operating region and applying a negligible bending moment to the portion of the operating region.

Abstract: A broadband weak-motion inertial sensor includes a frame, a movable inertial mass, a forcing transducer for keeping the inertial mass stationary relative to the frame during operation, and a flexure for suspending the movable mass in the frame. Two or more closely spaced, substantially parallel capacitor plates, at least one attached to the frame, and one attached to the movable inertial mass, form a capacitive displacement transducer. The capacitor plates have a plurality of apertures with dimensions and arrangement chosen to simultaneously minimize damping induced thermal noise and give a high spatial efficiency. In an implementation, three capacitor plates are provided. The capacitor plates each have a same hexagonal pattern of circular holes; the holes are aligned on all included capacitor plates. Radius and spacing of the holes are dictated by a relationship that determines the minimum damping per unit capacitively effective area for a desired spatial efficiency, gap height and capacitor plate thickness.

Abstract: A broadband weak-motion seismometer includes: a frame, a mass, a suspension means for movably connecting the mass to the frame, a sensing transducer for measuring displacement of the mass with respect to the frame and for generating a sensing transducer output signal, which is a function of the measured displacement, a forcing transducer for applying a feedback force in a predetermined direction to the mass, and a control circuit. The control circuit receives the sensing transducer output signal and generates a forcing transducer input signal that includes a self-noise component. The forcing transducer input signal is processed by the forcing transducer to apply the feedback force to maintain the mass at rest with respect to the frame. The feedback force is sufficient to counterbalance a constant acceleration of the frame of at least 0.2 m/s2 in the predetermined direction of the feedback force.

Abstract: A long-period weak-motion inertial sensor includes a frame having a frame mounting surface, a movable mass having a movable mass mounting surface, a transducer for sensing displacements of the movable mass with respect to the frame, and a monolithic flexure element for suspending the movable mass in the frame. The monolithic flexure element includes: a stiff frame integral clamp attachable to the frame mounting surface of the frame, a stiff movable mass integral clamp attachable to the movable mass mounting surface of the movable mass, and a stiffest flexible region for operatively connecting the frame integral clamp to the movable mass integral clamp. The frame and movable mass mounting surfaces do not overlap the stiffest flexible region, thereby minimizing the generation of creep and hysteresis noise. The variation in stiffness of the monolithic flexure element is controlled by varying thickness along the length of the flexure element.

Abstract: A long-period weak-motion inertial sensor includes a frame having a frame mounting surface, a movable mass having a movable mass mounting surface, a transducer for sensing displacements of the movable mass with respect to the frame, and a monolithic flexure element for suspending the movable mass in the frame. The monolithic flexure element includes: a stiff frame integral clamp attachable to the frame mounting surface of the frame, a stiff movable mass integral clamp attachable to the movable mass mounting surface of the movable mass, and a stiffest flexible region for operatively connecting the frame integral clamp to the movable mass integral clamp. The frame and movable mass mounting surfaces do not overlap the stiffest flexible region, thereby minimizing the generation of creep and hysteresis noise. The variation in stiffness of the monolithic flexure element is controlled by varying thickness along the length of the flexure element.

Abstract: A mass positioning apparatus for use with seismic sensors is described. The seismic sensor includes axis mechanics including a pivotable boom with a defined null point. The mass positioning apparatus comprising: adjustment means for positioning the boom at the null point; actuator means for moving the adjustment means; and means for determining a position of the adjustment means relative to an operational range of travel.

Abstract: A seismic sensor includes a frame, a pendulum pivotably mounted to the frame, a mechanism for sensing angular position of the pendulum, and a monolithic flat spring oriented between the frame and the pendulum for balancing the pendulum at an equilibrium position. The monolithic flat spring includes: (i) an operating region for providing a restoring force to the pendulum proportional to an angular displacement of the pendulum; and (ii) a suspension region for transmitting a force to a portion of the operating region and applying a negligible bending moment to the portion of the operating region.

Abstract: A mass position adjustment apparatus for use in a seismic sensor having axis mechanics including a pivotable boom with a defined null point is described. The apparatus comprising: (a) adjustment means for positioning the boom at the null point; (b) actuator means for moving the adjustment assembly; and (c) interface means having hard mineral members for interfacing the actuator means with the adjustment means for reducing occurrences of micro-mechanical movement when the mass position adjustment apparatus is not being operated.

Abstract: A seismometer comprising a pressure sealed enclosure; an electrical component; an axis mechanics assembly having moving components, the axis mechanics assembly being in electrical communication with the electrical component; and a thermally insulating assembly mechanically supporting and surrounding the axis mechanics assembly for minimizing heat flow from the pressure sealed enclosure to the axis mechanics assembly and for enabling transmission of a seismic signal to the axis mechanics assembly, wherein the pressure sealed enclosure encloses the axis mechanics assembly, the thermally insulating assembly, and the electrical component.

Abstract: The invention relates to a method for determining a characteristic of a semiconductor sample forming a surface. The method comprises the steps: simultaneously illuminating an area on the surface of a semiconductor sample with superimposed exciting light beams with a plurality of wavelengths, modulating the light beam of the different wavelengths with the same frequency, but different phases, selecting a modulation function and its phases in such a way, that the sum of the photon fluxes of all light beams at all times lies within a tolerance range, the tolerance range being considerably smaller than the sum of all photon fluxes, simultaneously phase-dependent measuring of the components of the surface photo voltage caused by the different light beams and determining the characteristic of the semiconductor sample from the relationships between the components and the respective wavelengths. Furthermore a device for carrying out such a method is described.

Abstract: Heat sensitive sensors, such as charge coupled devices which must be cooled to reduce dark current leakage, are packaged in a chip carrier and in contact with the cold surface of an electrothermal cooler the warm opposite surface of which contacts the floor of the carrier to heat the carrier body and the window of the chip carrier to prevent fogging of the cover glass while the sensor remains cold.

Abstract: A computerized stage assembly for a Scanning Electron Microscope including a support frame, a tilt frame pivotally coupled to the support frame, an X carriage engaged with the tilt frame for movement in an X direction, a Y carriage engaged with the X carriage for movement in a Y direction, and a pedestal carried by the Y carriage and capable of rotation around an axis substantially normal to both the X and Y directions. The tilt frame, X and Y carriages, and pedestal are moved by computer controlled step motors. The tilting and rotating of a specimen secured to the pedestal is non-eucentric, i.e. the axis of rotation or tilt is not necessarily through the point of inspection on the specimen. A method is disclosed for automatically returning an inspection point to the viewing field of the microscope after a non-eucentric rotation or tilt.