Abstract: Accelerometer and method in which parts such as the seismic mass and force sensors are all fabricated of a single material such as crystalline quartz and bonded together in a manner which reduces the possibility of creep between them. Damping plates and squeeze film gas damping dampen movement of the seismic mass, and the parts are oriented in a predetermined manner relative to the crystallographic axes of the wafers from which they are fabricated to control the character of breakaway tabs which hold the parts to the wafers during fabrication.

Abstract: Single ended tuning fork inertial sensor having a housing and a single ended tuning fork of a quartz-like material of a predetermined thickness, the tuning fork has first and second tines lying in a plane and having an axis of symmetry and has a body formed integral with said first and second tines. The body is rigidly secured to the housing. The tines have a rectangular cross section and have a width which is different from the thickness. The body has a stem formed therein which has a width less than that of the body. Drive electrodes are secured to the tines. An oscillatory frequency is supplied to the above drive electrodes to excite the tines in a drive mode and in the presence of an axial angular rate to cause the tines to operate in a pickup mode which is substantially separated in frequency from the drive mode. The electrode patterns are laser trimmed in order to reduce quadrature offset.

Abstract: A rotation rate sensor which employs a built-in (i.e. internal) test circuit. The rotation rate sensor includes a piezoelectric structure. Deposited on the piezoelectric structure are at least two pickup high and two pickup low electrodes. A pickup circuit is coupled to the pickup high and pickup low electrodes. During a normal mode of operation, the piezoelectric structure is subject to a rotation about one of its axis. In response, the pickup circuit generates a rate signal which corresponds to the rotation rate of the piezoelectric structure. The test circuit is coupled to the pickup low electrodes. During a test mode of operation, the piezoelectric structure is also subject to a rotation about the axis. But, the test circuit generates at the same time a test signal which is provided to the pickup low electrodes and which corresponds to a pseudo rate of rotation.

Abstract: Single ended tuning fork inertial sensor having a housing and a single ended tuning fork of a quartz-like material of a predetermined thickness, the tuning fork has first and second tines lying in a plane and having an axis of symmetry and has a body formed integral with said first and second tines. The body is rigidly secured to the housing. The tines have a rectangular cross section and have a width which is different from the thickness. The body has a stem formed therein which has a width less than that of the body. Drive electrodes are secured to the tines. An oscillatory frequency is supplied to the above drive electrodes to excite the tines in a drive mode and in the presence of an axial angular rate to cause the tines to operate in a pickup mode which is substantially separated in frequency from the drive mode.

Abstract: Single ended tuning fork inertial sensor having a housing and a single ended tuning fork of a quartz-like material of a predetermined thickness, the tuning fork has first and second tines lying in a plane and having an axis of symmetry and has a body formed integral with said first and second tines. The body is rigidly secured to the housing. The tines have a rectangular cross section and have a width which is different from the thickness. The body has a stem formed therein which has a width less than that of the body. Drive electrodes are secured to the tines. An oscillatory frequency is supplied to the above drive electrodes to excite the tines in a drive mode and in the presence of an axial angular rate to cause the tines to operate in a pickup mode which is substantially separated in frequency from the drive mode.

Abstract: Accelerometer having a frame, a proofmass, one or more force sensitive transducers, and a strut interconnecting the transducers with the proofmass and the frame so that forces are applied to the transducers in accordance with movement of the proofmass along the sensitive axis. The transducers and the strut have similar thermal expansion properties and are arranged in such manner that they can expand together with changes in temperature independently of the frame and the proofmass without imposing any significant strain on the transducers. In certain disclosed embodiments, the transducers are formed as a unitary planar structure from a single piece of crystalline quartz material, and the strut is formed of the same material.

Abstract: Mechanical resonator and method in which electrodes or other driving and sensing elements are energized with an AC voltage to produce oscillations in a tine. The electrodes or other driving and sensing elements have at least two parameters which are adjusted to selectively enhance oscillations in one mode, e.g. the fundamental mode, and/or to selectively suppress oscillations in one or more other modes, e.g. an overtone mode. The parameters which can be adjusted include the endpoints of electrodes, the width of a gap between adjacent ends of electrodes, and corresponding features of other driving and sensing elements.

Abstract: Proofmass assembly for an accelerometer having transducers fabricated of crystalline quartz and other components fabricated of fused quartz. The assembly includes a main support, a frame pivotally connected to the support for pendulous movement about a hinge axis such that the frame moves with a component of motion along the sensing axis of the accelerometer, a proofmass connected to the frame for movement about a compensation axis spaced from and generally parallel to the hinge axis, and a pair of transducers connected between the proofmass and the support for sensing forces produced by acceleration of the proofmass along the sensing axis. Differences in thermal expansion between the transducers and the fused quartz components are taken up by rotation of the proofmass about the compensation axis, and the two parallel axes permit translational motion of the proofmass in response to acceleration along the sensing axis without rotation of the proofmass relative to the support.

Abstract: Crystal oscillator and method which in one embodiment have a crystal element connected in a positive feedback loop with a charge amplifier and an integrator, with the gain of the loop being maintained at a level of unity. Compensation is provided to offset the effects of shunt capacitance in the crystal element, and precise phase control is maintained around the loop. In other embodiments, a crystal element is connected in a series feedback loop with a buffer amplifier, and operation is provided by maintaining the oscillation signal at level at which distortion, clipping, and saturation do not occur. Compensation for shunt capacitance across the crystal element is provided by applying a compensation signal which is equal in amplitude but opposite in phase to the signal passing through the shunt capacitance to the input terminal of the buffer amplifier to cancel the effect of the shunt capacitance.

Abstract: A voltage-to-frequency converter provides an output signal, the frequency of which is proportional to the instantaneous level of a reference-frequency signal, which is proportional to the output signal of a parameter-sensing circuit. An up-down frequency counter counts the output pulses of the voltage-to-frequency converter. An up-down control terminal coupled to the reference-frequency signal switches the counting direction of the up-down counter to demodulate the output signal of the voltage-to-frequency converter and to provide a digital output signal representative of the time integral of the amplitude of the parameter being sensed.An undersired input signal is reduced by subtracting a cancellation signal having the format of the undesired signal from the undesired input signal. The filter includes a subtractor, or difference circuit, the output of which is coupled to a voltage-to-frequency converter.

Abstract: A method for post-production reduction of scale factor nonlinearities including testing of an assembled torque coil and magnetic circuit to determine nonlinearities. To reduce the scale factor nonlinearities, the position of a magnetic circuit component which intercepts the magnetic flux passing through a torque coil is changed. The position of the interior surface of a magnetic end cap is changed with respect to the position of the torque coil. The location of the interior surface of the end cap is varied by using an end cap having a plug portion which is selected to have an interior surface at a location which minimizes scale factor nonlinearities.An force-balance accelerometer has an improved magnetic circuit for reducing nonlinear scale factors. The magnetic circuit which provides a return path for magnetic flux from a permanent magnet source includes an end cap having an interior surface which is located at an optimum distance from the torque coil of the accelerometer to minimize scale factor distortion.

Abstract: An integrating voltage-to-frequency converter and method for converting a DSB-SC signal into a frequency-encoded signal. The DSB-SC signal is demodulated using an up/down counter, the count direction of which is alternatively switched in synchronism with the phase polarity of a reference carrier signal for the DSB-SC signal. The converter includes an integrator, a comparator, and means for rebalancing the integrator circuit. Means for tracking and storing a partial-bit analog signal level at the output of the integrator are provided, where the partial-bit analog signal level is obtained just prior to a phase transition of the reference carrier signal. The count of the up/down counter is corrected thereby to account for the partial-bit analog signal information.

Abstract: A differential capacitive pickoff detector circuit for measuring the difference in spacing of a pair of differential pickoff capacitor plates. Current sources are provided for each output terminal of each of the pair of differential capacitors so that for each capacitor output terminal a current signal alternates between a first current level and a second current level at a predetermined carrier clock switching rate. The capacitors are varied to provide DSB-LC voltage signals across each of the capacitors. The average value of each of the alternating voltages and their amplitudes are automatically adjusted to predetermined levels. The two DSB-LC voltage signals are combined to provide a DSB-SC signal. The DSB-SC signal is synchronously demodulated using a quadrature reference carrier clock signal to provide an output baseband signal which represents the difference between the spacing of the first and second differential capacitor plates.

Abstract: A series-feedback crystal oscillator has a crystal element in series with a buffer amplifier. The oscillator maintains a linear oscillation signal by using an amplitude control circuit to hold the oscillation signal to a certain level at which distortion, clipping, or saturation does not occur. A control signal indicative of the amplitude of the oscillation signal linearly multiplies the oscillation signal to control the amplitude of the oscillation signal. Shunt capacitance across the crystal is compensated for by connecting a compensating capacitor to the same input terminal of the buffer amplifier as is connected the crystal. A compensating signal, which is equal in amplitude but opposite in phase to the signal passing through the shunt capacitance of the crystal is fed to the input terminal of the buffer amplifier to cancel the effect of the shunt capacitance. A noninverted tracer signal is injected in the feedback loop and passes through the shunt capacitance.

Abstract: What is disclosed is an improved quartz flexure accelerometer including the well-known elements of a quartz reed positioned between a return path and an end cap, the return path and end cap impelling a compressive load on the reed frame as a result of an adhesive and a preload band. The improvement disclosed includes a recess at the outer periphery of the end cap, the recess defining a compliant member at the bottom of the end cap. The compliant member providing greater strain movement, enabling accurate preload setting between the compliant member of the end cap, the adhesive, the preload band, and the return path. The compliant member also providing spring action to maintain a prolonged constant compressive load on the quartz reed.