Abstract: A device for holding and rotating a plate shaped article comprises a group of fixed pins and a group of pivot pins arranged along the circumference of the movable base in a manner that each pivot pin opposites a fixed pin, and also comprises magnetic bodies positioned within and outside two opposing sides of the pivot pins. Each of the pivot pins can be driven to rotate around its pivot back and forth under the magnetic repulsive force between two adjacent magnetic bodies, so as to release or clamp the plate shaped article. The present invention has advantages of simple structure, convenient and reliable action control, controllable clamping force and good compatibility with various processing chambers.

Abstract: A device for holding and rotating a plate shaped article comprises a group of fixed pins and a group of pivot pins arranged along the circumference of the movable base in a manner that each pivot pin opposites a fixed pin, and also comprises magnetic bodies positioned within and outside two opposing sides of the pivot pins. Each of the pivot pins can be driven to rotate around its pivot back and forth under the magnetic repulsive force between two adjacent magnetic bodies, so as to release or clamp the plate shaped article. The present invention has advantages of simple structure, convenient and reliable action control, controllable clamping force and good compatibility with various processing chambers.

Abstract: The invention discloses a positioning device for a horizontal external ignition apparatus. The positioning device comprises a rotating module, an expansion module, a lifting module, and a mounting member fixed at the bottom of a water cooling device of the ignition apparatus. The rotating module drives the mounting member and the external ignition chamber of the ignition apparatus to rotate around the spindle member of the rotating module and adjust the rotation angle. The expansion module adjust the lateral movement of the mounting member and the external ignition chamber along the expansion member of the expansion module. The lifting module adjust the longitudinal movement of the mounting member and the external ignition chamber.