Abstract: A structure for the characterization of a tip of an atomic force microscope, the structure being produced on a substrate and including a first support element located above the substrate; a first characterization element with a constant thickness, the first characterization element being located above the first support element and having an upper flat surface and a lower flat surface covering the upper surface of the first support element with two zones extending beyond the upper surface of the first support element, each zone having a characterization surface at one end which is capable of coming into contact with a tip to be characterized, the upper surface and the lower surface of said first characterization element being parallel to the upper surface of the substrate.
Type:
Grant
Filed:
April 24, 2013
Date of Patent:
May 27, 2014
Assignees:
Commissariat a l'energie atomique et aux energies alternatives, Nanotools GmbH
Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
Type:
Application
Filed:
February 9, 2012
Publication date:
May 31, 2012
Applicants:
NANOTOOLS GMBH, CARL ZEISS NTS GMBH
Inventors:
Volker Drexel, Ulrich Mantz, Bernd Irmer, Christian Penzkofer
Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
Type:
Grant
Filed:
September 30, 2009
Date of Patent:
April 24, 2012
Assignees:
Carl Zeiss NTS GmbH, nanotools GmbH
Inventors:
Volker Drexel, Ulrich Mantz, Bernd Irmer, Christian Penzkofer
Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
Type:
Application
Filed:
September 30, 2009
Publication date:
April 1, 2010
Applicants:
CARL ZEISS NTS GMBH, NANOTOOLS GMBH
Inventors:
Volker Drexel, Ulrich Mantz, Bernd Irmer, Christian Penzkofer