Abstract: The present application discloses various embodiments of a laser amplifier system utilizing multiple end pump spots to pump an optical crystal during the amplification process which includes a telecentric telescope configured to magnify each individual pump beamlet and output the magnified pump beamlets such that the pump beamlets remain parallel and substantially non-divergent incident on an optical crystal positioned within a resonator-like thereby permitting the construction of a compact laser amplifier system.

Abstract: The present application discloses various embodiments of a high-resolution spectrograph. In one embodiment, the high-resolution spectrograph includes a light source, a housing, at least one adjustment device secured to the housing, and an optical detector secured to the adjustment device. At least one dispersive optical element is positioned in optical communication with the light source and the optical detector, wherein the dispersive optical element is configured to diffract at least a portion of an incident optical signal from the light source as a diffracted optical signal propagating toward the optical detector, wherein the optical detector is configured to measure at least one property at least one wavelength component of the diffracted optical signal. The adjustment device is configured to change the position of the optical detector relative to the dispersive optical element to optimize the image width of the wavelength component of the diffracted optical signal.

Abstract: A system for outputting partially spatially coherent light to an imaging system is disclosed herein, which includes a spatially coherent light source configured to output a spatially coherent signal, at least one optical device having an optical device body with a first device surface formed thereon and configured to reflect a portion of the spatially coherent signal to form at least one coherent reflected signal. The optical device body also includes a second device surface having one or more surface irregularities configured to diffuse a portion of the spatially coherent light source output signal transmitted through the optical device body, to produce at least one spatially incoherent signal. The combination of the coherent reflected signal and the spatially incoherent signal form the partially spatially coherent light signal.

Abstract: The present application discloses a multi-axis motion system and methods of use, using an air bearing configured to position a semiconductor wafer chuck support relative to an inspection device. The air bearing includes a vacuum clamping function operative to secure the wafer chuck support to a surface formed on the underside of a structure that houses the inspection device. In one embodiment, the system includes a first positioner operative to position a carriage assembly in a first direction, the carriage assembly including a second positioner and a third positioner operative to selectively and independently travel in a second direction orthogonal to the first direction. The chuck support is secured to the positioners by one or more pivoting decoupling systems configured to transmit actuation forces from the positioners in the first and second directions, allowing the chuck support to be decoupled from the positioners when the chuck support is vacuum clamped to the underside of the structure.

Abstract: A high responsivity, high bandwidth photodiode is disclosed which includes at least one substrate, at least one n+ type layer may be formed on the at substrate and configured to receive at least a portion of an incident optical signal from the substrate, at least one supplemental layer formed on the n+ type layer and configured to receive at least a portion of the incident optical signal from the n+ type layer, at least absorbing layer formed on the supplemental layer and configured to receive at least a portion of the incident optical signal from the supplemental layer, at least one angled facet formed on the substrate and configured to direct at least a portion of the incident optical signal to at least one of the n+ type layer, the supplemental layer, and the absorbing layer at angle of incidence from 15° to 89° from a normal angle of incidence.

Abstract: The present application discloses embodiments of a mount for optical components configured to secure thin optical components while minimizing wavefront distortion effects. The optical mount may include at least one mount body with at least one optical component receiving recess formed therein, the at least one optical component receiving recess configured to receive at least one optical component therein, the optical component having at least one edge. The mount may include one or more elastomeric retention members configured to exert at least one compliant retention force to the edge of the optical component, thereby securely retaining the optical component within the optical component receiving recess.

Abstract: A laser system having a multi-pass amplifier system which includes at least one seed source configured to output at least one seed signal having a seed signal wavelength, at least one pump source configured to output at least one pump signal, at least one multi-pass amplifier system in communication with the seed source and having at least one gain media, a first mirror, and at least a second mirror therein, the gain media device positioned between the first mirror and second mirror and configured to output at least one amplifier output signal having an output wavelength range, the first mirror and second mirror may be configured to reflect the amplifier output signal within the output wavelength range, and at least one optical system may be in communication with the amplifier system and configured to receive the amplifier output signal and output an output signal within the output wavelength range.

Abstract: The present application discloses a modular broadband light source and includes at least one lamp housing defining at least one lamp body receiver having at least one outlet port formed on the lamp housing, at least one lamp body insert positionable within the body insert receiver and configured to detachably couple to the lamp housing, at least one thermal managing assembly coupled to the lamp body insert and defining a lamp receiving area, at least one Xenon arc lamp positionable in the lamp receiving area and in communication with the outlet port on the lamp housing, at least one processor device coupled to at least one of the at least one lamp housing, the at least one lamp body insert and the at least one Xenon arc lamp.

Abstract: The disclosure relates to an apparatus for mounting optical components in a manner that self-aligns the optical axes of the optical components. The apparatus uses an optical component mount that includes a housing consisting of a single rail mount configured to mechanically couple to a portion of a rail for supporting the optical component mount on a rail. The housing also has an optical component dock configured to support an optical component in a manner that defines an optical axis. The rail mount and the optical component dock are configured to make the optical axis substantially parallel with a longitudinal axis of the rail. Using such optical component mounts secured to the rail would result in the self-alignment of the optical axes of optical components on the optical component mounts. Various embodiments of such apparatus are also provided in the disclosure.

Abstract: The disclosure relates to an apparatus for mounting optical components in a manner that self-aligns the optical axes of the optical components. The apparatus uses an optical component mount that includes a housing consisting of a single rail mount configured to mechanically couple to a portion of a rail for supporting the optical component mount on a rail. The housing also has an optical component dock configured to support an optical component in a manner that defines an optical axis. The rail mount and the optical component dock are configured to make the optical axis substantially parallel with a longitudinal axis of the rail. Using such optical component mounts secured to the rail would result in the self-alignment of the optical axes of optical components on the optical component mounts. Various embodiments of such apparatus are also provided in the disclosure.

Abstract: The present application is directed to an improved immersion grating assembly that provides additional wavelength dispersion and higher optical efficiency at ultraviolet wavelengths relative to prior art devices. More specifically, the immersion grating disclosed herein may be used to narrow the spectrum of light emitted by excimer laser systems. Narrower spectral linewidth of excimer laser systems may enable the creation of smaller feature sizes in semiconductor structures manufactured using UV photolithography processes.

Abstract: A high-power ytterbium-doped calcium fluoride laser system is disclosed herein which includes at least one pump source, at least one laser cavity formed by at least one high reflector and at least one output coupler, and at least one ytterbium-doped calcium fluoride optical crystal positioned within the laser cavity in communication with the pump source, the ytterbium-doped calcium fluoride optical crystal configured to output at least one output signal of at least 20 W, having a pulse width of 200 fs or less, and a repetition rate of at least 40 MHz.

Abstract: A lens system for use with a high laser power density scanning system is disclosed and includes a first lens group having one or more refractive optical elements therein. The first lens group is in communication with at least one high average power laser scanning system and is configured to transmit at least one high average laser power density signal there through. At least a second lens group having one or more refractive optical elements therein is in communication with the laser scanning system via the first lens group. The second lens group is configured to transmit the high average laser power density signal there through. At least one diffractive optical element may be in communication with at least one of the first lens group and the second lens group and is configured to transmit the at least one high average laser power density signal there through.

Abstract: A novel multi-junction detector device and method of manufacture is disclosed, which includes providing a housing, at least one system mount body positioned within the housing, forming at least one beam dump region in the system mount body in optical communication with at least one first detector having a first wavelength responsivity range positioned on the system mount body and at least one second detector having a second wavelength responsivity range positioned on the system mount body in optical communication with the first detector. An arcuate shape, an arcuate shape of varying radius, a polygonal shape or a polyhedral shape may be formed on at least one mount body wall in the beam dump region. The method may also comprise depositing at least one reflectivity enhancing material onto the mount body wall. The method may further comprise depositing an energy dissipating material on the mount body wall.

Abstract: The present application discloses a modular broadband light source and includes at least one lamp housing defining at least one lamp body receiver having at least one outlet port formed on the lamp housing, at least one lamp body insert positionable within the body insert receiver and configured to detachably couple to the lamp housing, at least one thermal managing assembly coupled to the lamp body insert and defining a lamp receiving area, at least one Xenon arc lamp positionable in the lamp receiving area and in communication with the outlet port on the lamp housing, at least one processor device coupled to at least one of the at least one lamp housing, the at least one lamp body insert and the at least one Xenon arc lamp.

Abstract: A high responsivity, high bandwidth photodiode is disclosed which includes at least one substrate, at least one n+ type layer may be formed on the at substrate and configured to receive at least a portion of an incident optical signal from the substrate, at least one supplemental layer formed on the n+ type layer and configured to receive at least a portion of the incident optical signal from the n+ type layer, at least absorbing layer formed on the supplemental layer and configured to receive at least a portion of the incident optical signal from the supplemental layer, at least one angled facet formed on the substrate and configured to direct at least a portion of the incident optical signal to at least one of the n+ type layer, the supplemental layer, and the absorbing layer at angle of incidence from 15° to 89° from a normal angle of incidence.

Abstract: The present application discloses a method of using a LED-based solar simulator light source having at least one LED array formed by multiple LED groups of LED assemblies, at least one field flattening device, at least one diffractive element, and at least one optical element configured to condition the broad spectrum light source output signal and direct the light source output signal to a work surface.

Abstract: Systems and methods for shifting a position of one or more optical elements are disclosed. In an embodiment, a system may include a housing having a chamber formed therein, at least one non-linear crystal disposed in the chamber, the non-linear crystal configured to receive at least one incident signal and to convert a wavelength of at least a portion of the incident signal, and at least one shape memory alloy element disposed such that thermal or electrical energy applied to the shape memory alloy causes movement of the non-linear crystal.

Abstract: A novel multi-junction detector device and method of use is disclosed, which includes a housing, at least one mount system body positioned within the housing, at least one beam dump region formed in the mount system body, with a first detector having a first wavelength responsivity range positioned on the mount system body and at least a second detector having a second wavelength responsivity range positioned on the mount system body in optical communication with the first detector.

Abstract: The present application is directed to various embodiments of optical components having hybrid nano-textured anti-reflective coatings applied thereto which includes at least one substrate having at least one substrate body defining at least one surface, at least one layer may be applied to a surface of the substrate body, and at least one nano-textured surface formed on least one layer applied to the surface of the substrate body.