Abstract: Microvalve assemblies are disclosed that in some examples include a body including first and second ports and a body plate. The microvalve assemblies further include an actuator assembly including one or more exterior plates coupled to a stack. One of the one or more exterior plates contacts the body plate to form a seat and thereby restrict fluid flow from the first port to the second port, when the stack is not energized. Additionally, the actuator assembly is configured to, when the stack is energized, periodically generate a gap between the one of the one or more exterior plates and the body plate via near-field-acoustic-levitation (NFAL) to allow fluid flow through the first and second ports. Advantageously, the microvalves of this technology are relatively small and consume minimal power, thereby overcoming size and power limitations of existing valves, including pneumatic valve technologies.

Abstract: An actuator assembly includes one or more conductive coils each positioned in a movable supporting frame configured to be coupled to a load. A pair of permanent magnets are located on each side of each of the coils to provide opposite polarity magnetic fields to each of the coils. A drive circuit is coupled to the each of coils and configured to supply a drive current to each of the conductive coils. A controller is coupled to each of the coils through the drive circuit and is configured to independently control the drive current supplied to each of the coils to provide movement of the supporting frame to provide a force to the load, based on the opposite polarity fields and the drive current, wherein the movement of the supporting frame is in proportion to an amplitude and polarity of the drive current.

Abstract: A method and system that control a driving system to generate driving signals comprising a sequence of full bridge outputs to control an output velocity of at least one at least partially resonant actuator device. The drive system is adjusted to modify a width of one or more pulses of one of the full bridge outputs for a first range of gain or another one of the full bridge outputs for a second range of the gain to less than fifty percent of a period of the fixed drive frequency of the driving signals to achieve a new gain. The adjusted driving signal is provided to the at least one at least partially resonant actuator device.

Abstract: A semi-resonant actuator assembly includes a resonating body comprising a piezoelectric plate having a first length, a first width, and a first thickness, and an inactive plate having a second length substantially equal the first length, a second width substantially equal to the first width, and second thickness. A thickness of the resonating body is provided by a sum of the first thickness of the active piezoelectric plate and the second thickness of the inactive plate.

Abstract: A lead screw actuator device includes a base configured to support a plurality of actuators. A first bridge is supported by one of the plurality of actuators and a second bridge is supported by another one of the plurality of actuators. A nut is supported by the first bridge and the second bridge and is rotatably coupled to a screw with a sliding contact friction between the screw and the nut. The plurality of actuators generate small movements of the first bridge, the second bridge, and the nut that produce relative rotation between the nut and the screw. A method of making a lead screw actuator device is also disclosed.

Abstract: A two-axis angular pointing device includes a pivot bearing configured to support a payload. A first actuator is positioned to contact the payload at a first drive point. A second actuator is positioned to contact the payload at a second drive point. The first actuator is configured to generate a first movement of the payload in a direction substantially orthogonal to a plane defined by a center of the pivot bearing, the first drive point, and the second drive point to cause the payload to rotate around a first rotation axis. The second actuator is configured to generate a second movement of the payload at the second drive point in the direction substantially orthogonal to the plane to cause the payload to rotate around a second rotation axis. A method of making a two-axis angular pointing device is also disclosed.

Abstract: A stick-slip stage device includes a carriage assembly configured to support a payload, the carriage assembly comprising at least three piezoelectric stick-slip actuators each having one or more contact points. At least two rails are positioned on opposing sides of the carriage assembly and configured to interact with one or more of the contact points to form a guideway for movement of the carriage assembly. A fixed structure connects the at least two rails and is configured to generate a friction force between the at least two rails and one or more of the contact points of the at least three piezoelectric stick-slip actuators. A method of making a stick-slip stage device is also disclosed.

Abstract: A compact wide-angle optical beam steering device includes a first rotor with a first mirror surface and a second rotor with a second mirror surface. The rotors are arranged to rotate about an axis in response to frictionally coupled vibration motors. Drive circuits are coupled to the vibration motors and a control device is coupled to the drive circuits. The control device is configured to execute programmed instructions comprising generating and providing one or more driving signals to the vibration motors to drive the rotors to an angular position about the axes. A light source is positioned to emit a beam directed to the first mirror surface. The beam is reflected from the first mirror and contacts the second mirror. The second mirror is positioned to reflect the beam to exit the steering device at a pointing direction determined by the angular position of the mirrors.

Abstract: A rotary motor and a method of making the same include a vibrating motor body which has two orthogonal first bending modes and is substantially enclosed within a housing. A shaft is frictionally coupled to the vibrating motor body and is arranged to rotate in at least one direction about a rotation axis in response to the vibrating motor body. The shaft is frictionally coupled the vibrating motor body by a force substantially perpendicular to the rotation axis. One or more bearings support the shaft, are connected to the housing, and define the axis of rotation of the shaft.

Abstract: A compact wide-angle optical beam steering device includes a first rotor with a first mirror surface and a second rotor with a second mirror surface. The rotors are arranged to rotate about an axis in response to frictionally coupled vibration motors. Drive circuits are coupled to the vibration motors and a control device is coupled to the drive circuits. The control device is configured to execute programmed instructions comprising generating and providing one or more driving signals to the vibration motors to drive the rotors to an angular position about the axes. A light source is positioned to emit a beam directed to the first mirror surface. The beam is reflected from the first mirror and contacts the second mirror. The second mirror is positioned to reflect the beam to exit the steering device at a pointing direction determined by the angular position of the mirrors.

Abstract: A haptic actuator apparatus and a method of making the same include an ultrasonically vibrating motor and its housing. The housing includes a guide structure coupled to the ultrasonically vibrating motor and at least one spring. The guide structure defines at least one path of motion of the ultrasonically vibrating motor. The at least one spring delimits the at least one path and generates human-detectable vibrations in response to an impact with the ultrasonically vibrating motor.

Abstract: An actuator system includes an actuator device comprising at least one piezoelectric member, a driving system, and an actuator controller. The driving system drives the at least one piezoelectric member at a driving frequency. The actuator controller monitors at least one parameter of the actuator device and the direct driving system to determine an operational mechanical resonant frequency of the actuator device based on the at least one parameter. The actuator controller adjusts the driving frequency based at least in part on the determined operational mechanical resonant frequency.

Abstract: A haptic actuator system and a method of making the same include an ultrasonically vibrating motor body. A shaft is coupled to the vibrating motor body, the shaft arranged to rotate in at least one direction in response to the vibrating motor body. At least one unbalanced mass is coupled to and is moveable with the shaft to generate human-detectable vibrations in response to a motion of the shaft.

Abstract: A rotary motor and a method of making the same include a vibrating motor body which has two orthogonal first bending modes and is substantially enclosed within a housing. A shaft is frictionally coupled to the vibrating motor body and is arranged to rotate in at least one direction about a rotation axis in response to the vibrating motor body. The shaft is frictionally coupled the vibrating motor body by a force substantially perpendicular to the rotation axis. One or more bearings support the shaft, are connected to the housing, and define the axis of rotation of the shaft.

Abstract: A method, computer readable medium, and apparatus for controlling a moveable element includes generating and providing with a control device one or more driving signals to one or more positioning actuators to move the moveable element towards a target position based on a target travel distance and a calibration value. The control device determines when a post-movement position of the moveable element is outside of a tolerance range of the target position. The control device recalibrates the calibration value when the post-movement position is determined to be outside of the tolerance range. The control device repeats the generating, the determining, and the recalibrating as open loop steps until the post-movement position is within the tolerance range or until a limit, if any, on attempts is reached.

Abstract: A method, computer readable medium, and system for controlling velocity of at least partially resonant actuator system includes obtaining at an actuator controller computing system a selected operating velocity within an operational velocity range for at least one of one or more at least partially resonant actuator devices. A width of one or more pulses of a driving signal for the at least one of one or more at least partially resonant actuator devices is adjusted with the actuator controller computing system based on the selected operating velocity. The driving signal with the adjusted width of the one or more pulses is provided with the actuator controller computing system to obtain the selected operating velocity at the at least one of the one or more at least partially resonant actuator devices.

Abstract: A haptic actuator apparatus and a method of making the same include an ultrasonically vibrating motor and its housing. The housing includes a guide structure coupled to the ultrasonically vibrating motor and at least one spring. The guide structure defines at least one path of motion of the ultrasonically vibrating motor. The at least one spring delimits the at least one path and generates human-detectable vibrations in response to an impact with the ultrasonically vibrating motor.

Abstract: A method, computer readable medium, and a system for reducing power consumption of an at least partially resonant actuator system includes adjusting a driving system with an actuator controller computing device configured to provide a driving signal including a delay interval during a transition in the driving signal. The driving system provides the driving signal with the delay interval to an at least one partially resonant actuator device.

Abstract: A method, computer readable medium, and system for controlling velocity of an at least partially resonant actuator system in accordance with embodiments of the present invention includes determining with an actuator controller computing device a sequence of full bridge and half bridge outputs to control an output velocity of an at least partially resonant actuator device. The actuator controller computing device controls a driver system to output a driving signal based on the determined sequence of full bridge and half bridge outputs. The driver system provides the driving signal to the at least one at least partially resonant actuator device.

Abstract: A lens actuator module includes a lens assembly with an optical centerline and a clear aperture, a bearing guide integrated adjacent to the clear aperture with the centerline of motion substantially parallel to the optical centerline, a linear actuator with a preloaded frictional contact point that moves the lens along the centerline. The preload force is perpendicular to the optical centerline, constant and generated in-line with the contact point such that the preload force produces substantially zero additional friction in the bearing guide irrespective of the location along the optical centerline.