Abstract: A probe assembly and a micro vacuum probe station comprising same are disclosed. A probe assembly according to one embodiment may comprise: a base; a guide rail installed on the base; a guide member sliding along the guide rail; a probe connected to the guide member and of which one side contacts a wafer to inspect electrical properties of the wafer; and a thin film connector connected to the other side of the probe so as to supply electricity to the probe.
Type:
Grant
Filed:
May 7, 2019
Date of Patent:
January 9, 2024
Assignee:
NEXTRON CORPORATION
Inventors:
Hakbeom Moon, Yunhyeong Jang, Jisu Seong, Nakyeong Kim
Abstract: The instant pulse filter according to the present invention, which may cause a malfunction or a short life span of a semiconductor device, is made using an aluminum anodic oxidation, comprising—a first step for forming an aluminum thin film layer on an upper side of an insulator substrate; a second step for forming an aluminum oxide thin film layer having a pore by oxidizing the aluminum thin film layer by means of an anodic oxidation; a third step for depositing a metallic material on an upper side of the aluminum thin film layer for filling the pore; a fourth step for forming a nano rod in the interior of the aluminum oxide thin film layer by eliminating the metallic material deposited except in the pore; a fifth step for forming an internal electrode on an upper side of the aluminum oxide thin film layer having the nano rod; a sixth step for forming a protective film layer on an upper side of the same in order to protect the aluminum oxide thin film layer and the internal electrode from the external enviro
Type:
Grant
Filed:
April 3, 2009
Date of Patent:
March 6, 2012
Assignee:
Nextron Corporation
Inventors:
Hak Beom Moon, Jin Hyung Cho, Suc Hyun Bang, Cheol Hwan Kim, Yoon Hyung Jang