Patents Assigned to Nanusens SL
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Publication number: 20260200722Abstract: A method for a modified CMOS or solid-state process including using a double mask in the passivation process to form a passivation opening. The process includes applying a first mask to form a passivation layer and applying as second mask to form a SiO2 layer positioned underneath the passivation layer.Type: ApplicationFiled: February 23, 2026Publication date: July 16, 2026Applicant: Nanusens SLInventor: Josep Montanyà i Silvestre
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Patent number: 12512172Abstract: An example one-time programmable (OTP) memory device is provided. The OTP memory device include a passivation layer. A top metal layer is positioned below the passivation layer. The top metal layer includes one or more holes configured to an etching medium to pass through the holes. An array of memory elements is positioned in a memory layer below the top metal layer. A first metal address line layer is positioned below the array of memory elements and includes a plurality of first address lines extending in a first direction. A first end of each memory element being connected to one of the plurality of first metal address lines. A second metal address line layer is positioned below the first metal address line layer and includes a plurality of second metal address lines extending in a second direction. The second direction is different than the first direction.Type: GrantFiled: June 20, 2023Date of Patent: December 30, 2025Assignee: Nanusens SLInventor: Josep Montanyà i Silvestre
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Publication number: 20250289712Abstract: An electrostatically-protected integrated circuit (IC) includes a pad configured to provide an electrical connection to outside of the IC. The IC also includes an electrostatic discharge (ESD) device that is electrically connected to the pad and includes a first gap configured to discharge an excessive voltage. A microelectromechanical (MEMS) device is further included that includes a second gap between at least two elements of the MEMS device such that a size of the first gap is less than a size of the second gap.Type: ApplicationFiled: March 12, 2025Publication date: September 18, 2025Applicant: Nanusens SLInventor: Josep MONTANYÀ I SILVESTRE
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Publication number: 20250236506Abstract: A MEMS device formed using the materials of the BEOL of a CMOS process where a post-processing and post backing was applied to form the MEMS device and where a plurality of passivation openings a vertically aligned above a pad.Type: ApplicationFiled: January 27, 2025Publication date: July 24, 2025Applicant: Nanusens SLInventor: Josep Montanyà i Silvestre
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Patent number: 12209009Abstract: A MEMS device formed using the materials of the BEOL of a CMOS process where a post-processing of vHF and post backing was applied to form the MEMS device and where a total size of the MEMS device is between 50 um and 150 um. The MEMS device may be implemented as an inertial sensor among other applications.Type: GrantFiled: September 5, 2023Date of Patent: January 28, 2025Assignee: Nanusens SLInventor: Josep Montanyà Silvestre
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Publication number: 20230420063Abstract: An example one-time programmable (OTP) memory device is provided. The OTP memory device include a passivation layer. A top metal layer is positioned below the passivation layer. The top metal layer includes one or more holes configured to an etching medium to pass through the holes. An array of memory elements is positioned in a memory layer below the top metal layer. A first metal address line layer is positioned below the array of memory elements and includes a plurality of first address lines extending in a first direction. A first end of each memory element being connected to one of the plurality of first metal address lines. A second metal address line layer is positioned below the first metal address line layer and includes a plurality of second metal address lines extending in a second direction. The second direction is different than the first direction.Type: ApplicationFiled: June 20, 2023Publication date: December 28, 2023Applicant: Nanusens SLInventor: Josep Montanyà Silvestre
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Publication number: 20230406693Abstract: A MEMS device formed using the materials of the BEOL of a CMOS process where a post-processing of vHF and post backing was applied to form the MEMS device and where a total size of the MEMS device is between 50 um and 150 um. The MEMS device may be implemented as an inertial sensor among other applications.Type: ApplicationFiled: September 5, 2023Publication date: December 21, 2023Applicant: Nanusens SLInventor: Josep Montanyà Silvestre
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Patent number: 11780725Abstract: A MEMS device formed using the materials of the BEOL of a CMOS process where a post-processing of vHF and post backing was applied to form the MEMS device and where a total size of the MEMS device is between 50 um and 150 um. The MEMS device may be implemented as an inertial sensor among other applications.Type: GrantFiled: January 8, 2021Date of Patent: October 10, 2023Assignee: Nanusens SLInventor: Josep Montanyà Silvestre
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Publication number: 20230200451Abstract: Electrical cigarettes and methods for performing the operations thereof are provided. An exemplary method includes: receiving, from a pressure sensor, pressure sensor data; computing , using the pressure sensor data and average pressure sensor data, differential pressure data; determining whether the differential pressure sensor data meet a first criteria involving a first set of thresholds; upon determining the differential pressure data does meet the first criteria, determining whether the differential pressure sensor data meet a second criteria involving a second set of thresholds; upon determining the pressure data does meet the second criteria, issuing a trigger signal indicating enough differential pressure is present for smoking.Type: ApplicationFiled: October 18, 2022Publication date: June 29, 2023Applicant: Nanusens SLInventors: Josep Montanyà Silvestre, Sean Linning
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Publication number: 20230050748Abstract: A MEMS pressure sensor is provided having a membrane made with one of plurality of metal layers. A lid is positioned above the membrane and connected to a plurality of cavity walls at distal ends of the membrane. The lid includes an array of holes positioned on a region of the lid. A fixed metal electrode is positioned below the lid.Type: ApplicationFiled: August 8, 2022Publication date: February 16, 2023Applicant: Nanusens SLInventor: Josep Montanyà Silvestre
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Patent number: 11312617Abstract: A MEMS device formed using the materials of the BEOL of a CMOS process where a post-processing of vHF and post backing was applied to form the MEMS device and where a total size of the MEMS device is between 50 um and 150 um. The MEMS device may be implemented as an inertial sensor among other applications.Type: GrantFiled: January 8, 2021Date of Patent: April 26, 2022Assignee: Nanusens SLInventor: Josep Montanyà Silvestre
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Patent number: 11267692Abstract: A MEMS device formed using the materials of the BEOL of a CMOS process where a post-processing of vHF and post backing was applied to form the MEMS device and where a total size of the MEMS device is between 50 um and 150 um. The MEMS device may be implemented as an inertial sensor among other applications.Type: GrantFiled: January 8, 2021Date of Patent: March 8, 2022Assignee: Nanusens SLInventor: Josep Montanyà Silvestre
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Publication number: 20210221674Abstract: A MEMS device formed using the materials of the BEOL of a CMOS process where a post-processing of vHF and post backing was applied to form the MEMS device and where a total size of the MEMS device is between 50 um and 150 um. The MEMS device may be implemented as an inertial sensor among other applications.Type: ApplicationFiled: January 8, 2021Publication date: July 22, 2021Applicant: Nanusens SLInventor: Josep Montanyà Silvestre
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Publication number: 20210206624Abstract: A MEMS device formed using the materials of the BEOL of a CMOS process where a post-processing of vHF and post backing was applied to form the MEMS device and where a total size of the MEMS device is between 50 um and 150 um. The MEMS device may be implemented as an inertial sensor among other applications.Type: ApplicationFiled: January 8, 2021Publication date: July 8, 2021Applicant: Nanusens SLInventor: Josep Montanyà Silvestre