Patents Assigned to NGK Indulators, LTD
  • Method of manufacturing a piezoelectric device
    Patent number: 6584660
    Abstract: A method for making a piezoelectric device wherein residual stresses in the piezoelectric transducer element of the piezoelectric device are relieved by forming a groove or grooves extending into a thick-walled region of the peripheral wall of a ceramic substrate in the piezoelectric device. The stresses to be relieved are caused by a difference in shrinkage between the ceramic substrate and the piezoelectric transducer as a result of sintering the substrate and the transducer to form an integral product.
    Type: Grant
    Filed: June 8, 1994
    Date of Patent: July 1, 2003
    Assignees: NGK Indulators, LTD, Seiko Epson Corp.
    Inventors: Natsumi Shimogawa, Koji Kimura, Yukihisa Takeuchi