Patents Assigned to National Applied Research Labratories
  • Electrical scanning probe microscope apparatus
    Patent number: 6975129
    Abstract: An electrical scanning probe microscope (SPM) apparatus. The SPM apparatus is equipped with an atomic force microscope with long-wavelength laser source to acquire topographic images and an electrical scanning sensor operatively coupled to the atomic force microscope to acquire synchronous two-dimensional electrical images. The photoperturbation effects induced by stray light and perturbation of the contrast of SCM images can be ameliorated.
    Type: Grant
    Filed: June 7, 2004
    Date of Patent: December 13, 2005
    Assignee: National Applied Research Labratories
    Inventor: Mao-Nan Chang