Abstract: A plurality of micro three-dimensional structure elements each having a movable structure fixed on a sacrifice layer, and fixation portions of the micro three-dimensional structure elements for the sacrifice layer are arranged into a film-like elastic body, and then the sacrifice layer is removed. Thus, a three-dimensional structure in which the individual micro three-dimensional structure elements are arranged independently of one another within the elastic body is manufactured.
Type:
Grant
Filed:
January 18, 2007
Date of Patent:
November 2, 2010
Assignees:
Panasonic Corporation, National University Corporation, The University of Tokyo