Abstract: A device for the transport of fluids through a biological barrier includes a number of microneedles projecting from the front face of a substrate. A conduit is associated with each of the microneedles to provide a fluid flow path for transport of fluid through a hole in the biological barrier formed by the corresponding microneedle. Each of the microneedles is configured to provide a penetrating tip, and each conduit terminates at an opening which is proximal with respect to the microneedle tip. Also described are microneedle-based devices with integrated MEMS pumping configurations for withdrawal and/or delivery of fluids, and remote healthcare systems based on such devices.

Abstract: A method for processing a wafer to form a plurality of hollow microneedles projecting from a substrate includes forming, by use of a dry etching process, a number of groups of recessed features, each including at least one slot deployed to form an open shape having an included area and at least one hole located within the included area. The internal surfaces of the holes and the slots are then coated with a protective layer. An anisotropic wet etching process is then performed in such a manner as to remove material from outside the included areas while leaving a projecting feature within each of the included areas. The protective layer is then removed to reveal the microneedles.