Abstract: An optical microscope applies laser light to a sample through the an objective lens, detects reflected light reflected by the sample through the objective lens, changes a focal position of the laser light in an optical axis direction, extracts a focal position for spectrum measurement based on a detection result of the reflected light when the focal position of the laser light is changed, adjusts the focal position to coincide with the extracted focal position, separates outgoing light exiting from the sample by application of the laser light with the adjusted focal position from the laser light, and measures a spectrum of the outgoing light separated from the laser light with a spectroscope.

Abstract: An optical microscope applies laser light to a sample through the an objective lens, detects reflected light reflected by the sample through the objective lens, changes a focal position of the laser light in an optical axis direction, extracts a focal position for spectrum measurement based on a detection result of the reflected light when the focal position of the laser light is changed, adjusts the focal position to coincide with the extracted focal position, separates outgoing light exiting from the sample by application of the laser light with the adjusted focal position from the laser light, and measures a spectrum of the outgoing light separated from the laser light with a spectroscope.

Abstract: An optical microscope according to a first embodiment of the present invention includes: a laser light source; a Y-directional scanning unit moving the light beam in a Y direction; an objective lens; a X-directional scanning unit moving the light beam in a X direction; a beam splitter provided in an optical path from the Y-directional scanning unit to the sample, and separating outgoing light out of the light beam incident on the sample, which exits from the sample toward the objective lens from the light beam incident on the sample from the laser light source; a spectroscope having an entrance slit extending along the Y direction and spatially dispersing the outgoing light passed through the entrance slit in accordance with a wavelength of the light; and a detector detecting the outgoing light dispersed by the spectroscope.

Abstract: A laser microscope according to an embodiment of the invention includes: a laser beam source; a phase plate providing a phase difference for laser beam from the laser beam source in accordance with an incident position; an objective lens focusing light transmitted through the phase plate onto a sample; a first separating unit separating second harmonic light emitted from the sample in a direction opposite to a traveling direction of the laser beams from a fundamental light reflected by the sample; and a photodetector detecting the second harmonic light separated from the fundamental light by the first separating unit.