Abstract: A plasma processing apparatus includes a stage, processing vessel, and microwave supply device. A target object is placed on the stage. The processing vessel accommodates the stage. The microwave supply device supplies microwaves into the processing vessel, and includes a parallel-plate waveguide, a plurality of slots, a square waveguide array, and a distributor. The parallel-plate waveguide includes a first conductive plate which is rectangular when seen from the top and arranged to oppose the stage, and a second conductive plate which is arranged substantially parallel to the first conductive plate and has the same shape as that of the first conductive plate when seen from the top. The plurality of slots are formed in the first conductive plate. The square waveguide array includes a plurality of square waveguides aligned in their widthwise directions (X) perpendicular to there axial directions (Y). One end of each of the square waveguides is connected to the parallel-plate waveguide.

Abstract: A plasma processing apparatus comprises a processing container, a waveguide tube for guiding microwaves generated by a microwave generator, and a flat antenna member connected to the wave guide and disposed in the container to face a semiconductor wafer supported in the container. The antenna includes a plurality of short slits concentrically or spirally arranged in the antenna. The slits are spaced apart in the widthwise direction at intervals of 5% to 50% of a guide wavelength of the microwave, and each of the slits has a length of +30% of the guide wavelength centered with respect to half of the guide wavelength.

Abstract: A slotted leaky waveguide array antenna of a one-axis tracking type wherein a feed section including a feed probe is kept in a stationary state to thereby keep a converter in a stationary state and a desired beam width is set in a tilt direction, includes a plurality of radiation waveguides arranged adjacent and parallel to each other, each of which has a plurality of slots arranged in a waveguide axial direction, and a feed waveguide for distributing to the respective radiation waveguides electromagnetic waves received through a feed section from a converter, and the antenna rotates in a substantially horizontal plane to track an azimuth direction, wherein the feed waveguide has a first section extended along one ends of the radiation waveguides and a second section extended from the feed section provided in the rotary center of the slotted leaky waveguide array antenna to the center of the first section, and wherein the radiation waveguides are formed with crossed slots having an identical offset, and the n

Abstract: A conductive layer is formed on one surface of an insulating substrate. Notches are formed in the conductive layer to be axially symmetric at equal angular intervals of 120.degree.. A feeding line of a notch antenna is formed on the other surface of the substrate. The feeding line has a C-shape and wide portions for adjusting the phases of excitation of the notches, and receives power at its one point. A ground plate is arranged to be parallel to the substrate. A feeding rod is connected to the conductive layer. The conductive layer and the ground plate are short-circuited by impedance matching pins. The matching pins are integrally formed with the ground plate. The notches and the feeding line constitute an notch antenna, and the feeding rod, the ground plate, the conductive layer, and the matching pins constitute a capacity loaded monopole antenna. To resonate these antennae at a plurality of resonant points, slits are formed in the conductive layer to be axially symmetric at equal angular intervals of 120.

Abstract: In a portable radio communication apparatus comprising a handset (20) having a side surface (23) and a recessed surface (24), first and second antennae (51 and 52) of different resonance frequencies are fixed to the recessed surface by first and second conductive plates (55 and 56), respectively. First and second conductive lines (61 and 62) connect a common conductive line (63) to the first and the second antennae, respectively. The common conductive line is connected to an electro-audio and audio-electro converting device (30) to feed a transmitting electric signal to the first and the second antennae and to receive the received electric signal from the first and second antennae. The first and the second antennae have first and second antenna widths (W.sub.1 and W.sub.2), respectively. The first and the second conductive plates have first and second plate widths, respectively, and first and second axes centrally of the first and the second plate widths, respectively.