Abstract: In order to effect a seal a porous material which comprises one side of two opposing surfaces is used to restrict and evenly distribute externally pressurized gas, liquid, steam, etc. between the two surfaces, exerting a force which is opposite the forces from pressure differences or springs trying to close the two faces together and so may create a non-contact seal that is more stable and reliable than hydrodynamic seals currently in use. A non-contact bearing is also disclosed having opposing surfaces with relative motion and one surface issuing higher than ambient pressure through a porous restriction, wherein the porous restriction is part of a monolithic porous body, or a porous layer, attached to lands containing a labyrinth, the porous restriction and lands configured to not distort more than 10% of a gap created from differential pressure between each side of the porous restriction.

Abstract: In order to effect a seal a porous material which comprises one side of two opposing surfaces is used to restrict and evenly distribute externally pressurized gas, liquid, steam, etc. between the two surfaces, exerting a force which is opposite the forces from pressure differences or springs trying to close the two faces together and so may create a non-contact seal that is more stable and reliable than hydrodynamic seals currently in use. A non-contact bearing is also disclosed having opposing surfaces with relative motion and one surface issuing higher than ambient pressure through a porous restriction, wherein the porous restriction is part of a monolithic porous body, or a porous layer, attached to lands containing a labyrinth, the porous restriction and lands configured to not distort more than 10% of a gap created from differential pressure between each side of the porous restriction.

Abstract: A non-contact air bearing having electrostatic discharge properties may comprise: a porous media element having a bearing surface; a supply line configured supply an externally pressurize gas or fluid to the porous media; and an electrostatic dissipative porous bearing layer on the bearing surface of the porous media element; wherein the externally pressurized fluid flows through the porous media element and creates a thin film between the electrostatic dissipative layer and a substrate supported by the air bearing.

Abstract: An externally pressurized porous gas bearing for operating within a refrigerant environment is disclosed. The gas bearing utilizes shear heating from rotation of a rotor, thereby increasing the pressure and load capacity of the externally pressurized porous gas bearing. The gas bearing is capable of operating when the refrigerant is in a liquid phase and when the refrigerant is in a gaseous phase.

Abstract: In order to effect a seal a porous material which comprises one side of two opposing surfaces is used to restrict and evenly distribute externally pressurized gas, liquid, steam, etc. between the two surfaces, exerting a force which is opposite the forces from pressure differences or springs trying to close the two faces together and so may create a non-contact seal that is more stable and reliable than hydrodynamic seals currently in use. A non-contact bearing is also disclosed having opposing surfaces with relative motion and one surface issuing higher than ambient pressure through a porous restriction, wherein the porous restriction is part of a monolithic porous body, or a porous layer, attached to lands containing a labyrinth, the porous restriction and lands configured to not distort more than 10% of a gap created from differential pressure between each side of the porous restriction.

Abstract: In order to effect a seal a porous material which comprises one side of two opposing surfaces is used to restrict and evenly distribute externally pressurized gas, liquid, steam, etc. between the two surfaces, exerting a force which is opposite the forces from pressure differences or springs trying to close the two faces together and so may create a non-contact seal that is more stable and reliable than hydrodynamic seals currently in use. A non-contact bearing is also disclosed having opposing surfaces with relative motion and one surface issuing higher than ambient pressure through a porous restriction, wherein the porous restriction is part of a monolithic porous body, or a porous layer, attached to lands containing a labyrinth, the porous restriction and lands configured to not distort more than 10% of a gap created from differential pressure between each side of the porous restriction.

Abstract: A long travel aerostatic linear stage includes a plurality of rails, a plurality of planar bearing plates, and a plurality of porous media gas bearing. The plurality of planar bearing plates are aligned with and attached to the rails. Each planar bearing plate includes a plurality of metal plates having machined air bearing surfaces. The plurality of porous media gas bearings float on the bearing plates in a non-contact frictionless manner to support a traversing load and control lateral motion of the rails. The rails may include at least one rail which supports the traversing load and at least one rail which controls the lateral motion. The bearing plates are restrained and attached to the rails in a manner that ensures the planar nature of the bearing plates are maintained and the air gap is effective.

Abstract: A gas bearing assembly includes a snap joint for attaching an externally pressurized porous gas bearing to a bearing cartridge. The gas bearing assembly has an adjustment screw which supplies a gas to an end of the adjustment screw via a through bore. The externally pressurized porous gas bearing has a housing portion with a washer and a snap ring. The gas bearing assembly additionally includes an air transfer tube positioned in the end of the adjustment screw and the housing portion. The washer and the snap ring retain the housing portion on the end of the adjustment screw to removably retain the bearing on the bearing cartridge.

Abstract: A method and apparatus for coating and baking and deposition of surfaces on glass substrate or flexible substrate, such as films and thin glass sheets or other similar work pieces as it transitions thru and between small gaps of aero-static or hydro-static porous media bearings and differentially pumped vacuum grooves, in a non-contact manner, in order to process within a vacuum environment. The process is also intended to incorporate simultaneous and immediately sequential ordering of various processes.

Abstract: In order to effect a seal; a porous material which comprises one side of two opposing surfaces is used to restrict and evenly distribute externally pressurized gas, liquid, steam, etc. between the two surfaces, exerting a force which is opposite the forces from pressure differences or springs trying to close the two faces together and so may create a non contact seal that is more stable and reliable than hydrodynamic seals currently in use.

Abstract: A method and apparatus for cleaning, drying, coating, baking etching and deposition of surfaces on glass substrate as it transitions thru and between small gaps between hydro-static porous media bearings. Due to the non-contact nature of the device extremely high pressures can be induced upon the work piece through various fluids without damage to the substrate, allowing the system to utilize the viscous nature of fluids to accomplish the desired cleaning, drying, coating, etching or baking. The process also allows for simultaneous and immediately sequential ordering of processes.

Abstract: Thin substrates, such as flat glass panels, are levitated on a porous media air bearing creating a pressurized film of air and preloaded against the air film by negative pressure areas. The pressure can be distributed most uniformly across the pressure areas by defusing the pressure through a porous medium. Such a bearing can be used for glass flattening by holding the glass such that the unevenness is migrated to the side opposite the side to be worked on.

Abstract: A method and apparatus for cleaning, drying, coating, baking etching and deposition of surfaces on glass substrate as it transitions thru and between small gaps between hydro-static porous media bearings. Due to the non-contact nature of the device extremely high pressures can be induced upon the work piece through various fluids without damage to the substrate, allowing the system to utilize the viscous nature of fluids to accomplish the desired cleaning, drying, coating, etching or baking. The process also allows for simultaneous and immediately sequential ordering of processes.

Abstract: A stage for processing a substrate, especially useful for vacuum applications, has a recess just large enough to hold a substantially flat substrate and a chuck or holder, but not much more. The perimeter of both top and bottom of the stage has air bearing surfaces separated from the recess by differentially pumped grooves and seal lands. The air bearing lands are guided between two reference surfaces and the seal lands, being substantially coplanar, create a resistance to flow between the bearings and the recess. On the other side of one of the reference plates mounts the radiation source or process. The opposite reference plate may have a large aperture, non-contact pumping port. This improves vacuum capability and stage precision. The stage may operate in a vacuum environment itself or can provide multiple stages moving between processes or inspection steps within the same tool or process sequence.

Abstract: A stage for processing a substrate, especially useful for vacuum applications, has a recess just large enough to hold a substantially flat substrate and a chuck or holder but not much more. The perimeter of the recessed side has an air bearing surface separated from the recess by differentially pumped groves and seal lands. The air bearing lands are urged against a reference plate guide surface and the seal lands being substantially coplanar create a resistance to flow between the groves and recess, on the other side of the base reference plate mounts the radiation source. The VCS may operate in a vacuum environment itself, or in another preferred embodiment, it provides the possibility for multiple stages moving between process or inspection steps within the same tool or process sequence.