Patents Assigned to nanotools GmbH
  • Patent number: 8739310
    Abstract: A structure for the characterization of a tip of an atomic force microscope, the structure being produced on a substrate and including a first support element located above the substrate; a first characterization element with a constant thickness, the first characterization element being located above the first support element and having an upper flat surface and a lower flat surface covering the upper surface of the first support element with two zones extending beyond the upper surface of the first support element, each zone having a characterization surface at one end which is capable of coming into contact with a tip to be characterized, the upper surface and the lower surface of said first characterization element being parallel to the upper surface of the substrate.
    Type: Grant
    Filed: April 24, 2013
    Date of Patent: May 27, 2014
    Assignees: Commissariat a l'energie atomique et aux energies alternatives, Nanotools GmbH
    Inventors: Johann Foucher, Bernd Irmer
  • Publication number: 20120131785
    Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
    Type: Application
    Filed: February 9, 2012
    Publication date: May 31, 2012
    Applicants: NANOTOOLS GMBH, CARL ZEISS NTS GMBH
    Inventors: Volker Drexel, Ulrich Mantz, Bernd Irmer, Christian Penzkofer
  • Patent number: 8164071
    Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
    Type: Grant
    Filed: September 30, 2009
    Date of Patent: April 24, 2012
    Assignees: Carl Zeiss NTS GmbH, nanotools GmbH
    Inventors: Volker Drexel, Ulrich Mantz, Bernd Irmer, Christian Penzkofer
  • Publication number: 20100078557
    Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
    Type: Application
    Filed: September 30, 2009
    Publication date: April 1, 2010
    Applicants: CARL ZEISS NTS GMBH, NANOTOOLS GMBH
    Inventors: Volker Drexel, Ulrich Mantz, Bernd Irmer, Christian Penzkofer